C33 Study on polishing method of micro structured parts applying low frequency vibration

Weimin Lin,S. K. CHEE,Masakazu Fujimoto,Yongbo Wu,Hirofiimi SUZUKI,Toshiro HIGUCHI
DOI: https://doi.org/10.1299/jsmemmt.2012.9.181
2012-01-01
Abstract:In this paper, a two-dimensional low frequency vibration (LFV) polishing actuator using PZT is proposed and developed. The LFV consists of four mechanical amplitude magnified actuators, a multilayer stacked piezoelectric actuator (PZT) incorporated with mechanical transfc rmer, and a center piece. In the polishing experiments, HIPM workpieces were polished with WA slurry by the rotation & revolution type polishing method (RRP). The surface roughness of the work pieces and material removal amount (polished amount) was also evaluated. From the experimental results, it was found that the application of low frequency vibration is useful for realizing higher precision in the polishing of micro structured molds.
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