Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

Experimental Study of High-Frequency Vibration Assisted Micro/Mesoscale Forming of Metallic Materials

Effects of superimposed high-frequency vibration on deformation of aluminum in micro/meso-scale upsetting

Acoustic softening and hardening of aluminum in high-frequency vibration-assisted micro/meso forming

Micro Pin Extrusion of Metallic Materials Assisted by Ultrasonic Vibration

Research On High-Frequency Vibratory Stress Relief For Small Assembly

Mechanism and Experimental Research on High Frequency Vibratory Stress Relief

Modeling of Metallic Surface Topography Modification by High-Frequency Vibration

On the Size Effects in Micro/meso Semisolid Extrusion–forging of A356 Aluminum Alloy

Acoustic Softening and Residual Hardening in Aluminum: Modeling and Experiments

Study on Metal Forming Patterns of the Ultrasonic Vibration Assisted Upset-extruding Process

Experimental and Numerical Study of Forming Limit in 1060 Aluminum Ultrasonic Vibration Single Point Incremental Forming

Laser shock micro-bulk forming: Numerical simulation and experimental research

Laser shock micro-sheet bulk metal forming: numerical simulation and experimental validation

Influence of ultrasonic vibration on forming force of 1060 aluminum sheet single point incremental forming

Influence of dead metal zone on dislocation strengthening effect during micro-progressive forming

Experimental study on the forming process of spline by frequency and amplitude modulated axial vibration extrusion

Microstructure-driven mechanical and electromechanical phenomena in additively manufactured nanocrystalline zinc oxide

Understanding Effects of Ultrasonic Vibration on Microstructure Evolution in Hot Forming Process via Cellular Automata Method

Microstructure and Mechanical Property Characterizations of Metal Foil after Microscale Laser Dynamic Forming

Finite element simulation and experimental investigation on cutting mechanism in vibration-assisted micro-milling

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment