Study on the Thermoelectric Thin Films of Ca_3Co_4O_9 Using Pulsed-laser Deposition Techniques

吴东,李智东,赵昆渝,张辉,葛振华,张鹏翔

DOI: https://doi.org/10.3969/j.issn.1004-2474.2010.02.039

2010-01-01

Abstract:The thermoelectric ceramic target material of Ca3Co4O9 was prepared by the solid reaction method and the Sol-Gel method.The technology and mechanism of synthesizing the thermoelectric thin films of the Ca3Co4O9 were investigated.On this basis,by selecting the appropriate target,the thin films of the Ca3Co4O9 were grown on(0001)-oriented(c-cut) Al2O3 substrates by the pulsed-laser deposition techniques(PLD).The effects of the target material and the preparation process on the phase,microstructure and morphology were analyzed by XRD,metallograph,SEM and so on.The temperature dependence of the resistivity was measured by a standard four probes method,The results showed that the thin films exhibited obviously semiconductor behavior.