Fabrication of Large Aspheric Mirror Using Multi-Mode Polishing Based on Error Separation

LIU Zhen-yu,LI Long-xiang,ZENG Xue-feng,LUO Xiao,ZHANG Xue-jun
DOI: https://doi.org/10.3788/ope.20172504.0813
2017-01-01
Abstract:In order to improve material removal efficiency and error map convergence efficiency of large aspheric mirror, a multi-mode technique was introduced based on the separation of high and low order errors.First, the effect of tool size on period of surface error was analyzed.Then the convergence efficiency and dwell time between small and big polishing heads were compared.According to the error features during the fabrication process of large aspheric mirror, the surface error map was divided to low-order and high-order frequency errors.The dwell time of different tools was calculated.Accordingly multi-mode polishing strategy was employed in terms of the low order and high order errors, thus improving the processing efficiency.A large aspheric mirror with the aperture of 2.04 m was polished by the multi-mode technique.The result shows that the convergence rate is 61.2% in a single polishing circle.The low-order and high-order frequency errors are well removed, and the material removal efficiency and error map convergence efficiency are improved.Good processing results are achieved, which meet the demand of fabrication.
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