Abstract:Microstructured surfaces play a pivotal role in various fields, notably in lighting, diffuser devices, and imaging systems. The performance of these components is intricately related to the accuracy of their shapes and the quality of their surfaces. Although current precision machining technologies are capable of achieving conformal shapes, the post-machining surface quality often remains uncertain. To appropriately address this challenge, this paper introduces a novel conformal polishing methodology, specifically designed to enhance the surface quality of microstructured surfaces while maintaining their shape accuracy. As part of the investigations, specialized tools, namely the damping tool and profiling damping tool, are methodically developed for polishing rectangular and cylindrical surfaces. A shape evolution model is established based on the simulation of individual microstructures, incorporating the concept of finite-slip on the microstructured surface. The findings reveal that principal stresses and velocities experience abrupt variations at the convex and concave corners of rectangular surfaces as well as at the ends of cylindrical surfaces. The numerically predicted surface shape errors after polishing demonstrate reasonably good agreement with experimental results such that their discrepancies are less than 1 μm. Additionally, this method is able to successfully eradicate pre-machining imperfections such as residual tool marks and burrs on the microstructured surfaces. The arithmetic roughness ( R a) of the rectangular surface is measured to be an impressively low 0.4 nm, whereas the cylindrical surface exhibits R a=6.2 nm. These results clearly emphasize the effectiveness of the conformal polishing method in achieving high-quality surface finishes.

Research and application on the key techniques of conformal vibration polishing on optics

Analysis of the Smoothing Characteristics and Shape-Retaining Ability of Conformal Vibration Polishing and Suppression Strategy for Full-Spatial Frequency Errors of Optics

Smoothing Process of Conformal Vibration Polishing for Mid-Spatial Frequency Errors: Characteristics Research and Guiding Prediction.

Theoretical and experimental investigations on conformal polishing of microstructured surfaces

Research on Computer Controlled Optical Surfacing (CCOS) Working Function at Wear State

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

Mechanism of Mid-Spatial-frequency Waviness Removal by Viscoelastic Polishing Tool

Effects of Kinematics and Groove Parameters on the Mid-Spatial Frequency Error of Optics Induced During Full Aperture Polishing

Distortion of Removal Function Based on the Local Asphericity of Aspheric Surface and the Viscoelasticity of Polishing Tool in Computer-Controlled Optical Surfacing

Optimization of Removal Function Parameters in CCOS

Numerical Simulation and Experimental Study of Surface Waviness During Full Aperture Rapid Planar Polishing

Material removal profile prediction and experimental validation for obliquely axial ultrasonic vibration-assisted polishing of K9 optical glass

Edge Control in the Computer-Controlled Optical Surface

Research on computer controlled ultra-precision polishing of freeform surfaces

Suppressing Surface Low and Mid-Spatial Frequency Errors of Large Optics During Full-Aperture Rapid Polishing

Research and Progress of Rapid Polishing Technology for Large Aperture Optics

Review on Surface Polishing Methods of Optical Parts

Controllable Flexible Surface Polishing

Surface integrity and material removal mechanism in fluid jet polishing of optical glass

Study on force control in abrasive polishing of aspheric parts

Efficient full-aperture mirror polishing method with variable orbital radius in computer-controlled optical surfacing