Low Temperature Sensitivity On-Chip Fourier-transform Spectrometer Based on Dual-Layer Si3N4 Spiral Waveguides

Liangjun Lu,Hongyi Zhang,Xin Li,Jianping Chen,Linjie Zhou

DOI: https://doi.org/10.1364/prj.483540

IF: 7.6

2023-01-01

Photonics Research

Abstract:On-chip Fourier-transform spectrometers （FTSs） based on Mach–Zehnder interferometer （MZI） arrays suffer from severe central wavelength and fringe contrast variation due to fabrication errors.Even though a calibration matrix can be employed to correctly retrieve the input spectra,environmental temperature variation greatly degrades the retrieving performance.In this paper,we devise a dual-layer Si 3 N 4 waveguide interferometer to reduce the temperature sensitivity.The beating of the even and odd supermodes in the dual-layer waveguide generates periodic intensity fluctuations in the spectrum.Since these two modes have similar modal profiles,their thermal sensitivity and propagation loss are relatively balanced,leading to a low temperature sensitivity and a high interference extinction ratio.We designed and fabricated a passive FTS based on a 32-channel dual-layer Si 3 N 4 waveguide array.Experimental results show that the temperature sensitivity is reduced to 10 pm/°C,which is almost half that of single-layer Si 3 N 4 MZI-based FTSs.With this chip,we accurately reconstructed various types of optical spectra,including single and two sparse laser lines,and broadband optical spectra.Our method can fit a wide wavelength range,which is a promising technology to improve the practical applications of on-chip FTSs.