[Experience in studying patients in first stage of hypertensive disease with initial cerebral syndrome in connection with their working conditions].

Iu D Arbatskaia,V. Kogan,D. Petrov,R. I. PIS'MENNYI,M. Chulkova

Abstract:

What problem does this paper attempt to address?

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Jintian Lin,Jiangxin Song,Jialei Tang,Wei Fang,Koji Sugioka,Ya Cheng

DOI: https://doi.org/10.1117/12.2041353

2014-01-01

Abstract:We report on fabrication of three-dimensional (3D) high-quality (Q) whispering-gallery-mode microcavities by femtosecond laser micromachining. The main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (CO2 laser reflow for amorphous glass and focused ion beam (FIB) sidewall milling for crystalline materials) to improve the Q factors. Fused silica microcavities with 3D geometries are demonstrated with Q factors exceeding 106. A microcavity laser based on Nd:glass has been fabricated, showing a threshold as low as 69μW via free space continuous-wave optical excitation at the room temperature. CaF2 crystalline microcavities with Q factor of ~4.2×104 have also been demonstrated. This technique allows us to fabricate 3D high-Q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing.
Photonic Lattice-Like Waveguides in Glass Directly Written by Femtosecond Laser for On-Chip Mode Conversion

Yuying Wang,Lijing Zhong,Zhi Chen,Dezhi Tan,Zaijin Fang,Yi Yang,Shengzhi Sun,Luyun Yang,Jianrong Qiu

DOI: https://doi.org/10.3788/col202220.031406

IF: 2.56

2022-01-01

Chinese Optics Letters

Abstract:We report on a conceptually new type of waveguide in glass by femtosecond laser direct writing, namely, photonic latticelike waveguide [PLLW). The PLLW’s core consists of well-distributed and densified tracks with a sub-micron size of 0.62 μm in width. Specifically, a PLLW inscribed as hexagonal-shape input with a ring-shape output side was implemented to converse Gaussian mode to doughnut-like mode, and high conversion efficiency was obtained with a low insertion loss of 1.65 d B at 976 nm. This work provides a new freedom for design and fabrication of the refractive index profile of waveguides with sub-micron resolution and broadens the functionalities and application scenarios of femtosecond laser direct-writing waveguides in future 3 D integrated photonic systems.
On-chip beam rotators, adiabatic mode converters, and waveplates through low-loss waveguides with variable cross-sections

Bangshan Sun,Fyodor Morozko,Patrick S. Salter,Simon Moser,Zhikai Pong,Raj B. Patel,Ian A. Walmsley,Mohan Wang,Adir Hazan,Nicolas Barre,Alexander Jesacher,Julian Fells,Chao He,Aviad Katiyi,ZhenNan Tian,Alina Karabchevsky,Martin J. Booth

DOI: https://doi.org/10.1038/s41377-022-00907-4

2022-07-15

Abstract:Photonics integrated circuitry would benefit considerably from the ability to arbitrarily control waveguide cross-sections with high precision and low loss, in order to provide more degrees of freedom in manipulating propagating light. Here, we report a new method for femtosecond laser writing of optical-fibre-compatible glass waveguides, namely spherical phase induced multi-core waveguide (SPIM-WG), which addresses this challenging task with three dimensional on-chip light control. Fabricating in the heating regime with high scanning speed, precise deformation of cross-sections is still achievable along the waveguide, with shapes and sizes finely controllable of high resolution in both horizontal and vertical transversal directions. We observed that these waveguides have high refractive index contrast of 0.017, low propagation loss of 0.14 dB/cm, and very low coupling loss of 0.19 dB coupled from a single mode fibre. SPIM-WG devices were easily fabricated that were able to perform on-chip beam rotation through varying angles, or manipulate polarization state of propagating light for target wavelengths. We also demonstrated SPIM-WG mode converters that provide arbitrary adiabatic mode conversion with high efficiency between symmetric and asymmetric non-uniform modes; examples include circular, elliptical modes and asymmetric modes from ppKTP (periodically-poled potassium titanyl phosphate) waveguides which are generally applied in frequency conversion and quantum light sources. Created inside optical glass, these waveguides and devices have the capability to operate across ultra-broad bands from visible to infrared wavelengths. The compatibility with optical fibre also paves the way toward packaged photonic integrated circuitry, which usually needs input and output fibre connections.

Optics,Applied Physics
Phase Control in Glass-Composite for Three-Dimensional Active Waveguide with Broadband Response

Rui Duan,Yongze Yu,Xu Feng,Quanhua Lin,Jianrong Qiu,Shifeng Zhou

DOI: https://doi.org/10.1016/j.jeurceramsoc.2022.10.057

IF: 5.7

2023-01-01

Journal of the European Ceramic Society

Abstract:Broadband optical amplification is crucially important for expanding the transmission capacity of optical communication system and resolving the issue of internet traffic. A major challenge is the development of broadband gain materials. Herein, a heterogeneity engineering strategy is proposed for constructing all-inorganic transparent composite with tunable and ultrabroadband luminescence. The composite is characterized by the glass matrix homogeneously embedded with highly dense nanocrystalline domains with the optimal crystallinity of similar to 63.7%. Notably, the formation dynamics and phase configuration of the composite can be controlled. As a result, the interesting optical response with tunable and ultrabroadband near-infrared luminescence from 1000 to 1800 nm can be realized. In addition, the embedded high density crystalline domains gift the composite with the excellent antilaser damage behavior and three-dimensional smooth active waveguide can be directly written by using femtosecond laser. This unique feature allows the creation of the integrated waveguide array device and the potential for broadband optical amplification is demonstrated. Results suggest that the proposed heterogeneity engineering strategy can not only be extended for exploitation of active composite system, but also development of three-dimensional broadband photonic devices with high integration level.
Künstlerische Therapien bei schweren psychischen Störungen

Uta Gühne,S. Weinmann,Katrin Arnold,E.-S. Ay,Thomas Becker,SG Riedel-Heller

DOI: https://doi.org/10.1007/s00115-011-3472-7

2012-06-27

Der Nervenarzt

Abstract:
High-order mode waveguide amplifier with high mode extinction ratio written in an Er3+-doped phosphate glass

Xiangyu Sun,YuYing Wang,Lijing Zhong,Daoyuan Chen,Beibei Xu,Zhijun Ma,Xiaofeng Liu,Giuseppe Barillaro,Zhi Chen,Jianrong Qiu

DOI: https://doi.org/10.1364/OE.481729

2023-02-13

Abstract:Inscription of fiber-compatible active waveguides in high-gain glass, followed by direct interconnection with few-mode fibers, is one of the most promising solutions for all-optical mode-division multiplexing. In this work, based on the femtosecond laser writing technique, we propose a general fabrication scheme for inscribing high-order mode waveguides in glass, by carefully tailoring the cross-section of the waveguides to match the mode intensity distribution via an improved multi-scan approach. Specifically, we design and fabricate two kinds of waveguides, namely, LP01-mode waveguide and LP11-mode waveguide in a highly Er3+-doped phosphate glass, enabling the insertion loss of the waveguides to be as low as 1.88 dB, and the mode extraction factor of the LP11-mode waveguide up to ∼24 dB. Importantly, we have successfully achieved optical amplification of the waveguides, with an on-off gain as high as 3.52 dB. This novel high-order mode waveguide amplifier has broad application prospects in monolithic on-chip integrated photonic light sources and optical interconnection with few-mode fiber and/or silicon-based waveguide.
3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Daoyuan Chen,Zhi Chen,Yi Yang,Yuying Wang,Xuhu Han,Kuen Yao Lau,Zhemin Wu,Chen Zou,Yu Zhang,Beibei Xu,Xiaofeng Liu,Zhijun Ma,Guoping Dong,Giuseppe Barillaro,Lijing Zhong,Jianrong Qiu

DOI: https://doi.org/10.1002/adma.202404493

IF: 29.4

2024-05-10

Advanced Materials

Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied,chemistry, physical, condensed matter
Fast, Precise, High Contrast Laser Writing for Photonic Chips with Phase Aberrations

Bangshan Sun,Simon Moser,Alexander Jesacher,Patrick S. Salter,Robert R. Thomson,Martin J. Booth

DOI: https://doi.org/10.1002/lpor.202300702

2024-04-14

LASER & PHOTONICS REVIEWS

Abstract:A new ultrafast laser waveguide writing method (SPIM‐WG) is extensively studied by taking advantage of phase aberrations. Adopting energy‐relocated focus, the method is capable to create photonic chips in glass with high precision, while achieving high refractive index contrasts (0.009 to 0.021) and high scanning speeds (20 mm s−1 or higher) at the same time. Integrated photonic chips have significant potential in telecommunications, classic computing, quantum systems, and topological photonics. Direct laser writing offers unique capability for creating three‐dimensional photonic devices in an optical glass chip with quick prototyping. However, it is a challenge for existing laser writing schemes to create index‐modified structures in glass that precisely match the laser focal shape while also achieving high refractive index contrasts and high scanning speeds. Here, we introduce a refractive index modification scheme that combines the advantages of non‐thermal and thermal regime fabrication methods. We also propose a waveguide formation model that is verified through a thorough study on the effects of phase aberrations. The presented new photonic chip fabrication scheme uses a novel focal intensity distribution, where pulse energy is relocated to the bottom of a laser focus by manipulating primary and higher order spherical aberrations. The technique can produce index modifications with high scanning speed (can be 20 mm/s or higher), high index contrast (ranging from 0.009 to 0.021), and high precision to fabricate with arbitrary cross‐sections. This method has potential to expand the capabilities of photonic chips in applications that require small‐scale, high precision, or high contrast refractive index control.
On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Yunfei Niu,Yunlong Niu,Xiaopeng Hu,Yijia Hu,Qingyang Du,Shaoliang Yu,Tao Chu

DOI: https://doi.org/10.1515/nanoph-2023-0323

IF: 7.5

2023-01-01

Nanophotonics

Abstract:The ability to manipulate light propagation sets the foundations for optical communication and information processing systems. With the ever-growing data capacity and data rate, photonic integrated circuits have attracted increasing attentions of researchers owing to their large-volume integration capacity and fast operation speed. In this work, we proposed and experimentally demonstrated a new wavefront shaping method using waveguide arrays with hyperbolic secant refractive index profiles. Through theoretically analyzing the diffraction and coherence properties, we found that a single waveguide array can perform both imaging and phase transformation, which are the two primary functions of optical lenses. We further expanded this function and fabricated the corresponding devices on a silicon nitride waveguide platform. Deterministic beam shaping, such as focusing, expansion, collimation, and steering, is successfully realized. This wavefront control method exhibits the potential for on-chip optical routing, ranging, sensing, etc., with high integration density and scalability.
Laser Printing of Large‐Area Conformal 3D Photonic Circuits in Glass

Xuhu Han,Yuying Wang,Jiacheng Hu,Lijing Zhong,Jianrong Qiu

DOI: https://doi.org/10.1002/lpor.202400060

2024-01-01

LASER & PHOTONICS REVIEWS

Abstract:Photonic integrated circuits (PICs) are iterating on electronic ones to enable higher-speed parallel computing while meeting the growing demands for energy efficiency in big-data processing. However, manufacturing multi-layered and 3D PICs remains challenging based on conventional planar lithography. Here, a rapid prototyping technique is delineated to configure large-area and 3D PIC in glass based on laser-direct written optical waveguides by employing femtosecond cylindrically polarized vortex laser beams. The vortex laser beam is mathematically rotationally invariant and capable of conformally transforming waveguide cross-sections at arbitrary bending angles of 0-90 degrees and across a large depth change. Based on this approach, a one-layer 12-core waveguide circuit with a variable cross-section (diameter 5-11.5 mu m) while maintaining a high mode ellipticity >0.974, as well as a more complex three-layer 36-core connector in which the waveguide dives continuously from 50 mu m to 550 mu m with a small loss difference of <0.1 dB is demonstrated. This work offers a pathway for 3D imprinting of large-area photonic circuits in glass and other transparent materials, which has potential applications in high-efficiency photonic computing, multidimensional quantum networks, and 3D optics topology.
Low-loss skimming waveguides with controllable mode leakage for on-chip saturable absorbers

Yi Yang,Lijing Zhong,Yudong Cui,Yuying Wang,Daoyuan Chen,Kuen Yao Lau,Xiaofeng Liu,Zhijun Ma,Giuseppe Barillaro,Zhi Chen,Jianrong Qiu

DOI: https://doi.org/10.1515/nanoph-2023-0049

IF: 7.5

2023-06-02

Nanophotonics

Abstract:Emerging 3D photonic circuits would greatly benefit from the ability to integrate skimming waveguides with low loss and controllable inscription depth into photonic circuits. These waveguides allow for the interaction of guiding light directly with external modulation signals and enable programmable photonic circuits. Here, we report the fabrication of a novel photonic-lattice-like skimming waveguide (PLLSW) using femtosecond laser writing. Our method enables fine control of cross-sectional symmetry and writing depth of waveguides, achieving a minimum depth of 1 μm and a low insertion loss of 1 dB. Based on the PLLSW, we demonstrate on-chip light modulation by designing an evanescent-field-type saturable absorber through the coupling of a carbon nanotube film with the PLLSW, which exhibits saturation intensity from 20 to 200 MW/cm 2 through the balanced twin-detector measurement. The strong nonlinear optical response of the PLLSW-based saturable absorber is further exploited to drive a Q-switched pulse laser at 1550 nm based on a fiber laser cavity. Our work demonstrates an effective method to integrate nonlinear optical materials into a glass chip for all-optical switching based on 3D waveguides, which holds great potential for the construction of large-scale programmable photonic circuits in the future.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Zengling Li,Yalun Wang,Jiajia Wu,Zhiqiang Wang,Minhan Lou,Ke Sun,Jianrong Qiu,Dezhi Tan

DOI: https://doi.org/10.1016/j.optlaseng.2024.108467

IF: 5.666

2024-01-01

Optics and Lasers in Engineering

Abstract:We have developed mode-tunable waveguides through femtosecond laser direct writing in glass. The structural changes and formation mechanisms were investigated by Raman mapping. The waveguide exhibited a record-low propagation loss of 0.14 dB/cm and an insertion loss of 0.23 dB at 520 nm. This work presents a new technique for producing waveguides for visible light photonic integrated devices.
Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

Ye Luo,Chunlei Sun,Hui Ma,Maoliang Wei,Jialing Jian,Chuyu Zhong,Junying Li,Renjie Tang,Zequn Chen,Kathleen A. Richardson,Hongtao Lin,Lan Li

DOI: https://doi.org/10.3390/photonics9020094

IF: 2.536

2022-01-01

Photonics

Abstract:The interlayer coupler is one of the critical building blocks for optical interconnect based on multilayer photonic integration to realize light coupling between stacked optical waveguides. However, commonly used coupling strategies, such as evanescent field coupling, usually require a close distance, which could cause undesired interlayer crosstalk. This work presents a novel interlayer slope waveguide coupler based on a multilayer chalcogenide glass photonic platform, enabling light to be directly guided from one layer to another with a large interlayer gap (1 µm), a small footprint (6 × 1 × 0.8 µm3), low propagation loss (0.2 dB at 1520 nm), low device processing temperature, and a high bandwidth, similar to that in a straight waveguide. The proposed interlayer slope waveguide coupler could further promote the development of advanced multilayer integration in 3D optical communications systems.
Generating a Sub-Nanometer-confined Optical Field in a Nanoslit Waveguiding Mode

Liu Yang,Zhanke Zhou,Hao Wu,Hongliang Dang,Yuxin Yang,Jiaxin Gao,Xin Guo,Pan Wang,Limin Tong

DOI: https://doi.org/10.1117/1.ap.5.4.046003

IF: 13.582

2023-01-01

Advanced Photonics

Abstract:We propose to generate a sub-nanometer-confined optical field in a nanoslit waveguiding mode in a coupled nanowire pair (CNP). We show that, when a conventional waveguide mode with a proper polarization is evanescently coupled into a properly designed CNP with a central nanoslit, it can be efficiently channeled into a high-purity nanoslit mode within a waveguiding length <10 mu m. The CNP can be either freestanding or on-chip by using a tapered fiber or planar waveguide for input-coupling, with a coupling efficiency up to 95%. Within the slit region, the output diffraction-limited nanoslit mode offers an extremely confined optical field (similar to 0.3 nm x 3.3 nm) with a peak-to-background ratio higher than 25 dB and can be operated within a 200-nm bandwidth. The group velocity dispersion of the nanoslit mode for ultrafast pulsed operation is also briefly investigated. Compared with the previous lasing configuration, the waveguiding scheme demonstrated here is not only simple and straightforward in structural design but is also much flexible and versatile in operation. Therefore, the waveguiding scheme we show here may offer an efficient and flexible platform for exploring light-matter interactions beyond the nanometer scale, and developing optical technologies ranging from superresolution nanoscopy and atom/molecule manipulation to ultra-sensitivity detection.
Toward 3D Integration of Highly See‐Through Photonic Circuits in Glass

Lijing Zhong,Yuying Wang,Dezhi Tan,Jianrong Qiu

DOI: https://doi.org/10.1002/lpor.202200767

2023-04-05

Abstract:Embedding naked‐eye‐invisible optical elements in transparent panels is at the heart of enabling mobile transparent accessories by making see‐through screens. Here, based on the laser writing technique, a general strategy of integrating naked‐eye‐invisible photonic waveguides into various glasses is reported by establishing a synergistic control of the thermodynamic and dynamic behavior over the matter fluid in the laser irradiated confined region to suppress the generation of scattering centers. Embedding naked‐eye‐invisible electronic and optical elements in transparent panels is at the heart of enabling mobile transparent accessories by making see‐through smart screens. Here, a novel invisible photonic element, highly see‐through (HST) waveguide, is reported, which is written by femtosecond laser in glass. A general synergistic control of the thermodynamic and dynamic behavior over the matter fluid in the laser irradiated confined region to tune the cross‐section of waveguides and suppress the generation of scattering centers in the waveguides is established. An effective reduction of light leakage (covering red, green, and blue coupled light) by an order of magnitude compared to conventional waveguides is achieved, making it highly see‐through at bright illumination of >100 lux. A general dynamical model based on a frozen‐in shock wave diffusion process is proposed, which is applicable to various glasses regardless of their compositions. Ultra‐wide tuning of HST waveguide mode diameters from 4.9 to 26.5 μm is demonstrated, making it versatile for functionalizing various transparent screens by mode‐matching with fiber sources and integrated planar waveguides of different working wavelengths.
Integrated Flexible Chalcogenide Glass Photonic Devices

Lan Li,Hongtao Lin,Shutao Qiao,Yi Zou,Sylvain Danto,Kathleen Richardson,J. David Musgraves,Nanshu Lu,Juejun Hu

DOI: https://doi.org/10.1038/nphoton.2014.138

IF: 35

2014-01-01

Nature Photonics

Abstract:Photonic integration on plastic substrates enables emerging applications ranging from flexible interconnects to conformal sensors on biological tissues. Such devices are traditionally fabricated using pattern transfer, which is complicated and has limited integration capacity. Here we pioneered a monolithic approach to realize flexible, high-index-contrast glass photonics with significantly improved processing throughput and yield. Noting that the conventional multilayer bending theory fails when laminates have large elastic mismatch, we derived a mechanics theory accounting for multiple neutral axes in one laminated structure to accurately predict its strain-optical coupling behavior. Through combining monolithic fabrication and local neutral axis designs, we fabricated devices that boast record optical performance (Q=460,000) and excellent mechanical flexibility enabling repeated bending down to sub-millimeter radius without measurable performance degradation, both of which represent major improvements over state-of-the-art. Further, we demonstrate that our technology offers a facile fabrication route for 3-D high-index-contrast photonics difficult to process using traditional methods.
Suppression of bend loss in writing of three-dimensional optical waveguides with femtosecond laser pulses

Zhengming Liu,Yang Liao,Zhiwei Fang,Wei Chu,Ya Cheng

DOI: https://doi.org/10.48550/arXiv.1802.03461

2018-02-08

Abstract:We provide a solution toward compact and low-loss three dimensional (3D) photonic circuits by femtosecond laser direct writing of 3D waveguides in fused silica. We suppress the bend loss by sandwiching the waveguide between a pair of walls formed by internal modification of glass. Our method allows to reduce the bend loss of a curved waveguide with a bending radius of 15 mm by more than one order of magnitude.

Applied Physics
High Speed Precise Refractive Index Modification for Photonic Chips through Phase Aberrated Pulsed Lasers

Bangshan Sun,Simon Moser,Alexander Jesacher,Patrick S. Salter,Robert R. Thomson,Martin J. Booth

2023-07-27

Abstract:Integrated photonic chips have significant potential in telecommunications, classic computing, quantum systems, and topological photonics. Direct laser writing offers unique capability for creating three-dimensional photonic devices in an optical glass chip with quick prototyping. However, existing laser writing schemes cannot create index-modified structures in glass that precisely match the laser focal shape while also achieving high scanning speed and high refractive index contrast. Here, we introduce the theory of a refractive index modification scheme that combines the advantages of both traditional non-thermal and thermal regime fabrication methods. We also propose a model of waveguide formation that was verified through a thorough study on the effects of phase aberrations on the laser focus. The presented new photonic chip fabrication scheme uses a novel focal intensity distribution, where pulse energy is relocated to the bottom of a laser focus by manipulating primary and higher order spherical aberrations. The technique can produce index modifications with high scanning speed (20 mm/s or higher), high index contrast (16 x 10-3), and high precision to fabricate with arbitrary cross-sections. This method has potential to expand the capabilities of photonic chips in applications that require small-scale, high precision, or high contrast refractive index control.

Optics,Applied Physics
Spatial-Mode-Coupling-Based Dispersion Engineering For Integrated Optical Waveguide

Yu Li,Jiachen Li,Yuandong Huo,Minghua Chen,Sigang Yang,Hongwei Chen

DOI: https://doi.org/10.1364/OE.26.002807

IF: 3.8

2018-01-01

Optics Express

Abstract:Dispersion ultimately limits the efficiency of the nonlinear process in the optical waveguide. Traditional dispersion engineering method is to tailor the cross-section of the waveguide with both of the height and width. However, the fabrication process limits the design freedom of the height in some cases. To solve the problem, we develop a dispersion engineering technique based on spatial mode coupling. Just by tailoring the width of waveguide without altering the height, the proposed method achieves anomalous dispersion with a range of 70 nm numerically and experimentally changes the dispersion of a micro-ring resonator from -750 +/- 30 ps/nm/km to 1300 +/- 200 ps/nm/km over a wavelength range of 25 nm with high Q of 0.8 million on the Si3N4/SiO2 waveguide platform. This technique overcomes the restrict from the fabrication process to the optical waveguide on the dispersion control and can enlarge application of the nonlinear optics on chip. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Jianping Yu,Jian Xu,Aodong Zhang,Yunpeng Song,Jia Qi,Qiaonan Dong,Jianfang Chen,Zhaoxiang Liu,Wei Chen,Ya Cheng

DOI: https://doi.org/10.3390/s22239449

IF: 3.9

2022-12-04

Sensors

Abstract:We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation. Spatially shaped fs laser-assisted chemical etching was first performed to form 3D hollow microchannels in glass, which were composed of embedded straight channels, tapered channels, and vertical channels connected to the glass surface. Then, carbon dioxide laser-induced thermal reflow was carried out for the internal polishing of the whole microchannels and sealing parts of the vertical channels. Finally, 3D optofluidic spot-size converters (SSC) were formed by filling a liquid-core waveguide solution into laser-polished microchannels. With a fabricated SSC structure, the mode spot size of the optofluidic waveguide was expanded from ~8 μm to ~23 μm with a conversion efficiency of ~84.1%. Further measurement of the waveguide-to-waveguide coupling devices in the glass showed that the total insertion loss of two symmetric SSC structures through two ~50 μm-diameter coupling ports was ~6.73 dB at 1310 nm, which was only about half that of non-SSC structures with diameters of ~9 μm at the same coupling distance. The proposed approach holds great potential for developing novel 3D fluid-based photonic devices for mode conversion, optical manipulation, and lab-on-a-chip sensing.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

[Experience in studying patients in first stage of hypertensive disease with initial cerebral syndrome in connection with their working conditions].

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Photonic Lattice-Like Waveguides in Glass Directly Written by Femtosecond Laser for On-Chip Mode Conversion

On-chip beam rotators, adiabatic mode converters, and waveplates through low-loss waveguides with variable cross-sections

Phase Control in Glass-Composite for Three-Dimensional Active Waveguide with Broadband Response

Künstlerische Therapien bei schweren psychischen Störungen

High-order mode waveguide amplifier with high mode extinction ratio written in an Er3+-doped phosphate glass

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Fast, Precise, High Contrast Laser Writing for Photonic Chips with Phase Aberrations

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Laser Printing of Large‐Area Conformal 3D Photonic Circuits in Glass

Low-loss skimming waveguides with controllable mode leakage for on-chip saturable absorbers

Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

Generating a Sub-Nanometer-confined Optical Field in a Nanoslit Waveguiding Mode

Toward 3D Integration of Highly See‐Through Photonic Circuits in Glass

Integrated Flexible Chalcogenide Glass Photonic Devices

Suppression of bend loss in writing of three-dimensional optical waveguides with femtosecond laser pulses

High Speed Precise Refractive Index Modification for Photonic Chips through Phase Aberrated Pulsed Lasers

Spatial-Mode-Coupling-Based Dispersion Engineering For Integrated Optical Waveguide

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication