Abstract:Tetraethoxysilane (TEOS) is used as a precursor in the industrial production of silica nanoparticles using thermal decomposition methods such as flame spray pyrolysis (FSP). Despite the industrial importance of this process, the current kinetic model of high-temperature decomposition of TEOS to produce intermediate silicon species and eventually form amorphous silica (R-SiO2) nanoparticles remains inadequate. This is partly due to the fact only a small proportion of the possible species is considered. This work presents the thermochemistry of practically all of the species that can exist in the early stages of the reaction mechanism. In order to ensure that all possible species are considered, the process is automated by considering all species that can be formed from the reactions that are deemed reasonable in the standard ethanol combustion model in the literature. Thermochemical data for 180 species (over 160 of which have not appeared in the literature before) are calculated using density functional theory with two different hybrid functionals, B3LYP and B97-1. The standard enthalpy of formation (DeltafH(298.15K) degrees) values for these species are calculated using isodesmic reactions. It is observed that internal rotation may be important because the barriers to rotation are reasonably low. Comparisons are then made between the rigid rotor harmonic oscillator approximation (RRHO) and the RRHO with some of the vibrational modes treated as hindered rotors. It is found that full treatment of the hindered rotors makes a significant difference to the thermochemistry and thus has an impact on equilibrium concentrations and kinetics in this system. For this reason, all of the species are treated using the hindered rotor approximation where appropriate. Finally, equilibrium calculations are performed to identify the intermediates that are likely to be most prevalent in the high-temperature industrial process. Particularly, Si(OH)4, SiH(OH)3, SiH2(OH)2, SiH3(OH), Si(OH)3(OCH3), Si(OH)2(OCH3)2, the silicon dimers (CH3)3-SiOSi(CH3)3 and SiH3OSiH3, and the smaller hydrocarbon species CH4, CO2, C2H4, and C2H6 are highlighted as the important species.

Numerical Modeling of Gas‐phase Reactions of Tetraethoxysilane/o2/ar Atmospheric Dielectric Barrier Discharge for Deposition

Spatiotemporal Evolution and Its Impact on the Deposition Behavior of Atmospheric TEOS/O2/Ar Plasma: A Numerical Study

Subatmospheric chemical vapor deposition ozone/TEOS process for SiO2 trench filling

Boundary layer chemistry probed by in situ infrared spectroscopy during SiO2 deposition at atmospheric pressure from tetraethylorthosilicate and ozone

A theoretical and modeling study about the low-temperature reaction mechanism between diethoxymethane radicals and O-2

Effect of the Monomer TEOS Flow Rate on the Formation of Silicon Dioxide Films by Nonequilibrium,atmospheric Pressure Plasma Jet

First-principles thermochemistry for silicon species in the decomposition of tetraethoxysilane

Interaction Of Tetraethoxysilane With Oh-Terminated Sio2 (001) Surface: A First Principles Study

Modelling and Optimization for Deposition of SiO X N Y Films by Radio-Frequency Reactive Sputtering

A Comparative Pyrolysis Study of Tetraethoxysilane and Tetraethoxymethane: Insight into Congener Substitution Effects on Pyrolysis Chemistry of Siloxane Flame Synthesis Precursors

Monomers effect on the gas and humid barrier properties in PECVD deposited SiOx film on PET surface

Interaction of tetraethoxysilane with OH-terminated SiO 2 (0 0 1) surface: A first principles study

Optical Spectroscopy Diagnosis of Methane Plasma Generated with Atmospheric Pressure Jet

The Power Source Effect on SiOx Coating Deposition by Plasma Enhanced Chemical Vapor Deposition

Unraveling Combustion Chemistry of Dimethyldiethoxysilane. I. A Comprehensive Pyrolysis Investigation with Insight into Ethanol Formation Mechanism in Combustion of Ethoxysilane Flame Synthesis Precursors

Unraveling Combustion Chemistry of Dimethyldiethoxysilane. II. A Comprehensive Study on the Laminar Flame Propagation of Ethoxysilane Flame Synthesis Precursors

Unraveling combustion chemistry of tetramethoxysilane in flow reactor pyrolysis and laminar flame propagation

Deposition of SiOx films with a capacitively-coupled plasma at atmospheric pressure

Thermal Stability of MDM and Oxidative Decomposition Mechanism under the Condition of Air Infiltration: A Combined Experimental, ReaxFF-MD and DFT Study

Kinetic study of SiO2/S coating deposition by APCVD

Coupling Experimental and Modeling Approaches for Understanding Diethoxymethane Low-Temperature Oxidation at High Pressure