Abstract:With the widespread application of various small aspheric optical components,high-precision manufacturing technology of forming molds is deeply demanded.However,the ultra-precision grinding technology of small aspheric moulds is still undeveloped in domestic research.An ultra-precision single-point grinding technique and profile error compensation mode of aspheric mould are studied.Through processing the measured data generated from contact on-machine measurement,the actual ground profile is reconstructed.Normal residual error is obtained through calculating the normal distance between actual ground profile and target profile,subsequently,a compensation method of profile error based on ultra-precision single-point inclined axis grinding is proposed.An experimental test is conducted to grind an aspheric tungsten carbide mould of aperture 6 mm,and the profile accuracy is gradually improved from peak to valley 449 nm to 182 nm after two-time compensation cycle.

Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method for Machining Aspheric Mould