Abstract:High spatial frequency laser induced periodic surface structures (HSFLs) on silicon substrates are often developed on flat surfaces at low fluences near ablation threshold of 0.1 J/cm2, seldom on microstructures or microgrooves at relatively higher fluences above 1 J/cm2. This work aims to enrich the variety of HSFLs-containing hierarchical microstructures, by femtosecond laser (pulse duration: 457 fs, wavelength: 1045 nm, and repetition rate: 100 kHz) in liquids (water and acetone) at laser fluence of 1.7 J/cm2. The period of Si-HSFLs in the range of 110-200 nm is independent of the scanning speeds (0.1, 0.5, 1 and 2 mm/s), line intervals (5, 15 and 20 μm) of scanning lines and scanning directions (perpendicular or parallel to light polarization direction). It is interestingly found that besides normal HSFLs whose orientations are perpendicular to the direction of light polarization, both clockwise or anticlockwise randomly tilted HSFLs with a maximal deviation angle of 50° as compared to those of normal HSFLSs are found on the microstructures with height gradients. Raman spectra and SEM characterization jointly clarify that surface melting and nanocapillary waves play important roles in the formation of Si-HSFLs. The fact that no HSFLs are produced by laser ablation in air indicates that moderate melting facilitated with ultrafast liquid cooling is beneficial for the formation of HSFLs by LALs. On the basis of our findings and previous reports, a synergistic formation mechanism for HSFLs at high fluence was proposed and discussed, including thermal melting with the concomitance of ultrafast cooling in liquids, transformation of the molten layers into ripples and nanotips by surface plasmon polaritons (SPP) and second-harmonic generation (SHG), and modulation of Si-HSFLs direction by both nanocapillary waves and the localized electric field coming from the excited large Si particles.

Femtosecond Laser-Induced Silicon Surface Morphology in Water

Femtosecond Laser-Induced Silicon Surface Morphology in Water Confinement

Micron-scale Modifications Ofsisurface Morphology by Pulsed-Laser Texturing

Silicon Surface Morphologies after Femtosecond Laser Irradiation

Mechanism of Femtosecond-Laser-induced Periodic Nanostructure Formation on Crystalline Silicon Surface Immersed in Water

Progressive Evolution of Silicon Surface Microstructures Via Femtosecond Laser Irradiation in Ambient Air

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Asymmetric Femtosecond Laser Ablation of Silicon Surface Governed by the Evolution of Surface Nanostructures

Hierarchical Microstructures with High Spatial Frequency Laser Induced Periodic Surface Structures Possessing Different Orientations Created by Femtosecond Laser Ablation of Silicon in Liquids

Femtosecond Laser-Induced Mesoporous Structures on Silicon Surface

Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed Laser

Superhydrophobic Surfaces Prepared by Microstructuring of Silicon Using a Femtosecond Laser.

Influence of liquid environments on femtosecond laser ablation of silicon

Morphological Features of Silicon Substrate by Using Different Frequency Laser Ablation in Air and Water

Ultrafast Dynamics of Femtosecond Laser-Induced High Spatial Frequency Periodic Structures on Silicon Surfaces

Femtosecond laser-induced dewetting of sub-10-nm nanostructures on silicon in ambient air

Femtosecond Laser Induced Surface Structuring on Silicon by Diffraction-Assisted Micropatterning

Textures Induced by a Femtosecond Laser on Silicon Surfaces under Various Environments

Liquid-assisted laser nanotexturing of silicon: onset of hydrodynamic processes regulated by laser-induced periodic surface structures

Fabrication of Two-Dimensional Periodic Structures on Silicon after Scanning Irradiation with Femtosecond Laser Multi-Beams

Direct Writing of Sub-Wavelength Ripples on Silicon Using Femtosecond Laser at High Repetition Rate