Characterization of Residual Stress in SOI Wafers by Using MEMS Cantilever Beams
Haotian Yang,Min Liu,Yingmin Zhu,Weidong Wang,Xianming Qin,Lilong He,Kyle Jiang
DOI: https://doi.org/10.3390/mi14081510
IF: 3.4
2023-07-28
Micromachines
Abstract:Silicon-on-insulator (SOI) wafers are crucial raw materials in the manufacturing process of microelectromechanical systems (MEMS). Residual stresses generated inside the wafers during the fabrication process can seriously affect the performance, reliability, and yield of MEMS devices. In this paper, a low-cost method based on mechanical modeling is proposed to characterize the residual stresses in SOI wafers in order to calculate the residual stress values based on the deformation of the beams. Based on this method, the residual strain of the MEMS beam, and thus the residual stress in the SOI wafer, were experimentally determined. The results were also compared with the residual stress results calculated from the deflection of the rotating beam to demonstrate the validity of the results obtained by this method. This method provides valuable theoretical reference and data support for the design and optimization of devices based on SOI-MEMS technology. It provides a lower-cost solution for the residual stress measurement technique, making it available for a wide range of applications.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied