Laser Ablation Deposition of Ni-superalloy Thin Films

Ulrich Klug,Peng Li,Jyoti Mazumder
DOI: https://doi.org/10.2351/1.5060139
2003-01-01
Abstract:KrF-Excimer laser has been used to deposit Ni-superalloy thin films under vacuum with the aim to grow single-crystal structure. X-ray diffraction and scanning electron microscopy were applied to check the microstructure of the films. Particularly the influence of the substrate temperature during the deposition process has been explored in this study. Energy dispersive X-ray analysis showed congruence in element composition between target and films. The capability of growing epitaxial single-crystal films by laser ablation is evaluated.
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