Low-loss Wide-Bandwidth Planar Transmission Line with a Laminated Conductor

Ken Ning,Xiao-Chun Li,Yan Shao,Junfa Mao
DOI: https://doi.org/10.1007/s11432-022-3564-2
2023-01-01
Science China Information Sciences
Abstract:In this paper, the laminated conductor technology is first introduced to planar-integrated transmission lines. The laminated conductor is composed of multilayers of metal and insulator, which has a lower conductor loss than a solid conductor. Based on the silicon-based micro electromechanical system technology, a laminated coplanar waveguide (CPW) with wide bandwidth and low loss is proposed, which uses a laminated conductor for signal lines and grounds. A laminated CPW and its transition are designed, fabricated, and measured. The simulation results show that the laminated CPW with many insulator layers has a low conductor loss. The measurement results illustrate that the average insertion loss of the laminated CPW is 0.65 dB from DC to 40 GHz, which is 44.4% smaller than that of the solid CPW.
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