Delamination of MoS2/SiO2 interfaces under nanoindentation

Jin Ke,Penghua Ying,Yao Du,Bo Zou,Huarui Sun,Jin Zhang

DOI: https://doi.org/10.1039/d2cp00074a

IF: 3.3

2022-01-01

Physical Chemistry Chemical Physics

Abstract:The MoS2/SiO2 and graphene/SiO2 systems under indentation are found to possess very different mechanical responses and failure modes.

What problem does this paper attempt to address?

Delamination of MoS2/SiO2 Interfaces under Nanoindentation.

Jin Ke,Penghua Ying,Yao Du,Bo Zou,Huarui Sun,Jin Zhang

DOI: https://doi.org/10.1039/d2cp00074a

IF: 3.3

2022-01-01

Physical Chemistry Chemical Physics

Abstract:Molybdenum disulphide (MoS2) mounted on silicon dioxide (SiO2) constitutes the fundamental functional components of many nanodevices, but its mechanical properties, which are crucial for the device design and fabrication, remain almost unexplored. Here, the mechanical properties of the multilayer MoS2/SiO2 system are investigated via nanoindentation experiments and molecular dynamics simulations. In terms of the mechanical properties, a comparative study of MoS2/SiO2 and graphene/SiO2 systems is presented. The MoS2/SiO2 and graphene/SiO2 systems are found to possess comparable Young's modulus and hardness values, but their mechanical responses and failure modes under indentation are totally different. Interface delamination failure accompanied by ring-like through-thickness cracking is observed in the MoS2/SiO2 system with a relatively thin MoS2 layer, while no interface separation is found in indentation experiments for the graphene/SiO2 system using the same layer thickness. The different failure modes observed between the MoS2/SiO2 and graphene/SiO2 systems can be attributed to the comparable interface adhesion energy but very different bending stiffness values of the MoS2 and graphene components. Specifically, compared with graphene, the larger bending stiffness of MoS2 means that a larger bending force is experienced in the indentation process, overcoming the adhesion of the MoS2/SiO2 interface, which makes interface delamination much easier in the MoS2/SiO2 system.
Natural Overlaying Behaviors Push the Limit of Planar Cyclic Deformation Performance in Few‐layer MoS2 Nanosheets

Peifeng Li,Guangjie Zhang,Zhuo Kang,Xin Zheng,Yong Xie,Chunyuan Liang,Yizhi Zhang,Xiaoyang Fang,Rong Sun,Zhiquan Liu,Yeqiang Bu,Yang Lu,Yue Zhang

DOI: https://doi.org/10.1002/inf2.12457

2023-01-01

InfoMat

Abstract:As a typical two-dimensional (2D) transition metal dichalcogenides (TMDCs) material with nonzero band gap, MoS2 has a wide range of potential applications as building blocks in the field of nanoelectronics. The stability and reliability of the corresponding nanoelectronic devices depend critically on the mechanical performance and cyclic reliability of 2D MoS2. Although an in situ technique has been used to analyze the mechanical properties of 2D materials, the cyclic mechanical behavior, that is, fatigue, remains a major challenge in the practical application of the devices. This study was aimed at analyzing the planar cyclic performance and deformation behavior of three-layer MoS2 nanosheets (NSs) using an in situ transmission electron microscopy (TEM) variable-amplitude uniaxial low-frequency and cyclic loading-unloading tensile acceleration test. We also elucidated the strengthening effect of the natural overlaying affix fragments (other external NSs) or wrinkle folds (internal folds from the NS itself) on cycling performances and service life of MoS2 NSs by delaying the whole process of fatigue crack initiation, propagation, and fracture. The results have been confirmed by molecular dynamics (MDs) simulations. The overlaying enhancement effect effectively ensures the long-term reliability and stability of nanoelectronic devices made of few-layer 2D materials.
In-situ Investigation of the Elastic Behavior of Two-Dimensional MoS2 on Flexible Substrate by Nanoindentation

Hanjun Jiang,Lu Zheng,Yuan Wei,Xuewen Wang

DOI: https://doi.org/10.1088/1361-6463/ac2275

2021-01-01

Abstract:Mechanical properties are a crucial factor for the application of two-dimensional (2D) materials in flexible electronic and optoelectronic devices. Until now, mechanical properties of 2D materials have been primarily investigated from the load–deformation relationship of freely suspended 2D nanofilms by in-situ atomic force microscope probe nanoindentation measurements. Herein, we acquired the mechanical behavior of monolayer and few-layer molybdenum disulfide (MoS2) via applying a point load on 2D MoS2 on a soft poly-dimethylsiloxane (PDMS) substrate. The primary objective of this work is to study the elastic behavior of 2D MoS2 based on the indentation deformation of the 2D MoS2/PDMS substrate. Nanoindentation behavior of 2D MoS2 mounted on PDMS substrate is also simulated by finite element method. Combining nanoindentation experiments with theoretical simulations, we can understand the mechanical behavior of 2D materials on flexible substrates perfectly well. This work provides a new method to characterize the mechanical response of atomically ultrathin 2D nanofilms with substrate-binding effect, which is essential to promote flexible devices based on functional 2D materials.
Electromechanical Failure of MoS2 Nanosheets.

Peng Huang,Dan Guo,Guoxin Xie,Jian Li

DOI: https://doi.org/10.1039/c8cp01739e

2018-01-01

Abstract:This manuscript clearly illuminates the electromechanical failure mechanism of MoS2 nanosheets with the conductive AFM nanoindentation method.
In Situ Nanomechanical Characterization of Multi-Layer MoS2 Membranes: from Intraplanar to Interplanar Fracture.

Peifeng Li,Chenchen Jiang,Shang Xu,Yu Zhuang,Libo Gao,Alice Hu,Hongtao Wang,Yang Lu

DOI: https://doi.org/10.1039/c7nr02171b

IF: 6.7

2017-01-01

Nanoscale

Abstract:Layered molybdenum disulfide (MoS2) exhibits rich electronic and optical properties and possesses vastly differing characteristic dimensions. A multi-layer MoS2 membrane represents the critical hierarchical structure which bridges the length-scale of monolayer and bulk material architectures. In this study, the in-plane mechanical properties of MoS2 membranes were investigated by in situ SEM tensile testing. Under the uniaxial tensile loading, brittle fracture caused failure in a highly localized region of the MoS2 membranes and their mechanical properties showed a thickness effect: the strengths of the relatively thicker MoS2 membranes (thickness around hundreds of nanometers) distribute from ∼100 to ∼250 MPa, while the corresponding values of the MoS2 nanosheets (thickness around tens of nanometers) increase significantly to more than 1 GPa. Upon molecular dynamics (MD) simulations on the fractures of MoS2 with various thicknesses/layers, the thicker MoS2 membranes show interplanar fracture, and the typical MoS2 nanosheets demonstrate the transition from interplanar to intraplanar fractures, while monolayer and few-layer MoS2 are dominated by intraplanar fracture. Our study provides some critical insights into the mechanical properties and fracture behavior of layered MoS2 2D materials, which could be of value for their flexible electronic, optoelectronic and nano-electro-mechanical system (NEMS) applications.
Mechanical Behaviors of MoS Nanowires under Tension from Molecular Dynamics Simulations

Penghua Ying,Jin Zhang,Jianli Zhou,Qixin Liang,Zheng Zhong

DOI: https://doi.org/10.1016/j.commatsci.2020.109691

IF: 3.572

2020-01-01

Computational Materials Science

Abstract:As a new class of one-dimensional (1D) transition-metal monochalcogenides (TMMs) nanowires (NWs), the recently synthesized MoS NWs exhibit potential applications in two-dimensional integrated circuit. However, their mechanical behaviors remain almost unexplored. In this paper, the mechanical behaviors of MoS NWs under tensile loading are studied by classical molecular dynamics simulations together with first-principles calculations. A novel phase transformation is observed in the MoS NWs when the strain applied to them is larger than a critical value, which results in tension-induced hardening in their tensile modulus. Due to the existence of phase transformation, a complicated mechanical response is observed in MoS NWs during the entire loading process, which successively experiences the linear, plateau, stress hardening and fracture stages. The influence of various factors including the strain rate and temperature on the mechanical properties of MoS NWs such as phase transformation, Young's modulus, fracture strength and fracture strain are also examined. The mechanical properties of MoS NWs obtained in this paper will be beneficial to their future applications in the semiconducting field. It is also expected that the results of the tension-induced phase transformation and its influence on the material properties observed in the present MoS NWs can be further extended to other 1D TMMs such as MoTe and SnSe NWs, since these 1D TMMs are found to possess the similar structure.
Determining the Interlayer Shearing in Twisted Bilayer MoS2 by Nanoindentation

Yufei Sun,Yujia Wang,Enze Wang,Bolun Wang,Hengyi Zhao,Yongpan Zeng,Qinghua Zhang,Yonghuang Wu,Lin Gu,Xiaoyan Li,Kai Liu

DOI: https://doi.org/10.1038/s41467-022-31685-7

IF: 16.6

2022-01-01

Nature Communications

Abstract:The rise of twistronics has increased the attention of the community to the twist-angle-dependent properties of two-dimensional van der Waals integrated architectures. Clarification of the relationship between twist angles and interlayer mechanical interactions is important in benefiting the design of two-dimensional twisted structures. However, current mechanical methods have critical limitations in quantitatively probing the twist-angle dependence of two-dimensional interlayer interactions in monolayer limits. Here we report a nanoindentation-based technique and a shearing-boundary model to determine the interlayer mechanical interactions of twisted bilayer MoS2. Both in-plane elastic moduli and interlayer shear stress are found to be independent of the twist angle, which is attributed to the long-range interaction of intermolecular van der Waals forces that homogenously spread over the interfaces of MoS2. Our work provides a universal approach to determining the interlayer shear stress and deepens the understanding of twist-angle-dependent behaviours of two-dimensional layered materials.
Surface and interface mechanical properties of inorganic nanolayers

Chia-Wei Huang,Tang-Yu Lai,Te-Hua Fang

DOI: https://doi.org/10.35848/1347-4065/ad2031

IF: 1.5

2024-02-09

Japanese Journal of Applied Physics

Abstract:This study investigates the effects of the indenter on nickel coated by MoS2 during nanoindentation and nanoscratch through molecular dynamics simulations. The effects of indenter size, indenter shape, and scratch angle on the deformation and wear mechanisms of the material were studied. The results show that the size and shape of the indenter have significant effects under nanoindentation and scratching. A larger indenter size can lead to a larger deformation zone and more dislocations inside the workpiece, and the friction coefficient also decreases as the radius of the indenter increases. The friction coefficient at different scratch angles is not significantly different, indicating that in the monolayer of MoS2 coating, it is weakly dependent on the lattice orientation. In addition, different indenter shapes will cause differences in stress concentration and penetration depth inside the workpiece. The trapezoidal indenter also shows a higher friction coefficient and wear rate.

physics, applied
Research of Delamination Phenomenon Under Nanoindentation on Cu/Ta/SiO2/Si Thin Film

Zijing Wu,Xiaojing Wu,Qian Lu,Weidian Shen,Bin Jiang

DOI: https://doi.org/10.3969/j.issn.1003-353X.2008.09.014

2008-01-01

Abstract:Ta layer 50 nm thick and Cu layer 400 nm thick were sputtered on thermal silicon dioxide surface.Nanoindentation test was conducted on the sample surface by nanohardness tester to produce residual indents on the thin film.Scanning electron microscope(SEM),focused ion beam(FIB),transmission electron microscope(TEM) and energy dispersive X-ray analysis(EDX) were adopted to observe the residual indent and determine the place of delamination.It was found that delamination occurred at Ta/SiO2 interface with a maximum load of 69 mN.The different strain and the ability of elastic recovery of each material under stress were supposed to be the main reason of the delamination.
Tensile Mechanical Properties Study of SiC/graphene Composites Based on Molecular Dynamics

J. M. Zhan,X. H. Yao,W. H. Li,X. Q. Zhang

DOI: https://doi.org/10.1016/j.commatsci.2017.02.006

IF: 3.572

2017-01-01

Computational Materials Science

Abstract:The mechanical properties of the SiC/graphene composites under tensile are studied via molecular dynamics (MD) methods. In our study, the SiC/graphene composites with monolayer graphene and multilayer graphene are built and compared. As a result, the composites with different interface structures present different tensile behaviors. The single graphene sheet in contact with Si-terminated SiC(111) surface brings the higher failure strain and strength. It is also found that the elastic modulus of the composites increase with the increasing graphene volume fraction. As for the composites fabricated with the multilayers graphene, the failure strain of the whole systems would decrease with the increasing graphene layers in the case that graphene serves as single layer. By contrast, when the graphene sheets serve as continuous layers, the failure strain does not change significantly and the strength would increase monotonically with the increasing number of graphene layers. (C) 2017 Elsevier B.V. All rights reserved.
Wrinkling and failure behavior of single-layer MoS 2 sheets under in-plane shear.

Yao Li,Peijian Chen,Hao Liu,Juan Peng,Feng Gao,Ning Luo

DOI: https://doi.org/10.1039/c9cp03487k

IF: 3.3

2019-01-01

Physical Chemistry Chemical Physics

Abstract:In this paper, the wrinkling and failure behavior of single layer MoS2 (SLMoS2) sheets under in-plane shear is investigated using molecular simulations and the nonlocal model. Wrinkling and failure features, such as the stress-strain relation, the amplitude and the half-wavelength, are comprehensively explored. The effects of size, temperature and pre-existing cracks on the wrinkling and failure behavior are then taken into consideration. It is found that the whole process can be divided into three stages, i.e., the pre-buckling stage, the buckling stage and the failure stage. The classical continuum model is found to be limited in quantitatively analyzing the wrinkling behavior due to the lack of size effect. The nonlocal parameter, a key parameter to characterize the size effect, is first reported. What is more, compared with edge cracks, SLMoS2 sheets are more sensitive to pre-existing centre cracks. This work can provide a better understanding of the wrinkling and failure properties of SLMoS2 sheets under shear loads, and should be helpful for developing various flexible electronic devices.
A Probe into Mechanical Properties of Graphene/SiC Composites Based on Molecular Dynamics

Jia-ming ZHAN,Xiao-hu YAO,Wang-hui LI

DOI: https://doi.org/10.3969/j.issn.1000-565X.2017.05.019

2017-01-01

Abstract:In order to discover the underlying mechanisms of tensile fracture of composites, the tensile mechanical properties of graphene/SiC composites are simulated on the basis of molecular dynamics (MD).The results show that (1) the interface between graphene and SiC may affect the mechanical properties of the whole composite systems;(2) in comparison with the damage of bulk SiC systems, the damage of the composites tends to nucleate and grow on the interface in the tension process;(3) graphene/SiC composites with different interface structures po-ssess different mechanical behaviors due to the various interaction between graphene and SiC;and (4) in comparison with the contact of grapheme sheet with C surface, the direct contact of single graphene sheet with Si in the substrate results in higher strength and failure strain.
A Molecular Dynamics Study of Mechanical Properties of Vertically Stacked Silicene/MoS2 van der Waals Heterostructure

Bishwajit Kar,Plabon Paul,Md Arshadur Rahman,Mohammad Jane Alam Khan

2024-01-06

Abstract:Silicene is an intriguing silicon allotrope with a honeycomb lattice structure similar to graphene with slightly buckled geometry. Molybdenum disulfide (MoS2), on the other hand, is a significant 2D transition metal dichalcogenide that has demonstrated promise in a variety of applications. Van der Waals heterostructures, which are created by stacking distinct 2D crystals on top of each other, are becoming increasingly important due to their unique optoelectronic and electromechanical properties. Using molecular dynamics simulations, the mechanical characteristics of vertically stacked Silicene/MoS2 van der Waals heterostructures are examined in this study. The response and structural stability of the heterostructures at various loading orientations and temperatures are given particular attention. The research findings highlight that the fracture strength of the Silicene/MoS2 heterostructure decreases by 40% in both armchair and zigzag orientations when the temperature is raised from 100K to 600K. Furthermore, a linear decrease in Young's modulus is observed as temperature rises. It is noteworthy that the Rule of Mixture (ROM) predictions for Young's Moduli are observed to be marginally lower than the simulation results. The analyses reveal that the silicene layer fractures first under both loading directions shows crack propagation at +-60°in the armchair and predominantly perpendicular in zigzag, followed by subsequent MoS2 layer failure. The study also shows that the MoS2 layer largely determines the elastic properties of the heterostructure, whereas the silicene layer primarily dictates the failure of the heterostructure. These findings offer an in-depth understanding of the mechanical properties of Silicene/MoS2 heterostructures, with significant implications for their use in cutting-edge nanoelectronics and nanomechanical systems.

Materials Science
Fracture of Polycrystalline Graphene Membranes by in Situ Nanoindentation in A Scanning Electron Microscope

Ji Won Suk,Vladimir Mancevski,Yufeng Hao,Kenneth M. Liechti,Rodney S. Ruoff

DOI: https://doi.org/10.1002/pssr.201510244

2015-01-01

Abstract:Failure of polycrystalline graphene grown by chemical vapor deposition was investigated by nanoindentation in a scanning electron microscope. Circular graphene membranes were subject to central point loads using a nanomanipulator combined with an atomic force microscope cantilever as a force sensor. The grain boundaries of the polycrystalline graphene were visualized by Raman spectroscopy coupled with a carbon isotope labeling technique. Graphene membranes without any grain boundary had a failure strength of 45.4 ± 10.4 GPa, compared to 16.4 ± 5.1 GPa for those with grain boundaries when a Young's modulus was assumed to be 1 TPa. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)
Effect of Point Defects and Nanopores on the Fracture Behaviors in Single-Layer MoS2 Nanosheets

Hongwei Bao,Yaping Miao,Fei Ma

DOI: https://doi.org/10.1088/2632-959x/ac3635

2021-01-01

Nano Express

Abstract:Point defects and nanopores are inevitable and particularly noticeable in single-layer (SL) MoS2. Molecular dynamics (MD) simulations have been done to comprehensively study the influences of point defects and nanopores on tensile deformation behaviors of SLMoS2 nanosheets, and the dependences of fracture properties on defect type and concentration, pore size, temperature and strain rate are discussed. The formation energy of S vacancy (VS) is the lowest one, but that of VMoS6 is the highest one, corresponding to the highest and lowest fracture stress, respectively. The local stress concentration around point defects and nanopores might lead to the early bond breaking and subsequent nucleation of cracks and brittle fracture upon tensile loading. A modified Griffith criterion is proposed to describe the defect concentration and pore size dependent fracture stress and strain. These findings provide us an important guideline for the structural design of 2D materials in future applications.
Shear failure in supported two-dimensional nanosheet van der Waals thin films

Dong Li,Yiheng Xie,Huajian Gao,Cintia J. Castilho,Robert H. Hurt

DOI: https://doi.org/10.1016/j.carbon.2020.10.079

IF: 10.9

2021-03-01

Carbon

Abstract:Liquid-phase deposition of exfoliated 2D nanosheets is the basis for emerging technologies that include writable electronic inks, molecular barriers, selective membranes, and protective coatings against fouling or corrosion. These nanosheet thin films have complex internal structures that are discontinuous assemblies of irregularly tiled micron-scale sheets held together by van der Waals (vdW) forces. On stiff substrates, nanosheet vdW films are stable to many common stresses, but can fail by internal delamination under shear stress associated with handling or abrasion. This "re-exfoliation" pathway is an intrinsic feature of stacked vdW films and can limit nanosheet-based technologies. Here we investigate the shear stability of graphene oxide and MoSe2 nanosheet vdW films through lap shear experiments on polymer-nanosheet-polymer laminates. These sandwich laminate structures fail in mixed cohesive and interfacial mode with critical shear forces from 40 - 140 kPa and fracture energies ranging from 0.2 - 6 J/m2. Surprisingly these energies are higher than delamination energies reported for smooth peeling of ordered stacks of continuous 2D sheets, which we propose is due to energy dissipation and chaotic crack motion during nanosheet film disassembly at the crack tip. Experiment results also show that film thickness plays a key role in determining critical shear force (maximum load before failure) and dissipated energy for different nanosheet vdW films. Using a mechanical model with an edge crack in the thin nanosheet film, we propose a shear-to-tensile failure mode transition to explain a maximum in critical shear force for graphene oxide films but not MoSe2 films. This transition reflects a weakening of the substrate confinement effect and increasing rotational deformation near the film edge as the film thickness increases. For graphene oxide, the critical shear force can be increased by electrostatic cross-linking achieved through interlayer incorporation of metal cations. These results have important implications for the stability of functional devices that employ 2D nanosheet coatings.

materials science, multidisciplinary,chemistry, physical
Molecular mechanics simulations of the deformation mechanism of graphene monolayer under free standing indentation

Lixin Zhou,Jianming Xue,Yugang Wang,Guoxin Cao

DOI: https://doi.org/10.1016/j.carbon.2013.06.046

IF: 10.9

2013-01-01

Carbon

Abstract:Using molecular mechanics simulations, we investigate the deformation mechanism of graphene monolayer under free standing indentation. During indentation, the van der Waals (VDW) interaction between the indenter tip and graphene monolayer will cause: (i) a phase lag between the indentation force P and the indentation displacement δ (i.e., δ>0 when P=0); (ii) a different strain energy function than that in in-plane tension; (iii) a larger nonlinear deformation than its counterpart in in-plane tension. Thus, the elastic properties of graphene monolayer (including the second-order elastic stiffness E and the third-order nonlinear elastic constant cmi) determined by free standing indentation are different than those determined by in-plane stretching, especially for cmi. The VDW effect rapidly decreases with the increase of the indentation load. Under a small load (i.e., in-plane strain ε⩽2.5%, typically used in the real tests), the classic indentation analysis cannot give the correct results, especially for cmi. Under a large load (e.g., ε increases to 5%), the error caused by the classic indentation analysis can be effectively reduced. Therefore, the deformation mechanism must be understood in order to accurately determine the elastic properties of graphene from free standing indentation.
Strain effects on monolayer MoSi2N4: ideal strength and failure mechanism

Qingfang Li,Wanxin Zhou,Xiangang Wan,Jian Zhou

DOI: https://doi.org/10.1016/j.physe.2021.114753

2021-01-29

Abstract:Recently, two-dimensional monolayer MoSi2N4 with hexagonal structure was successfully synthesized in experiment (Hong et al 2020 Science 369, 670). The fabricated monolayer MoSi2N4 is predicted to have excellent mechanical properties. Motived by the experiment, we perform first-principles calculations to investigate the mechanical properties of monolayer MoSi2N4, including its ideal tensile strengths, critical strains, and failure mechanisms. Our results demonstrate that monolayer MoSi2N4 can withstand stresses up to 51.6 and 49.2 GPa along zigzag and armchair directions, respectively. The corresponding critical strains are 26.5% and 17.5%, respectively. For biaxial strain, the ideal tensile strength is 50.6 GPa with a critical strain of 19.5%. Compared with monolayer MoS2, monolayer MoSi2N4 possesses much higher elastic moduli and ideal tensile strengths for both uniaxial and biaxial strains. Interestingly, the critical strain and failure mechanism of zigzag direction in MoSi2N4 are almost the same as those of armchair direction in MoS2, while the critical strain and failure mechanism of armchair direction for MoSi2N4 are similar to the ones of zigzag direction for MoS2. Our work reveals the remarkable mechanical characteristics of monolayer MoSi2N4.

Mesoscale and Nanoscale Physics
Interlocking Friction Governs the Mechanical Fracture of Bilayer MoS 2 .

Gang Seob Jung,Shanshan Wang,Zhao Qin,Francisco J Martin-Martinez,Jamie H Warner,Markus J Buehler

DOI: https://doi.org/10.1021/acsnano.8b00712

IF: 17.1

2018-01-01

ACS Nano

Abstract:Molybdenum disulfide (MoS2) monolayer is a two-dimensional (2D) material, which is expected to provide the next generation of electronic devices together with graphene and other 2D materials. Due to its significance for future electronics applications, gaining a deep insight of the fundamental mechanisms upon MoS2 fracture is crucial to prevent mechanical failure towards reliable applications. Here, we report direct experimental observation and atomic modeling of the complex failure behaviors of bilayer MoS2 originating from highly variable interlayer frictions, elucidated with in-situ transmission electron microscopy and large-scale reactive molecular dynamics simulations. Our results provide systematic understanding of the effects that different stacking and loading conditions cause to the failure mechanisms and crack-tip behaviors in the bilayer MoS2 systems. Our findings unveil essential properties in fracture of this 2D material and provide mechanistic insight into its mechanical failure.
Nanoindentation Study Of A Cu/Ta/Sio2/Si Multilayer System

Xin Zhang,Qian Lu,Zijing Wu,Xiaojing Wu,Weidian Shen,Bin Jiang

DOI: https://doi.org/10.1088/1674-4926/33/4/043002

2012-01-01

Journal of Semiconductors

Abstract:Tantalum and copper layers were deposited on a thermally oxidized Si substrate in a magnetron sputtering process. Nanoindentation was adopted to investigate the hardness and elastic modulus of the Cu/Ta/SiO2/Si multilayer system. The hardness shows an apparent dependence on the film thickness, and decreases with the increase of film thickness, whereas the elastic modulus does not. To reveal the structural change, a trench through the center of a residual indent was cut by a focused ion beam, and then examined using an ion-microscope. TEM analysis showed that delamination occurs at the interface between the Ta and the SiO2 layer of the residual indent, suggesting that the destruction under a relatively large load is due to weak bonding.

Delamination of MoS<sub>2</sub>/SiO<sub>2</sub> interfaces under nanoindentation

Delamination of MoS2/SiO2 Interfaces under Nanoindentation.

Natural Overlaying Behaviors Push the Limit of Planar Cyclic Deformation Performance in Few‐layer MoS2 Nanosheets

In-situ Investigation of the Elastic Behavior of Two-Dimensional MoS2 on Flexible Substrate by Nanoindentation

Electromechanical Failure of MoS2 Nanosheets.

In Situ Nanomechanical Characterization of Multi-Layer MoS2 Membranes: from Intraplanar to Interplanar Fracture.

Mechanical Behaviors of MoS Nanowires under Tension from Molecular Dynamics Simulations

Determining the Interlayer Shearing in Twisted Bilayer MoS2 by Nanoindentation

Surface and interface mechanical properties of inorganic nanolayers

Research of Delamination Phenomenon Under Nanoindentation on Cu/Ta/SiO2/Si Thin Film

Tensile Mechanical Properties Study of SiC/graphene Composites Based on Molecular Dynamics

Wrinkling and failure behavior of single-layer MoS 2 sheets under in-plane shear.

A Probe into Mechanical Properties of Graphene/SiC Composites Based on Molecular Dynamics

A Molecular Dynamics Study of Mechanical Properties of Vertically Stacked Silicene/MoS2 van der Waals Heterostructure

Fracture of Polycrystalline Graphene Membranes by in Situ Nanoindentation in A Scanning Electron Microscope

Effect of Point Defects and Nanopores on the Fracture Behaviors in Single-Layer MoS2 Nanosheets

Shear failure in supported two-dimensional nanosheet van der Waals thin films

Molecular mechanics simulations of the deformation mechanism of graphene monolayer under free standing indentation

Strain effects on monolayer MoSi2N4: ideal strength and failure mechanism

Interlocking Friction Governs the Mechanical Fracture of Bilayer MoS 2 .

Nanoindentation Study Of A Cu/Ta/Sio2/Si Multilayer System