Silicon Oxide Based on-Chip Electron Sources

Wei Yang,Gongtao Wu,Zhiwei Li,Yuwei Wang,Xianlong Wei
DOI: https://doi.org/10.1109/ICOPS37625.2020.9717449
2020-01-01
Abstract:On-chip electron sources driven by electricity have been pursued by researchers for more than 60 years for their light in mass, compactness, being integratable, high energy- efficiency and fast response, etc. Thought many efforts have been devoted to them, the results are still unsatisfactory. Recently, we have proposed a new type of on-chip electron source based on electroformed silicon oxide bet...
What problem does this paper attempt to address?