High-performance (K,na)nbo3-Based Multilayer Piezoelectric Ceramic Actuators with Nickel Inner Electrodes

Yu Huan,Limin Hou,Tao Wei,Fenghua Jiang,Ting Wang,Longtu Li,Xiaohui Wang
DOI: https://doi.org/10.26599/jac.2023.9220752
IF: 11.534
2023-01-01
Journal of Advanced Ceramics
Abstract:Multilayer ceramic actuator (MLCA) has been widely employed in actuators due to the large cumulative displacement under the low driving voltage. In this work, the MLCA devices consisting of a lead-free MnCO3- and CuO-doped 0.96(K0.48Na0.52)(Nb0.96Ta0.04)O-3-0.04CaZrO(3) piezoelectric ceramics and a base nickel (Ni) metal inner electrode were well co-fired by the two- step sintering process in a reducing atmosphere. The ceramic layer/electrode interface is well-integrated and clearly continuous without distinct interdiffusion and chemical reaction, which is beneficial to the electrical reliability of the MLCA. As a result, the MLCA laminated with nine active ceramic layers obtains an ultrahigh piezoelectric coefficient d(33) of 3157 pC/N, about 9 times than bulk ceramics. The 0.5 mm-thick MLCA composed of a series of similar to 50 mu m-thick ceramic layers and similar to 3 mu m-thick Ni electrodes reaches a high 1.8 mu m displacement under the low applied voltage of 200 V (the same displacement requires a voltage as high as 3700 V for similar to 1 mm-thick bulk ceramics). The excellent electrical performance and low-cost base electrode reveal that the (K,Na)NbO3 (KNN)-based MLCAs are promising lead-free candidate for actuator application.
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