Abstract:The micro-actuator is a key element of the MEMS-based initiator. In order to ensure safety and achieve the function of detonation energy isolation and transmission of the micro-pyrotechnic sequence, it is necessary to set up a safety and arming device between the micro-heater and energetic materials on the next level in the initiator. In this paper, the MEMS safety and arming device was simulated and analyzed, and the actuator chip was made based on MEMS technology and then tested. The results showed that the maximum temperature and displacement generated by the silicon-based micro-actuator increased with increasing actuation voltage. When the actuation voltage was larger than 16 V, the device could not work normally because the maximum temperature of the device was higher than the melting point of silicon. Furthermore, the influence factors on the state-recoverable property of the device were studied by changing the actuation voltage, length, width, and thickness of the V-shaped beam in a single way. The results showed that when the actuation voltage remained unchanged and the other factors were changed in a single way, the smaller structural parameters resulted in the shorter response time and recovery time, while the displacement generated was smaller. Meanwhile, the larger structural parameters resulted in larger displacements, while the response time and recovery time were larger. In addition, the state-recoverable characteristics of the device were affected by the working environmental temperature. It is of great significance to the design of the MEMS-based initiator.

Design and Characterization of a Large Displacement Electro-thermal Actuator for a New Kind of Safety-and-Arming Device

Design of a Novel Electrothermal Actuator for Integrated MEMS Safety-and-arming Devices.

Design of a Large Displacement Thermal Actuator with a Cascaded V-beam Amplification for MEMS Safety-and-arming Devices

Integration Design of MEMS Electro-Thermal Safety-and-arming Devices

Design and Research on Large Displacement Bidirectional MEMS Stage with Interlock Mechanism

The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism.

Designing Micro-displacement Amplifier for Giant Magnetostrictive Actuator

Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement

Design of a High-Speed Electrothermal Linear Micromotor for Microelectromechanical Systems Safety-and-arming Devices

Research on Multiphysics-Driven MEMS Safety and Arming Devices

Thermal Actuator of Safety and Arming Device Based on MEMS Fuze

A thermal actuator design for a safe and arming mems interrupter

Design and Characterization of a Microelectromechanical System Electro-Thermal Linear Motor with Interlock Mechanism for Micro Manipulators.

Large Displacement Spring-Like Electro-Mechanical Thermal Actuators with Insulator Constraint Beams

Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Design and Fabrication of an Electro-Thermal Linear Motor with Large Output Force and Displacement

A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

An Out-of-plane Electrostatic Actuator Based on the Lever Principle

Design of Silicon-Based Micro-Actuator with Two State-Recoverable Semicircle Slides for Switching On/off Detonation Energy

Design of a microelectromechanical systems microgripper with integrated electrothermal actuator and force sensor

Electro-thermal actuator using non-silicon micro fabrication technology