Efficient full-aperture mirror polishing method with variable orbital radius in computer-controlled optical surfacing

Jianjie Zhou,Bo Li,Xinnan Li

DOI: https://doi.org/10.1364/oe.523657

IF: 3.8

2024-06-15

Optics Express

Abstract:Jianjie Zhou, Bo Li, Xinnan Li Optical systems in astronomy have extremely high requirements on the full-aperture surface precision and fabrication efficiency of ... [Opt. Express 32, 23865-23881 (2024)]

optics

What problem does this paper attempt to address?

The flexible optical manufacturing technologies for large aspheric mirror

杨力,郑耀,曾志革,姜文汉,袁家虎,伍凡

DOI: https://doi.org/10.3321/j.issn:1002-1582.2001.06.004

2001-01-01

Guangxue Jishu/Optical Technique

Abstract:The conception of flexible optical manufacturing technology was put forward. The technical characteristics of computer controlled optical surfacing (CCOS) and stressed lap were considered, and the optimum scheme in the polishing process of CCOS was discussed. The mathematical-physical model of stressed lap deformation and the simulated results of deformation in the 80% region and whole region caused by 12 drivers around the stressed lap were given. The engineering research work on a Φ500 mm stressed lap was introduced. The communication relationship between the CNC of machine tool and the stressed lap as well as the polishing process were investigated. The combining application of CCOS and stressed lap with classical method was presented. The investigation shows that the development of flexible optical manufacturing technology in the area of large mirror fabrication is a main tendency.
An on-line measuring technique for lapping large aspherical mirror

万勇建,范斌,袁家虎,杨力,郑耀,曾志革

DOI: https://doi.org/10.3969/j.issn.1003-501X.2005.01.001

2005-01-01

Abstract:A low-cost on-line measuring technique used in fine grinding phase of large aspherical mirror is proposed. The high-precision length-measuring apparatus is integrated into a common digital- controlled machine tool which forms an on-line measuring system. The on-line measurement is carried out through measuring various spatial point on the profile of a workpiece, and transforming the measured data and error compensation. Compared with Leize three-dimension measuring machine for measuring the same surface shape, the error P-V between two results is 4.0μm and RMS is 0.8μm. The on-line surface shape measurement is carried out on a common digital-controlled lapping machine tool and the measuring accuracy is better than 5μm.
Polishing Large-Aperture Mirror Using Ultra-Precise Bonnet and Psd Result Analysis

Wei Wang,Min Xu,Hongyu Li,Guoyu Yu

DOI: https://doi.org/10.1117/12.977788

2012-01-01

Abstract:As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 lambda and 1/75 lambda respectively.
Ultra-Precision Robotic Sub-Aperture Polishing Of Curved Mirrors

Songlin Wan,Xiangchao Zhang,Min Xu,Siping Peng,Jinsong Zhou

DOI: https://doi.org/10.1117/12.2506361

2019-01-01

Abstract:Industrial robots have great potential for efficient and flexible polishing of large optical components, but the low positioning accuracy and control stability limits the polishing form quality. A model is established to describe the pressure distribution at the edge based on FEA analysis, and the effects of form deviation between the workpiece and the polishing pad is also investigated, thus TIFs can be calculated reliably. Polishing paths are planned to avoid sharp turning angles and fast movement, which can lead to unstable material removal. The dwell time is calculated via deconvolution with the space-variant TIFs. Experiments are conducted and the results show that the edge-roll error is significantly reduced and the polishing time is saved by 80%. Hence the robotic polisher can be comparable to the conventional polishing machines, which has a great significance for the ultra-precision optical manufacturing.
Research and application on the key techniques of conformal vibration polishing on optics

Jing Hou,Shiwei Liu,Hongxiang Wang,Qinghua Zhang,Xianhua Chen,Defeng Liao,Bo Zhong

DOI: https://doi.org/10.1016/j.ijleo.2021.166995

IF: 3.1

2021-09-01

Optik

Abstract:In computer controlled optical surfacing (CCOS), the small-sized polishing tools make the process exhibit a weaker material removal capability and exacerbate the deterioration of mid-spatial frequency (MSF) errors. Consequently, this paper presents a full-aperture conformal vibration polishing method incorporating short-stroke forced vibration. The realization mechanism, removal ability and machining effect of it were expounded separately, and verified by experiments. The experimental results show that conformal vibration polishing can achieve uniform smoothing of the MSF errors without destroying the original surface shape while efficiently removing the materials. The conformal vibration polishing proposed in this paper not only extends the existing processing field, but also provides a new approach for the suppression of MSF errors.

optics
Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors

Hao-Bo Cheng,Zhi-Jing Feng,Kai Cheng,Ying-Wei Wang

DOI: https://doi.org/10.1016/j.ijmachtools.2004.11.018

IF: 10.331

2005-01-01

International Journal of Machine Tools and Manufacture

Abstract:The paper presents the design of a six-axis machining system and its application in fabricating large off-axis aspherical mirrors with sub-aperture lapping techniques. The new system is based on computer-controlled optical surfacing (CCOS), which combines the faculties of grinding, polishing, and on-machine profile measuring, has the features of conventional loose abrasive machining with the characteristics of a tool having multiple degrees of freedom moving in planar model. And a novel dual touch-trigger probe profiler is designed, which is composed of a probe, model METRO-MT60 made by HEIDENHAIN Co., is integrated into the system for measuring the shape accuracy of the tested aspherical surface, another probe modeled METRO-MT12 is designed as a calibrating device for minimizing the cosine error caused by assembly inaccuracy. The new CNC machining system with two kinds of moving coordinate systems, dual tool activities and on-machine measuring is presently developed based on the new concept. The general material removal function during machining is analyzed on the basis of the Preston hypothesis. Further, an alignment test of the measuring profiler is carried out using a leveling rule as a specimen. The accuracy of the optical surfaces measured by the dual probe profiler is found to be within 1μm PV after removing cosine error and error compensating, achieves to the resolving power of the profiler is about 0.2–0.5μm, so the developed system can be applied to the shape accuracy measuring of aspheric fabrication with micro precision during fine grinding process according to the calibrating results. Finally, the manufacturing experiments are carried out by virtue of an off-axis oblate ellipsoid mirror with rectangular aperture as 770mm×210mm and centered 127mm. The accuracy of the aspherical mirror improved from the initial form error of 17.648μmrms to the final one of 0.728μmrms after grinding for 200h.
Optimal strategy for fabrication of large aperture aspheric surfaces

Yunpeng Feng,Haobo Cheng,Tan Wang,Zhichao Dong,Hon-Yuen Tam

DOI: https://doi.org/10.1364/AO.53.000147

2014-01-01

Abstract:Aspheric surfaces are widely used because of their desirable characteristics. Such a surface can obtain nearly perfect imaging quality with fewer optical elements and reduce the size and mass of optical systems. Various machine systems have been developed based on modern deterministic polishing technologies for large aperture aspheric surfaces. Several factors affect the final precision of large aperture aspheric surfaces, such as the velocity limit of the machine and the path design. Excess velocity, which will be truncated automatically by the computer numerical control system, may cause the dwell time to deviate from the desired time. When a path designed on a two-dimensional surface map with equidistant pitch is projected onto an aspheric surface, the pitch changes as a result of the varied curvature of the aspheric surface. This may affect the removal map and cause some ripple errors. A multiregion distribution strategy, which includes velocity checking, is proposed in this study to avoid exceeding the velocity limits. The strategy can be used to modify local errors and edge effects. A three-dimensional spiral path generation method is also presented using an iterative method to ensure uniformity in the space length of the adjacent circle of the spiral path. This process can reduce the ripple error caused by the overlapping of tool paths. A polishing experiment was conducted, and the results proved the validity of the proposed strategies.
Research on Process Technology of Off-Axis Ellipsoid Aspheric Mirror

Dongmei Liu,Ke Ma,Zonghe Jia

DOI: https://doi.org/10.1117/12.2075789

2015-01-01

Abstract:In recent years, the off-axis aspheric surface is widely used in wide coverage and high-resolution space optical systems. In this paper, research on processing technology of high precision and high efficiency off-axis ellipsoid aspheric mirror was studied deeply. With the help of CNC milling and polishing machine, off-axis ellipsoid aspheric mirror with diameter of 58mm was developed, by optimizing the concentration of polish liquid, grinding size, machining direction and other process parameters, based on the disadvantage of traditional processing that off-axis aspheric is easy to generate edge splitting and secondary surface damage, a new processing method "vertical off-axis ellipsoid aspheric surface processing method" was put forward. This method not only ensures the accuracy of workpiece of optical axis, surface accuracy and accuracy of the edge, but also reduces secondary surface damage, improves processing efficiency and achieves high precision and high efficiency processing of off-axis ellipsoid aspheric surface, which is conducive to mass production. Through the detection of off-axis ellipsoid aspheric mirror by Taylor Profiler, surface accuracy (PV value) is 0.1981 mu m, the aspheric surface finish is level. and the optical axis accuracy is 0.01mm that it meets the requirements.
High-precision turning and ultra-smooth direct polishing of aluminum alloy mirrors

Peng Song,Chao Yang,Yang Bai,Jiawen Ding,Jie Guo,Chuang Li,Yuxuan Wang,Changxi Xue

DOI: https://doi.org/10.1364/OE.495779

IF: 3.8

2023-09-01

Optics Express

Abstract:Peng Song, Chao Yang, Yang Bai, Jiawen Ding, Jie Guo, Chuang Li, Yuxuan Wang, Changxi Xue Due to the high surface roughness requirements of aluminum alloy mirrors used in the visible light band, there are still great challenges ... [Opt. Express 31, 30340-30358 (2023)]

optics
Fabrication of Off-Axis Aspherical Mirrors with Loose Abrasive Point-Contact Machining

H Cheng,Z Feng,Y Wu

DOI: https://doi.org/10.4028/www.scientific.net/kem.257-258.153

2004-01-01

Key Engineering Materials

Abstract:In order to rapidly manufacture aspherical mirrors used for infrared reconnaissance and security cameras, a new fabrication technique, called as loose abrasive point-contact machining, is introduced in detail. The new technique is based on computer-controlled optical surfacing (CCOS). It has the features of conventional loose abrasive machining with the characteristics of a tool having multiple degrees of freedom moving in a planar mode. A new CNC machining system with two kinds of moving coordinate systems and dual tool activities is presently developed based on the new concept. The relationship between the motions of the tool and the workpiece during machining was analyzed on the basis of the Preston hypothesis followed by simulating the effect of the contact pressure. Experiments were carried out on the developed CNC system. The results indicated that the required convergent speed and precision could be achieved with high efficiency by utilizing the new technique. The accuracy of the aspherical mirror improved from the initial form error of 8.28 mu m to the final one of 1.71 mu m after machining for 70 hours.
Post Optical Freeform Compensation Technique for Machining Errors of Large-Aperture Primary Mirror

Cheng Huang,Jinpeng Li,Zhaohan Cai,Jiadong Yu,Yongjun Xie,Xianglong Mao

DOI: https://doi.org/10.3390/photonics10070768

IF: 2.536

2023-07-05

Photonics

Abstract:Large-aperture space optical systems are important tools for observing our planet and conducting deep-space scientific research. More requirements have been put forward for large-aperture optical systems as the depth and breadth of related applications continue to increase. However, achieving the desired surface accuracy on lightweight materials for large-aperture mirror brings higher demands on relevant processing technologies, which increases the processing difficulty, cycle, and cost of large-aperture optical systems. Therefore, it is necessary to develop a new optical system technique with high tolerance for primary mirror machining errors to significantly reduce its machining accuracy requirements. This paper proposes a new optical system technique which introduces a small-aperture free-form surface into the large-aperture optical system's post optical path. By combining the freeform correction and its misalignment on the system's aberrations, the system's wavefront can be adjusted to correct the wavefront distortion caused by the primary mirror's machining errors. This reduced the machining accuracy requirements of the large-aperture primary mirror by about one order of magnitude, and high-quality imaging with a low-precision primary mirror is achieved.

optics
Fabrication of Large Aspheric Mirror Using Multi-Mode Polishing Based on Error Separation

LIU Zhen-yu,LI Long-xiang,ZENG Xue-feng,LUO Xiao,ZHANG Xue-jun

DOI: https://doi.org/10.3788/ope.20172504.0813

2017-01-01

Abstract:In order to improve material removal efficiency and error map convergence efficiency of large aspheric mirror, a multi-mode technique was introduced based on the separation of high and low order errors.First, the effect of tool size on period of surface error was analyzed.Then the convergence efficiency and dwell time between small and big polishing heads were compared.According to the error features during the fabrication process of large aspheric mirror, the surface error map was divided to low-order and high-order frequency errors.The dwell time of different tools was calculated.Accordingly multi-mode polishing strategy was employed in terms of the low order and high order errors, thus improving the processing efficiency.A large aspheric mirror with the aperture of 2.04 m was polished by the multi-mode technique.The result shows that the convergence rate is 61.2% in a single polishing circle.The low-order and high-order frequency errors are well removed, and the material removal efficiency and error map convergence efficiency are improved.Good processing results are achieved, which meet the demand of fabrication.
Dwell Time Algorithm for Multi-Mode Optimization in Manufacturing Large Optical Mirrors

Zhenyu Liu

DOI: https://doi.org/10.1117/12.2069763

2014-01-01

Abstract:CCOS (Computer Controlled Optical Surfacing) is one of the most important method to manufacture optical surface. By controlling the dwell time of a polishing tool on the mirror we can get the desired material removal. As the optical surface becoming larger, traditional CCOS method can’t meet the demand that manufacturing the mirror in higher efficiency and precision. This paper presents a new method using multi-mode optimization. By calculate the dwell time map of different tool in one optimization cycle, the larger tool and the small one have complementary advantages and obtain a global optimization for multi tool and multi-processing cycles. To calculate the dwell time of different tool at the same time we use multi-mode dwell time algorithm that based on matrix calculation. With this algorithm we did simulation experiment, the result shows using multi-mode optimization algorithm can improve the efficiency maintaining good precision.
Process Chain for Ultra-Precision and High-Efficiency Manufacturing of Large-Aperture Silicon Carbide Aspheric Mirrors

Bo Zhong,Wei Wu,Jian Wang,Lian Zhou,Jing Hou,Baojian Ji,Wenhui Deng,Qiancai Wei,Chunjin Wang,Qiao Xu

DOI: https://doi.org/10.3390/mi14040737

IF: 3.4

2023-03-28

Micromachines

Abstract:A large-aperture silicon carbide (SiC) aspheric mirror has the advantages of being light weight and having a high specific stiffness, which is the key component of a space optical system. However, SiC has the characteristics of high hardness and multi-component, which makes it difficult to realize efficient, high-precision, and low-defect processing. To solve this problem, a novel process chain combining ultra-precision shaping based on parallel grinding, rapid polishing with central fluid supply, and magnetorheological finishing (MRF) is proposed in this paper. The key technologies include the passivation and life prediction of the wheel in SiC ultra-precision grinding (UPG), the generation and suppression mechanism of pit defects on the SiC surface, deterministic and ultra-smooth polishing by MRF, and compensation interference detection of the high-order aspheric surface by a computer-generated hologram (CGH). The verification experiment was conducted on a Ø460 mm SiC aspheric mirror, whose initial surface shape error was 4.15 μm in peak-to-valley (PV) and a root-mean-square roughness (Rq) of 44.56 nm. After conducting the proposed process chain, a surface error of RMS 7.42 nm and a Rq of 0.33 nm were successfully obtained. Moreover, the whole processing cycle is only about 216 h, which sheds light on the mass production of large-aperture silicon carbide aspheric mirrors.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Systematic Modeling and Rapid Control for Diamond Machining of Periodical Optical Surface

Fang Duan,Wu-Le Zhu,Anyu Sun,Bing-Feng Ju

DOI: https://doi.org/10.1016/j.jmapro.2020.05.003

IF: 5.684

2020-01-01

Journal of Manufacturing Processes

Abstract:Spiral path based fast tool servo diamond turning technique is currently considered to be an efficient method for precision machining of micro-lens arrays. However, due to the inherent structural and methodological drawbacks, such as tracking bandwidth limitation, the system nonlinearity, it is still a great challenge for controllable fabrication of micro-lens arrays especially with complex geometry. To extend both the capability and accuracy, two aspects involving cutting method and control strategy are proposed in this paper. Firstly, the concept of the fast servo-assisted rotary cutting approach is introduced. Due to the unique diamond cutting approach, the fast servo trajectory features the characteristic of quasi-periodicity, and accordingly an advantageous terminal sliding mode repetitive control strategy is designed to realize high closed-loop tracking bandwidth and robustness against the variant system uncertainties and force disturbances during the cutting process. Then, the effectiveness is verified by the experiments on the diamond machine with respect to tracking accuracy, characteristic parameters as well as surface form error. Through comprehensive characterization and comparisons, the proposed diamond machining system with the controller is demonstrated to be able to substantially improve the machining performance of complex periodical optical surfaces.
Precision polishing of the mandrel for X-ray grazing incidence mirrors

Fuchang Zuo,Liansheng Li,Zhiwu Mei,Hao Hu,Loulou Deng,Yueming Li,Renke Kang,Jun Xie,Yongqiang Shi,Jianwu Chen

DOI: https://doi.org/10.1007/s00170-021-07185-1

IF: 3.563

2021-05-11

The International Journal of Advanced Manufacturing Technology

Abstract:Based on chemical-mechanical polishing, a precision polishing method is proposed to accommodate the polishing of the paraboloid surface of the specified mandrel for grazing incidence X-ray mirrors. The influencing factors in the polishing are analyzed to confirm the method complies with the Preston equation and Hertz contact theory. Therefore, the common material removal model based on these two theories is adopted. The effects of processing parameters, such as the force F between the mandrel and the polishing lap, the rotational speed n of the mandrel, and the axial speed va of the polishing lap, on the material removal rate are simulated, respectively. A polishing setup is established to carry out experimental polishing to verify the optimum processing parameters obtained by simulations and previous polishing tests. Besides, the effect of abrasive particle size on the roughness is also verified. The roughness of the polished mandrel is measured at different positions, and the optimum roughness reaches Ra 0.659 nm. The polishing approach can significantly reduce the surface roughness of the replication mandrel, satisfying the low energy band focusing requirement of grazing incidence X-ray mirrors.

engineering, manufacturing,automation & control systems
Fabrication of a Free-Form Lens with Computer-Controlled Optical Surfacing

ZJ Feng,HZ Wu,ZY Guo,GM Zhao,Y Zhang

DOI: https://doi.org/10.1117/12.402792

2000-01-01

Abstract:Though Optical lens with free-form lens(FFL) can be significantly used in optical rectification, it is very difficult to manufacture it. Computer-controlled optical surfacing technology is used to fabricate it efficiently. In the stage of figuring FFL, the component is fixed with vacuum flat sucking disk, then ground by the progressive mode while the abrasion wheel is trimmed on-line. A lapping and polishing tool that conforms to the shape of FFL is used to finish the optical mirror. Because FFL has no any constraints, general interferogram technique can not be applied to its measurement and the accuracy of three-coordinate measuring machine is too low. So a high-precision measurement method based on image conversion is developed to measure the surface. Generally speaking, the precision after forming is under tens of micron. Then the error correction technology is employed to improve surface precision. Getting input controlled variables from error dot matrix involves deconvolution. Least-square filtration is used to solve deconvolution and wavelet analysis is used to filter fringe and tip. Then the surface after error correction is measured again. So a closed loop is formed. The accuracy of optical mirror in our experiment is under 4 mu m while Ra is under 5nm.
Integration of Metrology in Grinding and Polishing Processes for Rotationally Symmetrical Aspherical Surfaces with Optimized Material Removal Functions

Ravi Pratap Singh,Yaolong Chen

DOI: https://doi.org/10.3390/mi15101276

IF: 3.4

2024-10-22

Micromachines

Abstract:Aspherical surfaces, with their varying curvature, minimize aberrations and enhance clarity, making them essential in optics, aerospace, medical devices, and telecommunications. However, manufacturing these surfaces is challenging because of systematic errors in CNC equipment, tool wear, measurement inaccuracies, and environmental disturbances. These issues necessitate precise error compensation to achieve the desired surface shape. Traditional methods for spherical optics are inadequate for aspherical components, making accurate surface shape error detection and compensation crucial. This study integrates advanced metrology with optimized material removal functions in the grinding and polishing processes. By combining numerical control technology, computer technology, and data analysis, we developed CAM software (version 1) tailored for aspherical surfaces. This software uses a compensation correction algorithm to process error data and generate NC programs for machining. Our approach automates and digitizes the grinding and polishing process, improving efficiency and surface accuracy. This advancement enables high-precision mass production of rotationally symmetrical aspherical optical components, addressing existing manufacturing challenges and enhancing optical system performance.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Equivalent thin-plate method for stressed mirror polishing of an off-axis aspheric silicon carbide lightweight mirror

Liqi Yi,Xuejun Zhang,Haifei Hu,Zhiyu Zhang,Xuefeng Zeng,Xiao Luo,Donglin Xue,Ge Zhang

DOI: https://doi.org/10.1364/OE.410759

IF: 3.8

2020-11-17

Optics Express

Abstract:Liqi Yi, Xuejun Zhang, Haifei Hu, Zhiyu Zhang, Xuefeng Zeng, Xiao Luo, Donglin Xue, Ge Zhang No physical model of stressed mirror polishing, based on the small deflection and deformation of elastic thin plates, has been applied in ... [Opt. Express 28, 36413-36431 (2020)]

optics
Novel Disc Hydrodynamic Polishing Process and Tool for High-Efficiency Polishing of Ultra-Smooth Surfaces

Bin Lin,Xiang-Min Jiang,Zhong-Chen Cao,Yan Li

DOI: https://doi.org/10.3390/mi9070333

2018-07-02

Abstract:Nowadays, large aspheric surfaces, including non-rotationally symmetric surfaces, are increasingly used in ground- and space-based astronomical instruments. The fabrication of these surfaces with sub-micrometric form accuracy and nanometric surface finish, especially for hard and difficult-to-machine materials, has always been a challenge to the optics industry. To produce ultra-smooth surfaces efficiently without subsurface damage and surface scratches, a novel disc hydrodynamic polishing (DHDP) process is proposed through the combination of elastic emission machining and fluid jet polishing. Firstly, the polishing tool for DHDP was carefully designed and the feasibility of the proposed method was experimentally verified. The liquid film was found to act as a carrier of abrasive grains between the polishing tool and the polished surface. Next, computational fluid dynamics (CFD) was used to study the effects of process parameters on the slurry film flow in DHDP. Finally, preliminary experiments were conducted to verify the CFD simulations. The experimental data reasonably agree with the simulation results, which show that increasing rotational speed has no influence on the film thickness for the polishing tool without grooves, but leads to increased film thickness for the polishing tool with grooves. Moreover, DHDP can efficiently reduce the surface roughness and acquire ultra-smooth surfaces without subsurface damage and scratches.

Efficient full-aperture mirror polishing method with variable orbital radius in computer-controlled optical surfacing

The flexible optical manufacturing technologies for large aspheric mirror

An on-line measuring technique for lapping large aspherical mirror

Polishing Large-Aperture Mirror Using Ultra-Precise Bonnet and Psd Result Analysis

Ultra-Precision Robotic Sub-Aperture Polishing Of Curved Mirrors

Research and application on the key techniques of conformal vibration polishing on optics

Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors

Optimal strategy for fabrication of large aperture aspheric surfaces

Research on Process Technology of Off-Axis Ellipsoid Aspheric Mirror

High-precision turning and ultra-smooth direct polishing of aluminum alloy mirrors

Fabrication of Off-Axis Aspherical Mirrors with Loose Abrasive Point-Contact Machining

Post Optical Freeform Compensation Technique for Machining Errors of Large-Aperture Primary Mirror

Fabrication of Large Aspheric Mirror Using Multi-Mode Polishing Based on Error Separation

Dwell Time Algorithm for Multi-Mode Optimization in Manufacturing Large Optical Mirrors

Process Chain for Ultra-Precision and High-Efficiency Manufacturing of Large-Aperture Silicon Carbide Aspheric Mirrors

Systematic Modeling and Rapid Control for Diamond Machining of Periodical Optical Surface

Precision polishing of the mandrel for X-ray grazing incidence mirrors

Fabrication of a Free-Form Lens with Computer-Controlled Optical Surfacing

Integration of Metrology in Grinding and Polishing Processes for Rotationally Symmetrical Aspherical Surfaces with Optimized Material Removal Functions

Equivalent thin-plate method for stressed mirror polishing of an off-axis aspheric silicon carbide lightweight mirror

Novel Disc Hydrodynamic Polishing Process and Tool for High-Efficiency Polishing of Ultra-Smooth Surfaces