Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Laser Printing of Large‐Area Conformal 3D Photonic Circuits in Glass

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics

Photonic Lattice-Like Waveguides in Glass Directly Written by Femtosecond Laser for On-Chip Mode Conversion

Integrated Flexible Chalcogenide Glass Photonic Devices

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

3D Integrated Photonics Platform with Deterministic Geometry Control

3-D Flexible Glass Photonics

3-D Integrated Flexible Glass Photonics

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Fast, Precise, High Contrast Laser Writing for Photonic Chips with Phase Aberrations

Direct laser-writing of ferroelectric single-crystal waveguide architectures in glass for 3D integrated optics

Toward 3D Integration of Highly See‐Through Photonic Circuits in Glass

Photonic Circuits Written by Femtosecond Laser in Glass: Improved Fabrication and Recent Progress in Photonic Devices

Combining one and two photon polymerization for accelerated high performance (3+1)D photonic integration

Femtosecond laser micromachining and microfabrication in transparent materials

Fabrication of high-aspect-ratio fused silica microstructures with large depths using Bessel-beam femtosecond laser-assisted etching

High Speed Precise Refractive Index Modification for Photonic Chips through Phase Aberrated Pulsed Lasers

Scalable Shape-Controlled Fabrication of Curved Microstructures Using a Femtosecond Laser Wet-Etching Process

Single-pulse Writing of a Concave Microlens Array.

UV-NIR Femtosecond Laser Hybrid Lithography for Efficient Printing of Complex On-Chip Waveguides.