Regulation of Surface Kinetics: Rapid Growth of N-Algan with High Conductivity for Deep-Ultraviolet Light Emitters

Jiaming Wang,Fujun Xu,Jing Lang,Xuzhou Fang,Liubing Wang,Xueqi Guo,Chen Ji,Xiangning Kang,Zhixin Qin,Xuelin Yang,Xinqiang Wang,Weikun Ge,Bo Shen
DOI: https://doi.org/10.1039/d2ce00362g
IF: 3.756
2022-01-01
CrystEngComm
Abstract:Surface kinetics in Al-rich AlGaN growth are regulated to realize a growth window allowing a higher rate as well as a lower temperature. Hence a rate of 2.3 μm h−1 at 1050 °C is achieved for n-Al0.55Ga0.45N with the typical step-terrace morphology.
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