How Arsenic Makes Amorphous GeSe a Robust Chalcogenide Glass for Advanced Memory Integration

Rongchuan Gu,Meng Xu,Chong Qiao,Cai-Zhuang Wang,Kai-Ming Ho,Songyou Wang,Ming Xu,Xiangshui Miao
DOI: https://doi.org/10.1016/j.scriptamat.2022.114834
IF: 6.302
2022-01-01
Scripta Materialia
Abstract:The 3D integration technology in semiconductor fabrication requires a key component, the ovonic threshold switching (OTS) selector, to suppress the current leakage. The As doped amorphous (a-) GeSe glass is a commercialized OTS material in 3D phase-change memory, but the understanding of such a doping mechanism is still inadequate. Here we systematically explore the effect of As doping on the structural, bonding, and dynamics properties of a-GeAsSe using ab initio molecular dynamics simulations. The results reveal that As atoms form strong bonds with both Ge and Se atoms. The distorted octahedral structures and the 5-fold rings linked by atoms are increased. All of these structural features lead to a more disordered configuration. Moreover, As atoms have notably slowed down the atomic mobility, rendering a-GeAsSe a high stability. Our studies offer insightful understanding of As-doping in OTS materials, paving the way for the design and application of advanced selector devices.
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