Chemical Vapor Sensor Arrays Based on Microfabricated Wristwatch Tuning Forks

N. Tao,Minghan Ren,Erica Forzani,Francis Tsow

DOI: https://doi.org/10.1149/ma2005-02/37/1281

2006-01-01

ECS Meeting Abstracts

Abstract:Abstract not Available.

What problem does this paper attempt to address?

Chemical Sensor Based on Microfabricated Wristwatch Tuning Forks.

MH Ren,ES Forzani,NJ Tao

DOI: https://doi.org/10.1021/ac048320e

IF: 7.4

2005-01-01

Analytical Chemistry

Abstract:We report here a chemical sensor based on detecting the mechanical response of a thin (approximately 10-microm) polymer wire stretched across the two prongs of a wristwatch quartz tuning fork (QTF). When the fork is set to oscillate, the wire is stretched and compressed by the two prongs. The stretching/compression force changes upon adsorption of analyte molecules onto/into the polymer wire, which is detected by the QTF with pico-Newton force sensitivity. An array of such sensors with different polymer wires is used for simultaneous detection of several analytes and for improvement of pattern recognition. The low cost (approximately 10 cent) of the QTF, together with that an array of QTFs can be driven to oscillate simultaneously and their resonance frequencies detected with the same circuit, promises a high performance, low cost, and portable sensor for detecting various chemical vapors. We demonstrate here detection of parts-per-billion-level water, ethylnitrobenzene, and ethanol vapors using the QTF arrays.
Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor.

Rui Wang,Francis Tsow,Xuezhi Zhang,Jhih-Hong Peng,Erica S. Forzani,Yongsheng Chen,John C. Crittenden,Hugo Destaillats,Nongjian Tao

DOI: https://doi.org/10.3390/s90705655

IF: 3.9

2009-01-01

Sensors

Abstract:A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ∼2 pg/mm(2) and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring.
Polymer Wire Chemical Sensor Using a Microfabricated Tuning Fork

S Boussaad,NJ Tao

DOI: https://doi.org/10.1021/nl0344155

IF: 10.8

2003-01-01

Nano Letters

Abstract:We have measured the mechanical properties of a polymer wire bridged across the two prongs of a microfabricated tuning fork. The polymer wire is formed by stretching so that it has a built-in mechanical stress. Upon exposure to organic vapors, the stress in the polymer wire diminishes, which is sensitively detected from the changes in the resonance of the tuning fork. We have also shown that by trimming the polymer wire from micrometers down to nanometers the sensitivity and response improve considerably because of an increased surface-to-volume ratio and sharper resonance of the polymer wire-tuning fork system.
Fabrication of microcoil/microsprings for novel chemical and biological sensing

Yangqing Lu,Hai-Feng Ji

DOI: https://doi.org/10.1016/j.snb.2006.10.058

2007-01-01

Abstract:This paper reports the fabrication of a novel microsensor structure using inductively coupled plasma source (ICP) dry etching process. The novel sensor is based on a SiO2/Si/SU-8 trilayered microcoil/microspring structure. The diameter of the microcoil was approximately 600μm. The ICP process and SU-8 exposing time are discussed. The SiO2 layer can be conveniently modified according to typical silica surface modification procedures. The microcoils could expand or contract upon interaction of specific species in the environment with receptors on the SiO2 surface due to the surface stress or energy applied on the SiO2 surface of the microcoil. This microcoil device may be widely used in biomedical and chemical sensing applications.
Selective Detection of Sulfur Derivatives Using Microfabricated Tuning Fork-Based Sensors.

Anant Rai,Francis Tsow,Sanam Nassirpour,Jeffrey Bankers,Martina Spinatsch,M Pete He,Erica Forzani,N J Tao

DOI: https://doi.org/10.1016/j.snb.2009.04.053

2009-01-01

Abstract:The paper describes an integtrated sensor system that can selectively and reversibly detect sulfur derivatives in the presence of interferent molecules. This is accomplished by integrating analyte-specific sensing materials with optimized filter materials. Microfabricated quartz tuning fork arrays are used to provide fast, accurate and low-cost transduction of the analyte binding events into electronic signals. The concept is demonstrated for detection of three sulfur derivatives - dimethyl disulfide, ethanethiol and methylsulfide.
A novel colorimetric tuning fork sensor for ammonia monitoring

Laxmi Raj Jaishi,Jingjing Yu,Wei Ding,Francis Tsow,Xiaojun Xian

DOI: https://doi.org/10.1016/j.snb.2024.135342

IF: 9.221

2024-01-18

Sensors and Actuators B Chemical

Abstract:In this work, we reported the design and performance of a novel colorimetric tuning fork (CTF)-based gas sensor that could simultaneously capture both chemical and mechanical information of the same sensing event. The CTF sensor could transduce optical signals from a colorimetric reaction and frequency signals from the mass change. By transducing 2-dimensional (2D) sensing signals on the same CTF sensing unit, different aspects of physicochemical properties could provide a rich spectrum of binding events, leading to more accurate, sensitive, and reproducible gas detection. We demonstrated the CTF-based 2D sensing concept by coating bromophenol blue on the prongs of a micro quartz tuning fork (MQTF) as the receptor for ammonia detection. Our test results exhibit CTF ammonia sensor could reversibly detect ammonia in the air over a wide range (500 ppb - 1000 ppm) with a detection limit of 500 ppb and excellent selectivity. Due to its small size (a few millimeters), low cost (less than $1), simple fabrication process, and high performance, the CTF sensor could serve as an excellent chemical sensing unit for wearables and point-of-care screening tools.

chemistry, analytical,electrochemistry,instruments & instrumentation
Micro-Quartz Crystal Tuning Fork-Based Photodetector Array for Trace Gas Detection

Linguang Xu,Kun Liu,Jingqiu Liang,Jingsong Li,Sheng Zhou

DOI: https://doi.org/10.1021/acs.analchem.3c00318

IF: 7.4

2023-04-22

Analytical Chemistry

Abstract:In this paper, a micro-quartz crystal tuning fork (M-QCTF) was first demonstrated for developing a low-cost, highly sensitive quartz tuning fork photodetector array for spectroscopic applications. A gas sensing system based on the M-QCTF photodetector and highly sensitive wavelength modulation spectroscopy was developed. Typically, an atmospheric greenhouse gas methane (CH(4)) molecule was selected as the target analyte for evaluating the M-QCTF and standard commercial QCTF detectivity. The...

chemistry, analytical
Tuning Forks As Micromechanical Mass Sensitive Sensors for Bio- or Liquid Detection

J Zhang,S O'Shea

DOI: https://doi.org/10.1016/s0925-4005(03)00320-4

IF: 9.221

2003-01-01

Sensors and Actuators B Chemical

Abstract:The low frequency mechanical resonators (quartz tuning forks, 32,768Hz) have been developed to detect the mass loading due to thin solid films or Newtonian liquids. First, the simplified cantilever model was introduced to analog the performance of tuning forks. The mass loading sensitivity have been introduced and compared with the quartz crystal microbalance (QCM). Experimentally, two kinds of excitation modes, called self-feedback driving and externally passive driving, have been investigated to drive the forks for various sensing applications. The theoretical and measured sensitivity of mass loading is ∼75 and ∼100Hz/μg, respectively, which is comparable with the conventional QCM (∼1Hz/ng) since high-precision low frequency measurement (with accuracy of ∼0.01Hz) is easier to achieve. The tuning forks also can act as a chemical sensor working in the liquids. At last, the tuning forks had been used as both the biosensors for antigen–antibody affinity detection and the chemical sensors for liquid density detection.
Microfabricated Tuning Fork Temperature And Infrared Sensor

francis tsow,nongjian tao

DOI: https://doi.org/10.1063/1.2731313

IF: 4

2007-01-01

Applied Physics Letters

Abstract:The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 degrees C and with a thermal limited noise level of 5 mu degrees C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response. (c) 2007 American Institute of Physics.
Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays

Peng Liu,Er-Xiong Ding,Zhenyu Xu,Xiaoqi Cui,Mingde Du,Weijun Zeng,Anastasios Karakassides,Jin Zhang,Qiang Zhang,Faisal Ahmed,Hua Jiang,Pertti Hakonen,Harri Lipsanen,Zhipei Sun,Esko I. Kauppinen

DOI: https://doi.org/10.1021/acsnano.4c01087

IF: 17.1

2024-07-14

ACS Nano

Abstract:With electronic devices evolving toward portable and high-performance wearables, the constraints of complex and wet processing technologies become apparent. This study presents a scalable photolithography/chemical-free method for crafting wearable all-carbon nanotube (CNT) photodetector device arrays. Laser-assisted patterning and dry deposition techniques directly assemble gas-phase CNTs into flexible devices without any lithography or lift-off processes. The resulting wafer-scale all-CNT...

materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
A Wearable Sensing System for Assessment of Exposures to Environmental Volatile Organic Compounds.

Cheng Chen,Francis Tsow,Xiaojun Xian,Erica Forzani,Nongjian Tao,Raymond Tsui

DOI: https://doi.org/10.1007/978-1-4939-2172-0_14

2015-01-01

Abstract:A portable chemical sensing system that integrates sample preconcentration, separation and detection as well as wireless communication functionalities into a compact, wearable format can provide continuous and real-time monitoring of volatile organic compounds in the environment. The sensing modality relies on tuning forks coated with molecularly imprinted polymers that, in conjunction with sample preconcentration, offer selective detection down to parts-per-billion levels. The use of capillary columns allows individual components of complex mixtures to be detected at these highly sensitive levels even in the presence of interferents. The wireless capability facilitates the utilization of a paired smartphone as the user interface as well as a vehicle for additional processing and storage of the measured data. This integrated approach offers a cost-effective and reliable platform for personal exposure assessment.
Quartz Tuning Fork Biosensor.

XD Su,CC Dai,J Zhang,SJ O'Shea

DOI: https://doi.org/10.1016/s0956-5663(01)00249-4

2002-01-01

Abstract:The use of quartz tuning forks for biosensor applications is investigated. The basis of the sensor is to coat the tuning fork surfaces with specific biomolecules and measure subsequent mass loading from the selective binding of complementary analytes. Two experimental set-ups are evaluated, direct mechanical excitation and self-excitation. Mechanical excitation is achieved by mounting the fork on a piezoelectric plate and it is found that the change in oscillation amplitude on adsorption can be monitored to give the change in mass. However, a major drawback is that the sensitivity is determined by the Q-factor, which varies significantly between different sensors and different experimental arrangements. In self-excitation mode, tuning fork motion is activated and detected by placing the fork within a tuned circuit. Using self-excitation mode, anti-human IgG modified tuning forks can sense the binding of human IgG in the range of 5-100 microg ml(-1). The significance of this study is that quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of facile microfabrication of arrays of quartz sensors.
Suspended Chalcogenide Microcavities for Ultra-Sensitive Chemical Detection.

Derek Kita,Hongtao Lin,Junying Li,Zhaohong Han,Peter Su,Tian Gu,Anu Agarwal,Anuptuna Yadav,Kathleen Richardson,Juejun Hu

DOI: https://doi.org/10.1109/icsens.2016.7808855

2016-01-01

Abstract:Here we report on the fabrication and characterization of air-clad on-chip chalcogenide microdisk cavities (Q=32,000) at wavelengths of 2.0-2.5 microns for infrared spectroscopy. In addition, we analyze a method of photothermal sensing that leverages high-thermal confinement in optical microcavities that is theoretically capable of achieving part-perbillion (ppb) level detection of trace gas molecules.
A Wearable and Wireless Sensor System for Real-Time Monitoring of Toxic Environmental Volatile Organic Compounds

Francis Tsow,Erica Forzani,Anant Rai,Rui Wang,Ray Tsui,Sal Mastroianni,Christopher Knobbe,A. Jay Gandolfi,N. J. Tao

DOI: https://doi.org/10.1109/jsen.2009.2030747

IF: 4.3

2009-01-01

IEEE Sensors Journal

Abstract:An integrated volatile organic toxicants sensor with a Bluetooth device interface has been developed. The device is based on novel tuning fork sensor platform along with a wireless communication/interface technology taken in an integrated system approach. It features high sensitivity and selectivity. The sensitivity and selectivity are accomplished through the use of novel tuning fork sensor modified by design (molecularly imprinted) polymers and selective filtering. Experiments have shown that the device can detect toxic volatile organic compounds (VOCs) under high concentrations of common interferents from flavors and fragrances. Applications of the device for detection of BTEX in real-world situations such as outdoor and gas station VOCs have also been demonstrated. All these features make the device a promising candidate to be deployed in real-world applications, particularly in environmental health and air pollution studies.
A Compact, Low-Power Cantilever-Based Sensor Array for Chemical Detection

Albert Loui,Timothy V. Ratto,Thomas S. Wilson,Erik V. Mukerjee,Zhiyu Hu,Todd Sulchek,Bradley R. Hart

2007-01-01

Abstract:A compact and low-power cantilever-based sensor array has been developed and used to detect various vapor analytes. This device employs sorptive polymers that are deposited onto piezoresistive cantilevers. We have successfully detected several organic vapors, representing a breadth of chemical properties and over a range of concentrations. Comparisons of the polymer/vapor partition coefficient to the cantilever deflection responses show that a simple linear relationship does not exist, emphasizing the need to develop an appropriate functional model to describe the chemical-to-mechanical transduction that is unique to this sensing modality.
Frequency-coded chemical sensors.

Francis Tsow,Erica S Forzani,N J Tao

DOI: https://doi.org/10.1021/ac7016162

IF: 7.4

2008-01-01

Analytical Chemistry

Abstract:We have developed a new method to intelligently sample analytes and introduce the analytes to sensors. The method automatically adjusts sampling duration according to the sensors' response to the analytes and converts the amplitude of the sensor output to a frequency output, giving us another opportunity to reduce noise in the signal. It also addresses some of the common sensor issues such as response time, saturation, chemical dynamic range, and sensor protection, saving precious detection time, protecting sensors, and enabling sensitive sensors built for low-concentration detection to be used for high-concentration detection as well. We have put together a system using a tuning fork chemical sensor as a sample sensor to demonstrate the feasibility and benefits of the new sensing technique.
Self-assembled Metal-Organic Frameworks Crystals for Chemical Vapor Sensing.

Chenlong Cui,Yayuan Liu,Hongbo Xu,Shaozhou Li,Weina Zhang,Ping Cui,Fengwei Huo

DOI: https://doi.org/10.1002/smll.201302983

IF: 13.3

2014-01-01

Small

Abstract:A 3D metal-organic frameworks (MOFs) crystals film is obtained via Langmuir-Blodgett technique and used as a photonic sensor for chemical vapor detection. The MOFs crystals film exhibits both acute responses towards various chemical vapors and high controllability in terms of peak intensity and position. The method represents a general, facile and flexible strategy for the fabrication of MOFs-based photonic sensors.
Ultra stable tuning fork sensor for low-temperature near-field spectroscopy

A Crottini,J L Staehli,B Deveaud,X L Wang,M Ogura

DOI: https://doi.org/10.1016/s0304-3991(01)00144-9

IF: 2.994

Ultramicroscopy

Abstract:We report on a distance control system for low-temperature scanning near-field optical microscopy, based on quartz tuning fork as shear force sensor. By means of a particular tuning fork-optical fiber configuration, the sensor is electrically dithered by an applied alternate voltage, without any supplementary driving piezo, as done so far. The sensitivity in the approach direction is 0.2nm, and quality factors up to 2850 have been reached. No electronic components are needed close to the sensor, allowing to employ it in a liquid He environment. The system is extremely compact and allows for several hours of stability at 5 K.
Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection

Yongliang Yang,Ying Chen,Pengcheng Xu,Xinxin Li

DOI: https://doi.org/10.1016/j.mee.2010.03.010

IF: 2.3

2010-01-01

Microelectronic Engineering

Abstract:This paper presents a quad-cantilever microsensor for on-the-spot detection of ultra-low concentration chemical vapors. Compared with conventional dual-cantilever sensors, the quad-cantilever configuration can form a fully cantilever-formed Wheatstone-bridge that possesses a higher sensitivity of twofold and more balanced condition to compensate for environmental noise like temperature fluctuation or air flow. Besides, the four integrated micro-cantilevers are made of SiO"2, with each having a single crystal silicon piezoresistor fully encapsulated by SiO"2. Thus, the quad-lever sensor achieves a very low signal noise of 0.2@mV. For specific detection, sensitive molecule layer is self-assembled on two sensing cantilevers, with another two as reference. The sensors are micro-fabricated with a single-side process from the wafer front-side. With wet anisotropic etch used to release the piezoresistive cantilevers, the new fabrication technique features low-cost and high-yield. Self-assembled with a novel dual-branch specific mono-layer, about 100ppt level trinitrotoluene (TNT) vapor has been rapidly and repeatedly detected.
Fabrication and Study of Micro Alkali-Metal Vapor Cell Applied to Chip Scale Atomic Clock

Tang Yue,Ren Ziming,Li Yunchao,Hu Xuwen,Zhang Yanjun,Yan Shubin

DOI: https://doi.org/10.3788/lop55.040201

2018-01-01

Abstract:By using the inductively coupled plasma (ICP) deep silicon etching machine and the anodic bonding system, the alkali-metal vapor cell applied to the chip scale atomic clock (CSAC) is fabricated. With the AZ4620 photoresist as a mask, the silicon surface morphology after deep silicon etching is studied and the deep silicon etching rates under different structures arc compared. The micro alkali-metal vapor cell with a sandwich structure is obtained by using the anodic bonding, and the saturation absorption line is detected. The experimental results show that a significant saturated absorption phenomenon is observed in the fabricated micro alkali-metal vapor cell when the temperature is 80 degrees C.

Chemical Vapor Sensor Arrays Based on Microfabricated Wristwatch Tuning Forks

Chemical Sensor Based on Microfabricated Wristwatch Tuning Forks.

Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor.

Polymer Wire Chemical Sensor Using a Microfabricated Tuning Fork

Fabrication of microcoil/microsprings for novel chemical and biological sensing

Selective Detection of Sulfur Derivatives Using Microfabricated Tuning Fork-Based Sensors.

A novel colorimetric tuning fork sensor for ammonia monitoring

Micro-Quartz Crystal Tuning Fork-Based Photodetector Array for Trace Gas Detection

Tuning Forks As Micromechanical Mass Sensitive Sensors for Bio- or Liquid Detection

Microfabricated Tuning Fork Temperature And Infrared Sensor

Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays

A Wearable Sensing System for Assessment of Exposures to Environmental Volatile Organic Compounds.

Quartz Tuning Fork Biosensor.

Suspended Chalcogenide Microcavities for Ultra-Sensitive Chemical Detection.

A Wearable and Wireless Sensor System for Real-Time Monitoring of Toxic Environmental Volatile Organic Compounds

A Compact, Low-Power Cantilever-Based Sensor Array for Chemical Detection

Frequency-coded chemical sensors.

Self-assembled Metal-Organic Frameworks Crystals for Chemical Vapor Sensing.

Ultra stable tuning fork sensor for low-temperature near-field spectroscopy

Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection

Fabrication and Study of Micro Alkali-Metal Vapor Cell Applied to Chip Scale Atomic Clock