Quad-cantilever microsensors with a low-cost single-sided micro-machining technique for trace chemical vapor detection

Yongliang Yang,Ying Chen,Pengcheng Xu,Xinxin Li

DOI: https://doi.org/10.1016/j.mee.2010.03.010

IF: 2.3

2010-01-01

Microelectronic Engineering

Abstract:This paper presents a quad-cantilever microsensor for on-the-spot detection of ultra-low concentration chemical vapors. Compared with conventional dual-cantilever sensors, the quad-cantilever configuration can form a fully cantilever-formed Wheatstone-bridge that possesses a higher sensitivity of twofold and more balanced condition to compensate for environmental noise like temperature fluctuation or air flow. Besides, the four integrated micro-cantilevers are made of SiO"2, with each having a single crystal silicon piezoresistor fully encapsulated by SiO"2. Thus, the quad-lever sensor achieves a very low signal noise of 0.2@mV. For specific detection, sensitive molecule layer is self-assembled on two sensing cantilevers, with another two as reference. The sensors are micro-fabricated with a single-side process from the wafer front-side. With wet anisotropic etch used to release the piezoresistive cantilevers, the new fabrication technique features low-cost and high-yield. Self-assembled with a novel dual-branch specific mono-layer, about 100ppt level trinitrotoluene (TNT) vapor has been rapidly and repeatedly detected.