Design and Implementation of a Novel “polymer Joint” for Thermal Actuator Current and Thermal Isolation

Chih-Chun Lee,Wen‐Chih Chen,Sz-Yuan Lee,Weileun Fang
DOI: https://doi.org/10.1109/memsys.2010.5442543
2010-01-01
Abstract:This study presents a novel thermal isolation component "polymer joint" to reduce the current and heat flow (by conduction) between micro thermal actuators. An optical stage consisted of V-beam thermal actuators for optical-tracking and thermal-driven focal-length tunable micro polymer lens for optical-focusing is employed to demonstrate the present concept. To overcome the thermal coupling of these two actuators by heat-conduction, the two components fabricated by SOI wafer (Si˜150 W/m-k) are connected by the low thermal conductivity joints (polymer˜0.2 W/m-k). The displacement provides by the V-beam actuator is about ±13μm. The temperature difference is about 80°C measurement by infrascope. The variation of micro lens radius of curvature is about 1%.
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