Negative Capacitance 2d Mos2 Transistors With Sub-60mv/Dec Subthreshold Swing Over 6 Orders, 250 Mu A/Mu M Current Density, And Nearly-Hysteresis-Free

Zhihao Yu,Hanchen Wang,Weisheng Li,Sheng Xu,Xiongfei Song,Shuxian Wang,Peng Wang,Peng Zhou,Yi Shi,Yang Chai,Xinran Wang
DOI: https://doi.org/10.1109/iedm.2017.8268448
2017-01-01
Abstract:To realize steep-slope MoS2 n-type FET, we fabricate negative capacitance FET (NCFET) structure using ferroelectric HfZrOx (HZO)/AlOx as dielectric layer. The MoS2 NCFET devices exhibit ultra-low subthreshold swing (SS) of 23 mV/dec, sub-60mV/dec over 6 orders of I-D, nearly hysteresis-free up to V-DS=1V, small vertical bar V-th vertical bar <0.4V, I-ON/I-OFF ratio > 10(9), and small DIBL of 25 mV/V. Importantly, we can modulate 5 orders of ID using a gate drive of 232 mV, clearly demonstrating the potential of MoS2 NCFET for low-power electronics applications. Furthermore, compared to normal MoS2 FET with 11.2 nm equivalent oxide thickness (EOT), the NCFET achieve 60% improvement in I-D (250 mu A/mu m) and 4 times improvement in transconductance.
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