Electronic whiskers for velocity sensing based on the liquid metal hysteresis effect

Xinlong Sun,Jun-Heng Fu,Hongbin Zhao,Wentao Xiang,Fei Zhan,Chenkun Sun,Shousheng Tang,Lei Wang,Jing Liu

DOI: https://doi.org/10.1039/d2sm01175a

IF: 4.046

2022-01-01

Soft Matter

Abstract:In the bending process, the hysteresis of the liquid metal in the fiber induces the decline of current, which could effectively detect the motion speed.

What problem does this paper attempt to address?

Liquid Metal-Based Wearable Tactile Sensor for Both Temperature and Contact Force Sensing

Yancheng Wang,Yingtong Lu,Deqing Mei,Lingfeng Zhu

DOI: https://doi.org/10.1109/JSEN.2020.3015949

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:Wearable tactile sensors can be used for haptic perception and are widely utilized in soft robotics, intelligent prosthetics, and other human interfaced/interface applications. The development of tactile sensors with for multifunctional tactile sensing capacity remains a challenge. This article presents the design and fabrication of a wearable tactile sensor based on galinstan liquid metal for the simultaneous sensing of temperature and contact force independently. The decoupling of temperature and contact force sensing, which is based on the measured output voltage signals, is achieved by a designed Wheatstone bridge circuit and by the structural design of the fingerprint-patterned microfluidic channels and the top oval-shaped protrusion. Characterization tests show that the fabricated tactile sensor has a relatively high force sensing sensitivity of 0.32 N-1 and its temperature sensing sensitivities are 0.41% degrees C-1 at 20 similar to 50 degrees C and 0.21% degrees C-1 at 50 similar to 80 degrees C. Two wearable tactile sensors are worn on the index finger and thumb of the human hand and are used to detect temperature changes and contact forces during grasping applications. The results show that the developed liquid metal-based tactile sensor has a high flexibility and durability, and can accurately measure the contact forces and temperatures simultaneously. Thus, the developed wearable tactile sensor has great potential for robotic manipulation and healthcare condition sensing in humans.
Liquid Metal Fiber Composed of a Tubular Channel As a High-Performance Strain Sensor

Yun-hui Wu,Rong-min Zhen,Hai-zhou Liu,Shu-qi Liu,Zhi-fu Deng,Ping-ping Wang,Song Chen,Lan Liu

DOI: https://doi.org/10.1039/c7tc04311b

IF: 6.4

2017-01-01

Journal of Materials Chemistry C

Abstract:A liquid metal fiber with low modulus, high conductivity, and that is hysteresis-free is fabricated and serves as a high-performance fiber strain sensor.
Development of Wearable Tactile Sensor Based on Galinstan Liquid Metal for Both Temperature and Contact Force Sensing.

Yancheng Wang,Yingtong Lu,Deqing Mei,Geng Qiang

DOI: https://doi.org/10.1109/case48305.2020.9216840

2020-01-01

Abstract:F1exible tactile sensors have the ability to measure the contact force and recognize object’s surface texture, and have been widely utilized in biomedical and soft robotics. For tactile sensing in manipulation, accurate temperature and force sensing are two important parameters and are technical challenging. This paper presents the structural design and fabrication method of a thin-film wearable tactile sensor with microfluidic channeled filled with galinstan liquid metal as the sensing element for both temperature and force measurement. Characterization tests showed that the developed tactile sensor has relatively high sensing performances, the sensitivities for force and temperature sensing are 0.016 $\Omega/\mathrm{N}$ (from $0\sim 10\mathrm{N}$) and 0.004 $\Omega/^{\circ}\mathrm{C}$ (from $25 \sim 60^{\circ}\mathrm{C}$). Then these tactile sensors are worn on a hand thumb and index finger to measure the contact force and temperature when grasping of a cup of water with different temperatures. Results showed that the generated force and temperature can be accurately measured by the utilized both wearable tactile sensors. Hence, the developed thin-film tactile sensor based on liquid metal has the potential to measure multimodal tactile information for the real applications in flexible and wearable electronics, soft robotics, and intelligent prosthetics.
A Biomimetic E-Whisker Sensor with Multimodal Perception and Stimuli Discrimination

Cheng Chen,Xin-Lin Li,Shumi Zhao,Yang Song,YinBo Zhu,Quan Wang,Chuanyu Zhong,Rui Chen,Erqiang Li,Zhijun Li,Jian-Wei Liu

DOI: https://doi.org/10.1016/j.device.2023.100148

2023-01-01

Device

Abstract:We present a flexible electronic whisker that can detect and differentiate multiple stimuli. The whisker sensor is made using hierarchical porous tellurium-based thermoelectric materials, enabling the attainment of multi- modal perception through an exceptionally simplistic structure. The single-unit sensor has been demonstrated to detect subtle force (down to 0.07 mN), capture a wide range of wind speeds (1-20.4 m s-1),- 1 ), and respond to high-frequency vibrations (1,000 Hz). The sensor can also measure the temperature (-189 degrees C degrees C to 150 degrees C) degrees C) of objects in contact and the ambient temperature (-85 degrees C degrees C to 60 degrees C) degrees C) in self-powered mode. The sensors were demonstrated to have various potential applications, including measuring overlapping stimulus signals, monitoring device operation for workers, and tracking finger movement for gesture detection.
Liquid Viscosity Measurement Using a Vibrating Flexure Hinged Structure and a Fiber-Optic Sensor

Jinyu Ma,Xinjing Huang,Hyungdae Bae,Yelong Zheng,Cong Liu,Meirong Zhao,Miao Yu

DOI: https://doi.org/10.1109/jsen.2016.2562740

IF: 4.3

2016-07-01

IEEE Sensors Journal

Abstract:A novel viscosity measurement system based on a miniature 3D printed parallelogram flexure hinge structure and a fiber-optic sensor is developed. Lorentz forces are applied to excite the structure vibration at various frequencies, and the fiber-optic sensor is used to measure the amplitude and phase responses without the electromagnetic interference. The system is modeled as a single oscillator by taking into account the liquid-induced mass and damping as well as the additive stiffness due to the liquid viscoelasticity. By curve fitting of the experimentally obtained amplitude and phase responses based on the analytical model, the viscosity and the additive stiffness can be obtained. This method can help differentiate the effect of the viscosity and elasticity on the response of the sensing structure. By implementing this method, accurate viscosity measurements over a large range of 1-1045 mPa·s are demonstrated with the errors of <;3.7% for all the test samples. It is also confirmed in the experiment that the liquid-induced additive stiffness is strongly related to the liquid storage modulus.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Liquid Metal-Based Angle Detection Sensor

Fei Zhan,Peiliu Li,Jun-Heng Fu,Jiaye Zhan,Qijia Wang,Hongbin Zhao,Xinlong Sun,Shousheng Tang,Jing Liu,Lei Wang

DOI: https://doi.org/10.1021/acsaelm.3c00228

IF: 4.494

2023-07-04

ACS Applied Electronic Materials

Abstract:Liquid metal (LM) as the universal artificial biomimetic sensory material has attracted much interest in academic and industrial applications, such as soft robots, flexible electronics, and micro–nano devices. It remains a pivotal challenge to develop a stable and highly sensitive angle detection with a rapid response. Herein, we present an LM-based angle detection sensor. Ga-based LM is gradually injected into hollow fibers with rough internal structures, resulting in a gradient of LM content inside the fibers due to the synergistic effect of pressure drop and the fast formation of an oxide film on its surface. The LM is affected by the gravity pressure when the fiber is tilted, and the Laplace pressure on the surface of the LM continuously reaches an equilibrium state to induce the continuous deformation of the LM. The proposed sensor with highly sensitive to the tilt angle and showcases a linear relation with the tilt angle. For its advantages, this work shows a great potential application in sensor fields and opens routes for the application of electronic whiskers.

materials science, multidisciplinary,engineering, electrical & electronic
Velocity measurement of MEMS with temporal heterodyne microscopic speckle interferometry

Chenjia Gao,Zhan Gao,Yuhao Niu,Xu Wang,Jieming Zhao,Lin Deng

DOI: https://doi.org/10.1080/09500340.2021.1924886

IF: 1.3

2021-05-10

Journal of Modern Optics

Abstract:With the rapid development of micro electro mechanical systems (MEMS), the high-precision measurement technology applied to MEMS devices becomes increasingly important. Traditional micro scale measurement techniques such as scanning electron microscope (SEM), atomic force microscope (AFM), and scanning tunnelling microscope (STM) are widely used in measuring the surface topography and local deformation of MEMS. However, these scanning-based measurement technologies are difficult to achieve full-field and dynamic detection, and they are easy to cause damages to the measured object. In this paper, the microscopic speckle interferometry and heterodyne technology are combined to realize the measurement of constant velocity of MEMS. We presented the experimental principle of temporal heterodyne microscopic speckle interferometry, and measured the real-time motion of MEMS, which verified the feasibility of this method. The experimental results prove that our method has the advantages of real-time, full-field, good noise immunity and low-cost.

optics
Ultrahigh performance and multifunctional flexible biomimetic electronic whiskers for intelligent perception

Cheng Chen,Xin-Lin Li,Shumi Zhao,Chuanyu Zhong,Suk Woo Yang,Rui Chen,Erqiang Li,Zhijun Li,Jianwei Liu

DOI: https://doi.org/10.21203/rs.3.rs-2357267/v1

2023-01-01

Abstract:The humanoid robots that can operate in complex and extreme environments are capable of detecting and discerning various stimuli by the sensors mimicking the human skin sensory system. Herein, we report a flexible biomimetic electronic whisker that greatly expands the diversity of perception in an extremely simple design, including proximity, temperature, pressure, wind, and vibration, which can also discriminate these perception signals. Notably, the biomimetic whisker fabricated using scalable processes possesses a wide-range measurements of bimodal temperature (-189 o C to 150 o C for object, -85 o C to 60 o C for surroundings) and wind speed (1 m s -1 to 20.4 m s -1 ), with bending stability (250000 cycles), the response of slight pressure (0.07 mN), and the sense of vibration (1000 Hz). In the frame of machine learning, we finally exploit the sensor to demonstrate the outstanding potential in robotics and human-machine interfaces.
Superelastic Metal Microsprings As Fluidic Sensors and Actuators

Weiming Li,Gaoshan Huang,Jiao Wang,Ying Yu,Xiaojing Wu,Xugao Cui,Yongfeng Mei

DOI: https://doi.org/10.1039/c2lc40151g

IF: 7.517

2012-01-01

Lab on a Chip

Abstract:Superelastic metal microsprings fabricated by deterministic rolling of nanomembranes have been anisotropic-strain-engineered via glancing angle deposition. The advantageous applications of metal microsprings in liquid flow rate sensors and chemical-stimulated actuators due to their reliable superelasticity are demonstrated. Theoretical calculation of microspring elongation as a function of flow rate agrees with our experimental observation and reveals that the sensitivity can be well tuned by the geometrical design of the microsprings. Such outstanding mechanical properties of rolled-up metal microsprings should find important applications in future fluidic micro-/nano-devices.
The Fluid Viscosity Measurement Based on Variable Cross-Section MEMS Cantilever under Torsional Excitation

Yingjie Hu,Libo Zhao,Tongdong Wang,Yulong Zhao,Guoying Yuan,Zhuangde Jiang

DOI: https://doi.org/10.1109/icsens.2015.7370249

2015-01-01

Abstract:A Micro-electromechanical systems (MEMS) sensor with the variable cross-section micro-cantilever was designed to measure the fluid viscosity. Due to the quality factor of micro-cantilever under the torsional resonance is much higher than that under the first order flexural resonance, the fluid viscosity measuring accuracy under the torsional resonance is much higher. Then an exciting method named the torsional excitation was presented when the direction of magnetic induction lines was parallel with the width direction of the micro-cantilever. Thus, the micro-cantilever could be driven to vibrate directly under the torsional mode by the Lorentz force. The measuring experiments of the fluid viscosity were completed in seven kinds of alkanes under different resonance modes, the results showed that the accuracy and stability of the fluid viscosity measurement can be improved effectively under the torsional resonance mode.
Resonant MEMS Viscosity Sensor of Micro Cantilever Beam Structure

Rahmanhebibul,Ying-jie HU,Tong-dong WANG,Li-bo ZHAO,Yu-long ZHAO,Zhuang-de JIANG

DOI: https://doi.org/10.3969/j.issn.1002-1841.2015.05.003

2015-01-01

Abstract:The mechanism of fluid viscosity measurement was studied using resonance method in this paper.Firstly,the fluid viscosity sensor chip with micro cantilever beam structure was designed and manufactured using MEMS ( Micro Electro Mechanical Systems) technology.The chip as vibration body was excited by electromagnetic force and tested by piezoresistive effect for the measurement of fluid viscosity.Then the encapsulation structure was designed.Also,the experimental system was set up to calibrate the sensor through testing 4 kinds of organic fluid viscosity under 20℃and 25℃at room environment.The experimental results show that the resonant MEMS viscosity sensor with micro cantilever beam structure has characteristics of quick response,high mini-aturization,and in-situ measurement.The measuring accuracy of the sensor is better than 8%,and it can meet the measurement de-mand of fluid viscosity in the engineering.
A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

Libo Zhao,Yingjie Hu,Tongdong Wang,Jianjun Ding,Xixiang Liu,Yulong Zhao,Zhuangde Jiang

DOI: https://doi.org/10.3390/s16060830

IF: 3.9

2016-06-06

Sensors

Abstract:Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers were designed based on the simulation results and fabricated using the micro electromechanical systems (MEMS) technology. Finally, the MEMS resonant sensor was packaged with the sensing chip to measure the densities and viscosities of eight different fluids under the flexural and torsional vibrating modes separately. The relative errors of the measured densities from 600 kg/m³ to 900 kg/m³ and viscosities from 200 μPa·s to 1000 μPa·s were calculated and analyzed with different microcantilevers under various vibrating modes. The experimental results showed that the effects of the shape and vibrating mode of micro-cantilever on the measurement accuracies of fluid density and viscosity were analyzed in detail.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Self‐Actuation: Liquid Metal Machine Triggered Violin‐Like Wire Oscillator (adv. Sci. 10/2016)

Bin Yuan,Lei Wang,Xiaohu Yang,Yujie Ding,Sicong Tan,Liting Yi,Zhizhu He,Jing Liu

DOI: https://doi.org/10.1002/advs.201670050

2016-01-01

Abstract:In article 1600212, the first oscillation phenomenon of a copper wire embraced inside a self-powered liquid metal machine is described by Jing Liu and co-workers. When contacting a copper wire to liquid metal machine, it will be swallowed inside and then reciprocally move back and forth across the machine body, like a violin bow. Such oscillation can be easily regulated and speeded up by touching a steel needle on the liquid metal surface.
3D-Structured Dual-mode Flexible Sensors for Highly Sensitive Tactile-perception and Non-contact Sensing.

Tao Hu,L. Ding,Quan Shu,X. Gong,Chuanlin Sun,Yu Wang,Shouhu Xuan

DOI: https://doi.org/10.1021/acsami.0c03996

2020-04-14

Abstract:This work reports a 3D-structured multifunctional sensor by connecting a magneto-whisker with a super flexible patterned skin film. Composed of percolation networks of silver nanowires, the patterned skin film is integrated via a simple template manufacturing method without increasing complexity and sacrificing flexibility. The as-prepared 3D-structured sensor can realize the multi-modal detection of out-of-plane tactile stimuli and details of non-contact environmental obstacles in multiple directions. Here, the sensor's perception behaviors on compression, pulling, magnetic field, sound waves, air flows, water lever, water flows and back-washes are presented. Furthermore, the 3D-structured sensor obtains outstanding mechanical robustness and stability for 8000 cycles, excellent sensitivity (12800% when the applied pulling displacement was 3.5 mm; 152% T-1 when magnetic flux density variation was 40.6 mT), ultrahigh response time and recovery time (~ 5 ms), which may meet the industrial sensing requirement of artificial tactile electronics. Facile manufacturing processes and outstanding multi-modal sensing characteristics make the 3D-structured sensor possess great implement potential in the next-generation intelligent bionic equipment or systems.

Medicine,Engineering,Materials Science
Superelastic, Sensitive, and Low Hysteresis Flexible Strain Sensor Based on Wave-Patterned Liquid Metal for Human Activity Monitoring

Jing Chen,Jinjie Zhang,Zebang Luo,Jinyong Zhang,Lin Li,Yi Su,Xing Gao,Yingtian Li,Wei Tang,Chongjing Cao,Quhua Liu,Lei Wang,Hui Li

DOI: https://doi.org/10.1021/acsami.0c04709

IF: 9.5

2020-01-01

ACS Applied Materials & Interfaces

Abstract:Flexible strain sensors have been widely used in wearable electronic devices for body physical parameter capturing. However, regardless of the stretchability of the sensing material, the resolution of small strain changes or the hysteresis between loading/unloading states has always limited the various applications of these sensors. In this paper, a microfluidic flexible strain sensor was achieved by introducing liquid metal eutectic gallium indium (EGaIn) embedded into a wave-shaped microchannel elastomeric matrix (300 μm width × 70 μm height). The microfluidic sensor can withstand a strain of up to 320%, and the hysteresis performance was also improved from 6.79 to 1.02% by the wave-patterned structure which can restrain the viscoelasticity of the elastomer effectively. Moreover, an enhanced wave-shaped strain sensor was fabricated by increasing the length of the microfluidic channel; it has high sensitivity (GF = 4.91) and resolution, and even as low as 0.09% strain change could be detected, which is capable of resolving microdeformation; besides, the enhanced wave-shaped strain sensor exhibits quick response time (t = 116 ms), long-term stability, and durability under periodic dynamic load. As an example of potential applications, the enhanced flexible sensor showed excellent mechanical compliance and was successfully applied as a conceptual wearable device for distinctively monitoring various kinds of human body and robot activities, such as the different states of the finger, neck, breathing chest, robot's joint, and so forth. The flexible wave-shaped strain sensor has great promising applications for wearable electronics, motion recognition, healthcare, and soft robotics.
Ultrasensitive Soft Sensor from Anisotropic Conductive Biphasic Liquid Metal‐Polymer Gels

Yan Peng,Hao Peng,Zixun Chen,Jiuyang Zhang

DOI: https://doi.org/10.1002/adma.202305707

IF: 29.4

2023-12-12

Advanced Materials

Abstract:Abstract Subtle vibrations, such as sound and ambient noises, are common mechanical waves that can transmit energy and signals for modern technologies such as robotics and health management devices. However, soft electronics cannot accurately distinguish ultrasmall vibrations owing to their extremely small pressure, complex vibration waveforms, and high noise susceptibility. This study successfully recognizes signals from subtle vibrations using a highly flexible anisotropic conductive gel (ACG) based on biphasic liquid metals. The relationships between the anisotropic structure, subtle vibrations, and electrical performance are investigated using rheological–electrical experiments. The refined anisotropic design successfully realized low‐cost flexible electronics with ultrahigh sensitivity (Gauge Factor: 12787), extremely low detection limit (strain: 0.01%), and excellent frequency recognition accuracy (>99%), significantly surpassing those of current flexible sensors. The ultrasensitive flexible electronics in this study are beneficial for diverse advanced technologies such as acoustic engineering, wearable electronics, and intelligent robotics.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Bioinspired Electronic Whisker Arrays by Pencil‐Drawn Paper for Adaptive Tactile Sensing

Qilin Hua,Haitao Liu,Jing Zhao,Dengfeng Peng,Xiaonian Yang,Lin Gu,Caofeng Pan

DOI: https://doi.org/10.1002/aelm.201600093

IF: 6.2

2016-01-01

Advanced Electronic Materials

Abstract:Bioinspired electronic whisker (e-whisker) arrays fabricated using pencil on paper are demonstrated for adaptive tactile sensing. The pencil-drawn e-whisker arrays with superior strain sensitivity, fast response (50 ms) and high durability/stability enable to monitor strains, build 3D spatial maps and detailed reconstruct objects' localization, orientation, and shape, and may have potential applications in advanced robotics, artificial intelligence, human-machine interfaces, and health monitoring systems.
High Sensitivity Micro Electrometer Based On Clamped Free Curved Beams Resonator With Weakened Nonlinearity

Dongyang Chen,X. Q. Liu,Yong Wang,Zhonggui Xu,Hongyun Lin,Huicong Liu,Jin Xie

DOI: https://doi.org/10.1109/memsys.2018.8346750

2018-01-01

Abstract:In this work, we report a high performance MEMS electrometer based on a clamped-free semi-circular beams (CFCB) resonator with a new sensing scheme of vibration perturbation. The CFCB resonator vibrating at elastic mode aims to eliminate the nonlinearity that widely exists in traditional double-ended tuning forks (DETF) sensors and lower the temperature coefficient of frequency. The charge sensing scheme of vibration perturbation has been realized by using the electric charge induced attractive electrostatic force to perturb the vibration of elastic mode and lead to a frequency modulation, which shows a sensitivity higher than the axial strain modulation scheme of DETF over one order of magnitude.
Versatile Movements of Liquid Metal Droplet under Electrostatic Actuation in Alkaline Solutions

Qingming Hu,Tianyi Jiang,Hongyuan Jiang

DOI: https://doi.org/10.3390/ma13092122

2020-05-03

Abstract:The gallium-based eutectic liquid metal alloys exhibit unique properties of deformability, excellent electrical conductivity and low vapour pressure. The liquid metal-based circuits' element or actuator have drawn considerable attention in stretchable electronics and microelectromechanical (MEMS) actuators. Yet, the motion of the liquid metal within the electrolyte needs to be precisely regulated to satisfy application requirements. Herein, we investigated the locomotion of liquid metal within the alkaline aqueous solution under electrostatic actuation. The relationship between the travelling speed of the liquid metal slug and the relative influential parameters, such as the voltage amplitude and frequencies of the applied electric field, electrolyte concentration, electrodes distance and the liquid metal volume, were experimentally characterized. A travelling speed up to 20.33 mm/s was obtained at the applied voltage of 4 Vpp at 150 Hz at 6 V DC offset. Finally, the frequency-dependent liquid metal marble movements were demonstrated, namely oscillation and forward locomotion while oscillating. The oscillation frequency was determined by the frequency of the applied alternate current (AC) signal. The remarkable transportation and oscillating characteristic of the liquid metal marble under the electrostatic actuation may present potentials towards the development of flexible electronics and reconfigurable structures.
Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof

Xiaodong Han,Pan Liu,Yonghai Yue,Ze Zhang

2010-01-01

Abstract:The invention relates to a sensor for quantitatively measuring mechanical and electrical properties and microstructure and a manufacturing method thereof. The sensor is characterized by comprising a hanging structure, piezoresistor cantilever beams, supporting beams, a bimetallic strip and the like. When the bimetallic strip generates bending deformation, one of the piezoresistor cantilever beams is pushed, low-dimensional nanomaterials are stretched, and then, the low-dimensional nanomaterials drive the other piezoresistor cantilever beam to generate bending deformation. The magnitude of the stress borne by the low-dimensional nanomaterials is acquired by the change of electrical signals output by the Wheatstone bridge. Meanwhile, the deformation quantity of the low-dimensional nanomaterials is acquired by transverse displacement difference between the two cantilever beams, thereby a stress-strain curve of the low-dimensional nanomaterials can be measured. When the low-dimensional nanomaterials are measured under the energizing state, a voltage-current curve can also be acquired. In addition, a high-resolution imaging system in a transmission electron microscope can be used for recording the relativity of mechanical and electrical properties of the low-dimensional nanomaterials and microstructure change in situ under the atomic lattice resolution.

Electronic whiskers for velocity sensing based on the liquid metal hysteresis effect

Liquid Metal-Based Wearable Tactile Sensor for Both Temperature and Contact Force Sensing

Liquid Metal Fiber Composed of a Tubular Channel As a High-Performance Strain Sensor

Development of Wearable Tactile Sensor Based on Galinstan Liquid Metal for Both Temperature and Contact Force Sensing.

A Biomimetic E-Whisker Sensor with Multimodal Perception and Stimuli Discrimination

Liquid Viscosity Measurement Using a Vibrating Flexure Hinged Structure and a Fiber-Optic Sensor

Liquid Metal-Based Angle Detection Sensor

Velocity measurement of MEMS with temporal heterodyne microscopic speckle interferometry

Ultrahigh performance and multifunctional flexible biomimetic electronic whiskers for intelligent perception

Superelastic Metal Microsprings As Fluidic Sensors and Actuators

The Fluid Viscosity Measurement Based on Variable Cross-Section MEMS Cantilever under Torsional Excitation

Resonant MEMS Viscosity Sensor of Micro Cantilever Beam Structure

A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

Self‐Actuation: Liquid Metal Machine Triggered Violin‐Like Wire Oscillator (adv. Sci. 10/2016)

3D-Structured Dual-mode Flexible Sensors for Highly Sensitive Tactile-perception and Non-contact Sensing.

Superelastic, Sensitive, and Low Hysteresis Flexible Strain Sensor Based on Wave-Patterned Liquid Metal for Human Activity Monitoring

Ultrasensitive Soft Sensor from Anisotropic Conductive Biphasic Liquid Metal‐Polymer Gels

Bioinspired Electronic Whisker Arrays by Pencil‐Drawn Paper for Adaptive Tactile Sensing

High Sensitivity Micro Electrometer Based On Clamped Free Curved Beams Resonator With Weakened Nonlinearity

Versatile Movements of Liquid Metal Droplet under Electrostatic Actuation in Alkaline Solutions

Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof