Highly Sensitive Direct‐Conversion Vacuum Flat‐Panel X‐Ray Detectors Formed by Ga2O3‐ZnO Heterojunction Cold Cathode and ZnS Target and Their Photoelectron Multiplication Mechanism

Zhipeng Zhang,Manni Chen,Chengyun Wang,Kai Wang,Shaozhi Deng,Jun Chen
DOI: https://doi.org/10.1002/admi.202102268
IF: 5.4
2022-01-01
Advanced Materials Interfaces
Abstract:X-ray detectors are significantly applied in medical diagnoses, industrial inspections, and scientific researches, but the detection sensitivity is limited by the material, device structure, and detection mechanism. This article proposes a direct-conversion flat-panel X-ray detector formed by Ga2O3-ZnO heterojunction cold cathode and ZnS target to achieve highly sensitive X-ray detection. The field emission efficiency of Ga2O3-ZnO heterojunction cold cathode is improved by optimizing the spacing between the adjacent circular pattern in patterned ZnO nanowire arrays. The electron-hole pairs generated by X-ray photons are multiplied in ZnS target by the electron bombardment induced photoconductivity effect, resulting in a high internal gain (1 x 10(4)%) and a high X-ray detection sensitivity (7.1 x 10(2) mu CGy(air)(-1) cm(-2)) for 6 keV X-ray at 9.2 V mu m(-1) electric field. In addition, the proposed detector has low dark current density (50 pA mm(-2) at 9.2 V mu m(-1) electric field), good stability (0.2% fluctuation for 60 s), and fast response speed (rise time: 5.3 ms) owing to a built-in electric field in Ga2O3-ZnO heterojunction, a ballistic electron transportation in vacuum gap, and a high resistance in ZnS thin film.
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