Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

A 63 Μg/√hz Noise Floor and 14 Pj Power Efficiency Open-Loop MEMS Capacitive Accelerometer Using Closed-Loop Hybrid Dynamic Amplifier.

A Low-Power Digital Processing Circuit for Capacitive Accelerometer

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Micromachined Accelerometers with Sub-g/Hz Noise Floor: A Review

Comprehensive Optimization of Pid-Type Closed-Loop Mems Accelerometer System

A Low-power High-resolution Band-pass Sigma-delta ADC for Accelerometer Applications

A Stiffness-Tunable MEMS Accelerometer

Design Of The Closed-Loop Capacitive Micro-Accelerometer Based On Pspice

A Low-Noise Low-Offset CMOS Readout Circuit for MEMS Capacitive Accelerometers

A low-noise switched-capacitor interface for a capacitive micro-accelerometer

A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump.

A 0.084% Nonlinearity Open-Loop Capacitive Micro-Accelerometer with On-Chip Digital Nonlinearity Calibration and Embedded EEPROM

Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

A Low-Noise High-G Closed-Loop Capacitive Accelerometer Using Dc-Blocking Technique For Reduction Of Power Dissipation

A High-Voltage Closed-Loop SC Interface for a ± 50 G Capacitive Micro-Accelerometer with 112.4 Db Dynamic Range

A low-noise fully-differential open-loop interface for high-G capacitive micro-accelerometers with 112.2 dB dynamic range

A Pseudo-Differential Capacitive MEMS Accelerometer Analog Front-End Design

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC