A Spatial Design of a Large Stroke Compliant XY Nanomanipulator with Cross-Coupling Error Reduction

Zhiqing Liu,Zhen Zhang,Peng Yan

DOI: https://doi.org/10.1109/MARSS.2019.8860928

2019-01-01

Abstract:This paper proposes a novel spatial compliant XY nanomanipulator to reduce cross-coupling errors for large stroke motions. Specifically, the parallelogram flexure mechanisms are vertically placed instead of being horizontally placed. As a result, the varying axial force induced nonlinear stiffness becomes a constant, and hence the linear stiffness matrix based model is derived for the compliant nanomanipulator. Numerous finite element analysis (FEA) results verify that the theoretical analysis of design is accurate enough with an error less than 3% and the ratio between the error and maximum stroke is 0.16%. The cross-coupling error and parasitic rotation are smaller than the existing designs.