A Large Range Compliant XY Nano-Manipulator with Active Parasitic Rotation Rejection

Yijie Liu,Zhen Zhang

DOI: https://doi.org/10.1016/j.precisioneng.2021.07.008

2021-01-01

Abstract:There is an increasing demand to achieve manipulating operations in nanometric precision and a macro-range (over a millimeter) simultaneously. In principle, it is possible to satisfy both requirements in a compact size taking advantages of flexure-based mechanisms, whereas limitations such as the parasitic rotation, cross-axis coupling, saturation may adversely affect the motion quality in nanometric level practically. Here, we propose a novel design methodology to actively prevent parasitic rotation of XY compliant mechanisms. Further, by means of design synthesis and real-time motion control, the prototype of manipulator is fabricated, which enables large motion range (+/- 3 mm) along each actuation axis. Experimental results demonstrate a travel range of 2 mm x 2 mm with high linearity, small cross-axis coupling (< 0.4%), and low parasitic rotation (< 6.9 mu rad over 0.5 mm x 0.5 mm motion range). Moreover, the high natural frequency (- 60 Hz) of the manipulator facilitates it to achieve high-precision motion with tracking error < 80 nm (20 Hz sinusoids). The experimental results of the proposed nano-manipulator outperform most of the existing ones.