Abstract:A new ultrafast laser waveguide writing method (SPIM‐WG) is extensively studied by taking advantage of phase aberrations. Adopting energy‐relocated focus, the method is capable to create photonic chips in glass with high precision, while achieving high refractive index contrasts (0.009 to 0.021) and high scanning speeds (20 mm s−1 or higher) at the same time. Integrated photonic chips have significant potential in telecommunications, classic computing, quantum systems, and topological photonics. Direct laser writing offers unique capability for creating three‐dimensional photonic devices in an optical glass chip with quick prototyping. However, it is a challenge for existing laser writing schemes to create index‐modified structures in glass that precisely match the laser focal shape while also achieving high refractive index contrasts and high scanning speeds. Here, we introduce a refractive index modification scheme that combines the advantages of non‐thermal and thermal regime fabrication methods. We also propose a waveguide formation model that is verified through a thorough study on the effects of phase aberrations. The presented new photonic chip fabrication scheme uses a novel focal intensity distribution, where pulse energy is relocated to the bottom of a laser focus by manipulating primary and higher order spherical aberrations. The technique can produce index modifications with high scanning speed (can be 20 mm/s or higher), high index contrast (ranging from 0.009 to 0.021), and high precision to fabricate with arbitrary cross‐sections. This method has potential to expand the capabilities of photonic chips in applications that require small‐scale, high precision, or high contrast refractive index control.

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Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics

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Low-loss skimming waveguides with controllable mode leakage for on-chip saturable absorbers

Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam

Femtosecond laser direct writing device and femtosecond laser direct writing method for annular waveguide in transparent materials

Transverse writing of three-dimensional tubular optical waveguides in glass with slit-shaped femtosecond laser beams

Fabrication of single-mode hybrid crystal-glass waveguides by direct femtosecond laser writing and thermal annealing

Fabricating Low Loss Waveguides over a Large Depth in Glass by Temperature Gradient Assisted Femtosecond Laser Writing.

Laser Printing of Large‐Area Conformal 3D Photonic Circuits in Glass

Fast, Precise, High Contrast Laser Writing for Photonic Chips with Phase Aberrations

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

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High-order mode waveguide amplifier with high mode extinction ratio written in an Er3+-doped phosphate glass

Integrated multimode optical waveguides in glass using laser induced deep etching

Femtosecond laser direct writing of multiwavelength Bragg grating waveguides in glass