Abstract:In recent years, major projects, such as National Ignition Facility and Laser Mégajoule, have generated great demands for large aperture optics with high surface accuracy and low Subsurface Damage (SSD) at the mean time. In order to remove SSD and improve surface quality, optics is fabricated by sub-aperture polishing. However, the efficiency of the sub-aperture polishing has been a bottleneck step for the optics manufacturing. Atmospheric Pressure Plasma Processing (APPP) as an alternate method offers high potential for speeding up the polishing process. This technique is based on chemical etching, hence there is no physical contact and no damage is induced. In this paper, a fast polishing machine tool is presented which is designed for fast polishing of the large aperture optics using APPP. This machine tool employs 3PRS-XY hybrid structure as its framework. There is a platform in the 3PRS parallel module to support the plasma generating system. And the large work piece is placed on the XY stage. In order to realize the complex motion trajectory for polishing the freeform optics, five axis of the tool operate simultaneously. To overcome the complexity of inverse kinematics calculation, a dedicated motion control system is also designed for speeding up the motion response. For high removal rate, the individual influence of several key processing parameters is investigated. And under specific production condition, this machine tool offers a high material over 30mm3/min for fused silica substrates. This results shows that APPP machine tool has a strong potential for fast polishing large optics without introducing SSD.

S1402-3-4 Development of a Rotation/revolution Type Polishing Machine and Its Performance

D34 Development of a Disk Top Rotation/revolution Type Polishing Machine for Aspherical Lens

Discussions on On-Machine Measurement of Aspheric Lens-Mold Surface

Influences of polishing tool's shape on surface roughness in magneto-rheological finishing

Mechanical Design of New Type Ceramic Polishing Machine

Development of Atmospheric Pressure Plasma Processing Machine Tool for Large Aperture Optics

Development of a Novel Rotation-Revolution Ultraprecision Conformal Belt Grinding Based on Commercial Robot for Optical Elements

A Novel Precision Face Grinder for Advanced Optic Manufacture

Novel Disc Hydrodynamic Polishing Process and Tool for High-Efficiency Polishing of Ultra-Smooth Surfaces

Development and Polishing Process of a Mobile Robot Finishing Large Mold Surface

Fundamental research on aspheric surface polishing using doughnut-shaped MCF polishing tool

Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation

Fundamental Investigation on the Polishing Aspheric Elements with Doughnut-Shaped MCF Slurry

Design of Synchronized Polishing Machine for the Inner and Outer Surface of Ring-component

Full Aperture Super-Smooth Polishing and Surface Topology Evolution of the Mandrels for X-ray Optics Used in Extp Mission

Design of an Ultraprecision Computerized Numerical Control Chemical Mechanical Polishing Machine and Its Implementation

Tilt angle correction based forming algorithm for high steepness aspheric surfaces polishing

Magnetorheological Finishing of Optical Surface Combined with Symmetrical Tool Function

Pressure-Based Grinding and Polishing of Free-Form Lenses with Spherical Tools

A Novel Method of Bonnet Polishing for Aspheric Surface

Integration of Metrology in Grinding and Polishing Processes for Rotationally Symmetrical Aspherical Surfaces with Optimized Material Removal Functions