Large dynamic range tracking of an XY compliant nanomanipulator with cross-axis coupling reduction

Zhen Zhang,Xiaodong Yang,Peng Yan
DOI: https://doi.org/10.1016/j.ymssp.2018.08.014
IF: 8.4
2019-01-01
Mechanical Systems and Signal Processing
Abstract:•A large range XY flexure nanomanipulator with novel spatial constraints to suppress cross-axis couplings.•DOB-based repetitive control attenuates cross-axis coupling and nonlinear stiffness.•Experiments outperform existing results, with tracking error <80 nm and stroke >1 mm.
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