Abstract:Modern aviation components have higher requirements for high temperature resistance, high strength and lightweight materials, and ceramic matrix composites have superior overall performance. However, its high brittleness and anisotropy lead to a challenge for manufacturing. In order to understand the formation conditions and the evolution of surface microstructures of the Cf/SiC microgrooves processed by ultrafast laser comprehensively, we designed a single-factor experiment and performed sensitivity analysis. The experiment results showed that the pulse energy had great effects on the depth of the microgroove, and the intense ablation caused more active oxidation of SiC to occur, generating more SiO(g). However, too much pulse energy may cause the material removal mechanism to be more due to the photothermal effect rather than the plasma effect. Low repetition frequency caused a large number of laminated connections in the microgroove and the oxide gradually changed from lumpy to flocculent as the repetition frequency increased. The more scanning times, the more ablation products sputtered onto the sample surface, including unablated carbon fibers. Shallow depth and ablation residues remained in the microgroove occurred under few scanning times. Although too fast scanning speed leaded to a rapid decrease in the microgroove depth, too slow scanning speed also generated more unablated carbon fibers sputtering out of the microgrooves. The microgroove depth had the highest sensitivity to the repetition frequency, followed by the pulse energy and scanning speed. The pulse energy and scanning speed had a greater effect on the oxide layer height, the repetition frequency affected the oxide layer width, and the scanning speed affected the microgroove width significantly. According to the processing requirements and the hot spot map, the processing parameters that can be adjusted effectively will be able to be obtained.

Effects of Incidence Angle and Optimization in Femtosecond Laser Polishing of C/SiC Composites

Influence of surface morphology and processing parameters on polishing of silicon carbide ceramics using femtosecond laser pulses

Femtosecond laser polishing of SiC/SiC composites: Effect of incident angle on surface topography and oxidation

Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics

Investigation on the underwater femtosecond laser polishing SiC ceramic

Investigation on ultrasonic vibration-assisted femtosecond laser polishing of C/SiC composites

Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

An experimental investigation of scan trajectory into the underwater femtosecond laser polishing SiC ceramic

Microstructure evolution and ablation mechanism of SiCf/SiC ceramic matrix composite microgrooves processed by pico-second laser

One-step fabrication of fine surfaces via femtosecond laser on sliced SiC

High-Power Femtosecond Laser Processing of SiC Ceramics with Optimized Material Removal Rate

Investigations on the ablation behavior of C/SiC under femtosecond laser

The Effects of Laser Parameters and the Ablation Mechanism in Laser Ablation of C/SiC Composite

Centimeter-scale low-damage micromachining on single-crystal 4H–SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots

Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Study of Femtosecond Laser Ablation and Polishing Process on 4H-SiC Substrate

Surface microstructure evolution of Cf/SiC ceramic matrix composite microgrooves processed by ultrafast laser

Process Parameter Optimization for CO2 Laser Polishing of Fused Silica Using the Taguchi Method

Femtosecond laser surface modification of 4H-SiC improves machinability

Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC

Surface modulation to enhance chemical mechanical polishing performance of sliced silicon carbide Si-face