Synthesis of the Thermoelectric Thin Films of Ca3Co4O9 and Ca3Co2O6 Using Pulsed-Laser Deposition Techniques

Zhi Dong Li,Dong Wu,Kun Yu Zhao,Hui Zhang
DOI: https://doi.org/10.4028/www.scientific.net/amr.531.484
2012-01-01
Advanced Materials Research
Abstract:Thermoelectric ceramic targets of Ca3Co4O9and Ca3Co2O6were prepared by the sol-gel method. The technology and mechanism of synthesizing the thermoelectric thin films of Ca3Co4O9and Ca3Co2O6were investigated. The thin films of Ca3Co4O9and Ca3Co2O6were grown on (0001)-oriented (c-cut) Al2O3substrates by pulsed-laser deposition techniques (PLD). Ca3Co4O9thin films grown at substrate temperature of 700°C and 800 °C appear to be obviously c-axis-oriented. But the x-ray diffraction peak of Ca3Co2O6thin films was not confirmed. Ca3Co4O9thin films and Ca3Co2O6thin films exhibited Ca elements and Co elements volatilization at high temperatures.
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