Abstract:Micro-optical array projectors are discussed as replacement for structured illumination in applications with critical space requirements. The concept bases on the fly’s eye condenser principle and a well-defined buried array of micro-dia. Their optical performance benefits from etendue conservation and the large depth of field of applied short focal lenses. As an established technique to generate microlens profiles, thermal reflow of binary patterned photoresist is known for more than three decades. This approach leads to lens arrays with filling factors up to ~90% when used in hexagonal arrangement. Further increment requires direct writing methods such as grayscale lithography. Recently a LED based projection stepper-like lithography system became competitive, because it allows structure depths beyond 50 microns. It utilizes an LCoS micro-imager as variable 8-bit reticle and a high dynamic dosage controlled illumination. This paper represents the evaluation of the technique for the generation of refractive lens profiles by means of metrology and optical performance of micro-optical array projectors. Micro-array projectors based on circular lenslets will be compared, followed by the analysis of closely packed square-shaped lenslets. The aim is to understand the impact of lens shape deviation, conical constant or statistical distribution of lens properties like sag height, radius of curvature on the projection. A correlation of imperfections and quality loss due to scattering, aberrations, and mismatch of images in the overlay of different projectorlets will be given. The work concludes with an outlook on further developments in mastering micro-optical profiles for illumination application.

Development of Microlens Arrays:From Fabrication to Photonic Applications

Fabrication of High Integrated Microlens Arrays on a Glass Substrate for 3D Micro-Optical Systems

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Development and Preparation of Refractive Infrared Microlens Array Device

Design And Fabrication Of Wafer-Level Microlens Array With Moth-Eye Antireflective Nanostructures

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process

Direct write of microlens array using digital projection photopolymerization

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes.

Fabrication of Microlens Array with Controllable High NA and Tailored Optical Characteristics Using Confined Ink-Jetting

Fabrication of Large-Area Cylindrical Microlens Array Based on Electric-Field-driven Jet Printing

Fabrication of Microlens Array with Well-Defined Shape by Spatially Constrained Thermal Reflow

Single-pulse Writing of a Concave Microlens Array.

A Microlens Array with Different Focal Lengths Fabricated by Roll-To-Roll UV Lithography

Fabrication of Bioinspired Omnidirectional and Gapless Microlens Array for Wide Field-of-view Detections

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

Self-assembled microlens array with controllable curvatures for integral imaging 3D display

Evaluation of lenslet fabrication technologies for micro-optical array projectors

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Realization of Reconfigurable Super-Resolution Imaging by Liquid Microlens Arrays Integrated on Light Disk