Pressure-Based Grinding and Polishing of Free-Form Lenses with Spherical Tools

Y Zhang,ZJ Feng,HY Tam,YB Wu

DOI: https://doi.org/10.4028/www.scientific.net/kem.257-258.401

2004-01-01

Key Engineering Materials

Abstract:This paper proposes a new ultra-precision machining method, i.e. pressure-based grinding and polishing with oblique axis spherical tools, for free-form lenses. The method is based on controlling the normal contact force between the tool and the workpiece. By employing grinding and polishing tools made from elastic materials, the normal contact force is easy to be controlled by monitoring the elastic deformation of the tool. The method takes advantages of the fact that more material can be removed by increasing the normal contact force. In the present work, material removal in the work zone on the workpiece surface was first established through theoretically modeling and experimentation. Subsequently, the iterative calculation of the machining force was presented. Experiments were then carried out using an experimental apparatus built in house. As validation of the proposed method, a 132x168 mm free form correcting lens of glass, used in an exposure process for the manufacture of TV fluorescent screens, was successfully ground and polished. The form error of the correcting lens was reduced from 2.039 mu m to 0.857 mu m. The resulting roughness R-a was 5.76 nm.