Fabrication of a 4 m SiC Aspheric Mirror Using an Optimized Strategy of Dividing an Error Map

Zhenyu Liu,Longxiang Li,Erhui Qi,Haixiang Hu,Xiao Luo

DOI: https://doi.org/10.3390/photonics11020125

IF: 2.536

2024-01-30

Photonics

Abstract:This paper introduces an optimization strategy for fabricating large aspheric mirrors. We polished a large SiC aspheric mirror, 4 m in diameter, achieving a surface error of 1/40λ RMS. To the best of our knowledge, this is the first instance of such a result for a mirror of this material and size combination. Due to the various performance settings of different tools, achieving optimal polishing results with a single setting is challenging. We evaluated the performance of various tool settings and developed an optimization strategy, dividing error maps to enhance efficiency in large-aperture aspheric mirror fabrication. We established the relationship between tool size and its error control capability. The residual error map of the mirror was divided into two parts using Zernike polynomial expansion based on the frequency order of the error map. Here, we used the first 36 terms of the Zernike polynomial fit to define a low-order error map, and the residual error was used to define a high-order error map. Large tools were used to correct the low-order frequency error map, whereas small tools were used to correct the high-order frequency error map. Therefore, the original residual error map could be corrected with significantly high efficiency. By employing this strategy, we fabricated a 4 m SiC aspheric mirror in 18 months, achieving a final surface error better than 0.024λ RMS.

optics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is: in the manufacturing of large - aperture aspheric mirrors, how to improve the machining efficiency and precision through optimization strategies. Specifically, in view of the challenges encountered in the manufacturing process of 4 - meter - diameter silicon carbide (SiC) aspheric mirrors, the authors proposed an optimization strategy based on error map segmentation to achieve efficient surface error correction.

### Main problems:
1. **Balance between material removal rate and machining precision**: As the mirror aperture increases, especially for high - hardness materials such as SiC, it is necessary to ensure the machining precision while maintaining a high material removal rate.
2. **Relationship between tool size and error control ability**: Tools of different sizes show different effects when removing errors of different frequencies. Although large - size tools can remove materials quickly, they have poor precision when dealing with high - frequency errors; small - size tools are the opposite.
3. **Effective processing of complex error maps**: The actual error maps contain a variety of complex factors. In particular, the error periods of large - aperture aspheric mirrors may range from a few millimeters to several meters, and it is difficult for a single - size tool to achieve high - efficiency and high - precision machining.

### Solutions:
The authors proposed an optimization strategy based on error map segmentation. The specific steps are as follows:

1. **Error map decomposition**: Use Zernike polynomials to divide the error map into low - frequency and high - frequency parts. The low - frequency error is described by the first 36 Zernike polynomials, and the high - frequency error is the remaining part.

\[
Z(\rho, \varphi) =
\begin{cases}
R_n^m(\rho) \cos(m\varphi), & m > 0 \\
R_n^{-m}(\rho) \sin(-m\varphi), & m < 0 \\
R_n^0(\rho), & m = 0
\end{cases}
\]

where the expression of \( R_n^m(\rho) \) is:

\[
R_n^m(\rho) = \sum_{k = 0}^{\frac{n - m}{2}} (-1)^k \frac{(n - k)!}{k! \left( \frac{n + m}{2} - k \right)! \left( \frac{n - m}{2} - k \right)!} \rho^{n - 2k}
\]

2. **Tool selection**: Use large - size tools (such as 600mm, 400mm) to correct low - frequency errors, and use small - size tools (such as 100mm and MRF, IBF technologies) to correct high - frequency errors.

3. **Optimization algorithm**: Calculate the optimal dwell time distribution through computer - controlled optical surface processing (CCOS) technology to achieve efficient material removal.

### Experimental verification:
To verify the effectiveness of this strategy, the authors conducted experiments on a 4 - meter - diameter SiC parabolic mirror. The results show that through this optimization strategy, the surface error can be reduced to better than 0.024λRMS within 18 months, significantly improving the machining efficiency and precision.

In conclusion, this paper aims to solve the contradiction between the material removal rate and the machining precision in the manufacturing of large - aperture aspheric mirrors, and achieves efficient and high - precision surface error correction through the error map segmentation strategy.