Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Theoretical and Experimental Research on a Spatially Modulated Femtosecond Bessel-Like Laser for Microdrilling in Silica Glass

Experiment of Long Pulse High Energy Laser Drilling on Silica Glass

Ablation Enhancement of Fused Silica Glass by Femtosecond Laser Double-Pulse Bessel Beam

Theoretical Modeling and Experimental Study in Femtosecond Bessel Beam Ablation of Α-Quartz

Non-diffraction-length, tunable, Bessel-like beams generation by spatially shaping a femtosecond laser beam for high-aspect-ratio micro-hole drilling.

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Research on Laser-Assisted Micro-Milling of Fused Silica

Single-Pulse Femtosecond Laser Bessel Beams Drilling of High-Aspect-Ratio Microholes Based on Electron Dynamics Control

High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode

Experimental investigation and optimization of modification during coaxial waterjet-assisted femtosecond laser drilling

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Non-diffraction-length Bessel-beam Femtosecond Laser Drilling of High-Aspect-ratio Microholes in PMMA

Shape Regulation of Tapered Microchannels in Silica Glass Ablated by Femtosecond Laser with Theoretical Modeling and Machine Learning.

High-throughput Rear-Surface Drilling of Microchannels in Glass Based on Electron Dynamics Control Using Femtosecond Pulse Trains.

Experimental research on ultrasound-assisted underwater femtosecond laser drilling

Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst

Investigation on Hybrid Laser Ablation and Its Application in Fused Silica Damage Mitigation.

Experimental observation and simulation of keyhole dynamics during laser drilling

Experimental Investigation on Processing of Fused Silica Microchannels by High Repetition Rate Femtosecond Laser

Phenomenological Modeling for Femtosecond Laser Processing of Fused Silica

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser