Optimization of Subthreshold Swing and Hysteresis in Hf 0.5 Zr 0.5 O 2 -Based MoS 2 Negative Capacitance Field-Effect Transistors by Modulating Capacitance Matching

Xiaowei Guo,Fang Wang,Zexia Ma,Xin Shan,Xin Lin,Yujing Ji,Xuanyu Zhao,Yulin Feng,Yemei Han,Yangyang Xie,Zhitang Song,Kailiang Zhang
DOI: https://doi.org/10.1021/acsami.3c04595
IF: 9.5
2023-06-21
ACS Applied Materials & Interfaces
Abstract:Negative capacitance field effect transistors made of Hf(0.5)Zr(0.5)O(2) (HZO) are one of the most promising candidates for low-power-density devices because of the extremely steep subthreshold swing and high open-state currents resulting from the addition of ferroelectric materials in the gate dielectric layer. In this paper, HZO thin films were prepared by magnetron sputtering combined with rapid thermal annealing. Their ferroelectric properties were adjusted by changing the annealing...
materials science, multidisciplinary,nanoscience & nanotechnology
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