Laser Direct Writing of Sol-Gel-Derived Vacancy-Rich Functional Oxide Semiconductors.

Jing Long,Xi Chen,Tianli Mao,Songyan Xue,Yingchen Wang,Yinuo Xu,Wenbo Pi,Jinbo Lu,Wei Luo,Wei Xiong
DOI: https://doi.org/10.1021/acsnano.2c12163
IF: 17.1
2023-01-01
ACS Nano
Abstract:Fabricating micro/nanostructures of oxide semiconductorswith oxygenvacancies (OVs) is crucial for advancing miniaturized functional devices.However, traditional methods for the synthesis of semiconductor metaloxides (SMOs) with OVs usually involve thermal treatment, such asannealing or sintering, under anaerobic conditions. Herein, a multiphoton-inducedfemtosecond laser (fs) additive manufacturing method is reported fordirectly writing micropatterns with high resolution (similar to 1 mu m)and abundant OVs in an atmospheric environment at room temperature(25 degrees C). The interdigitated functional devices fabricated bythese micropatterns exhibit both photosensitivity and gas sensitivity.Additionally, this method can be applied to flexible and rigid substrates.The proposed method realizes the high-precision fabrication of SMOswith OVs, enabling the future heterogeneous integration of oxide semiconductorson various substrates, especially flexible substrates, for variousdevice applications, such as soft and wearable electronics/optoelectronics.
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