Cleanroom‐Free Direct Laser Micropatterning of Polymers for Organic Electrochemical Transistors in Logic Circuits and Glucose Biosensors
Alessandro Enrico,Sebastian Buchmann,Fabio De Ferrari,Yunfan Lin,Yazhou Wang,Wan Yue,Gustaf Mårtensson,Göran Stemme,Mahiar Max Hamedi,Frank Niklaus,Anna Herland,Erica Zeglio
DOI: https://doi.org/10.1002/advs.202307042
IF: 15.1
2024-01-17
Advanced Science
Abstract:Ultrafast focused femtosecond laser has been introduced for the direct micropatterning of organic electrochemical transistors (OECTs), providing high resolution (2 μm), selective cleanroom‐free patterning of insulating and conjugated polymer layers while preserving device operation, and high flexibility in device design. The approach has been validated in the fabrication of complementary inverters and glucose biosensors. Organic electrochemical transistors (OECTs) are promising devices for bioelectronics, such as biosensors. However, current cleanroom‐based microfabrication of OECTs hinders fast prototyping and widespread adoption of this technology for low‐volume, low‐cost applications. To address this limitation, a versatile and scalable approach for ultrafast laser microfabrication of OECTs is herein reported, where a femtosecond laser to pattern insulating polymers (such as parylene C or polyimide) is first used, exposing the underlying metal electrodes serving as transistor terminals (source, drain, or gate). After the first patterning step, conducting polymers, such as poly(3,4‐ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS), or semiconducting polymers, are spin‐coated on the device surface. Another femtosecond laser patterning step subsequently defines the active polymer area contributing to the OECT performance by disconnecting the channel and gate from the surrounding spin‐coated film. The effective OECT width can be defined with high resolution (down to 2 μm) in less than a second of exposure. Micropatterning the OECT channel area significantly improved the transistor switching performance in the case of PEDOT:PSS‐based transistors, speeding up the devices by two orders of magnitude. The utility of this OECT manufacturing approach is demonstrated by fabricating complementary logic (inverters) and glucose biosensors, thereby showing its potential to accelerate OECT research.
materials science, multidisciplinary,nanoscience & nanotechnology,chemistry