Abstract:The interdigital transducer (IDT) of the traditional Mach-Zehnder (MZ) acousto-optic modulator on a silicon-oninsulator (SOI) platform is located outside its two arms. The crest and trough of the surface acoustic wave (SAW) are used to modulate the two arms of the MZ interferometer so as to achieve a high modulation efficiency. Therefore, the distance between the two arms must be odd multiples of half acoustic wavelength. However, since the substrate is usually not uniform, the wavelength of the SAW changes as it transmits through the surface of the device. As a result, the exact distance between the two arms is difficult to choose. On the other hand, the SAW losses a portion of energy after passing through the first arm of the MZ interferometer, so the modulation of the second arm becomes much weaker. To solve these problems, we propose a new structure where its IDT is situated in the middle of the two arms of the MZ interferometer. With this scheme, the two arms of the MZ interferometer are located exactly at the crest and the trough of the SAW, while they are modulated with equal strength. In this paper, we first use the finite element method to simulate the acoustic frequency and the surface displacement of the excited SAW. Then we deduce the refractive index variations of all layers according to their acousto-optic effects. After that, we analyze the influences of different factors on the acousto-optic modulation efficiency, including the type and size of waveguide, the thickness of zinc oxide (ZnO) layer, and the area it covers, the number of electrodes, etc. These parameters are accordingly optimized to enhance the modulation efficiency. Modeling result based on COMSOL Multiphysics indicates that when the width of the strip waveguide is 6 mu m, the ZnO layer covers only the area under the IDT and has a thickness of 2.2 mu m, and the number of the electrodes is 50, the effective refractive index variation of the waveguide reaches 4.08 x 10(-4) provided that the amplitude of the driving voltage is 1 V. This value is 12% higher than that of the traditional structure.

Influence of Displacement and Patterning of Phase Shifters for Piston Mode Operation of Temperature Compensated Surface Acoustic Wave Resonators on SiO2/LiNbO3 Structure

Comparative Study of Piston Mode Designs for Temperature-Compensated Surface Acoustic Wave Resonators Using SiO2/LiNbO3 Structure

An improved Mach-Zehnder acousto-optic modulator on a silicon-on-insulator platform

Use of Dielectric Stripes for Transverse Mode Suppression for Surface Acoustic Wave Resonators

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Transverse Modes in Temperature Compensated Surface Acoustic Wave Devices

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Use of periodically slotted SiO2 in a layered surface acoustic wave structure for transverse mode suppression

Impact of Coupling Between Multiple SAW Modes on Piston Mode Operation of SAW Resonators.

S0-like SAW mode resonator on LiNbO3/SiO2/SiC structure

Suppression of Transverse-Mode Spurious Responses by Selectively SiO2 Removing Technique for SAW Resonators on a SiO2/Al/LiNbO3 Structure

Suppression of Transverse Modes in 50°YX-LiTaO 3 /SiO 2 /Si POI SAW Resonator with Groove Configuration

Investigation of Spurious Mode Suppression in 3.8 GHz Shear-Horizontal Mode Surface Acoustic Wave Resonators Based on LiNbO3/SiO2/Si Multilayer Structure

Suppression of Transverse-Mode Spurious Responses for Saw Resonators on Sio2/Al/Linbo3 Structure by Selective Removal of Sio2

Transverse Mode Suppression for S0-Like SAW Mode Resonator

Surface Acoustic Wave Devices Based on High Quality Temperature-Compensated Substrates

Effects of Design and Process Parameters on Performances of Surface Acoustic Wave Devices

SAW velocity reduction and spurious modes suppression on the layer structure

Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression

Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators