Investigation of proton irradiation induced E<sub>C</sub>-0.9 eV traps in AlGaN/GaN high electron mobility transistors
Pengfei Wan,Weiqi Li,Xiaodong Xu,Yadong Wei,Hao Jiang,Jianqun Yang,Guojian Shao,Gang Lin,Chao Peng,Zhangang Zhang,Xingji Li
DOI: https://doi.org/10.1063/5.0103302
IF: 4
2022-01-01
Applied Physics Letters
Abstract:Electron traps in AlGaN/GaN high electron mobility transistors were studied by combining theoretical and experimental methods. Energy levels about E-C-0.9 eV due to irradiation are identified by deep-level transient spectroscopy (DLTS). Two electron traps, H1 (E-C-0.63 eV) and H-2 (E-C-0.9 eV), were observed in the DLTS spectra. H1 was produced in device or material manufacturing, and H2 was caused by displacement damage. First, we reported that the signal peak of H2 can contribute from three defects labeled H2-1, H2-2, and H2-3 with energies E-C-0.77 eV, E-C-0.9 eV, and E-C-0.98 eV, respectively. According to defect migration temperature and first principles calculation results, it is found that different configurations of di-nitrogen vacancy structures are the source of E-C-0.77 eV and E-C-0.9 eV signals. The defect of E-C-0.98 eV is more stable at high temperatures, which may be related to gallium vacancy.