Microfabricated Tuning Fork Temperature And Infrared Sensor

francis tsow,nongjian tao
DOI: https://doi.org/10.1063/1.2731313
IF: 4
2007-01-01
Applied Physics Letters
Abstract:The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 degrees C and with a thermal limited noise level of 5 mu degrees C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response. (c) 2007 American Institute of Physics.
What problem does this paper attempt to address?