Negative Capacitance 2D MoS2 Transistors with Sub-60Mv/dec Subthreshold Swing over 6 Orders, 250 Μa/μm Current Density, and Nearly-Hysteresis-free

Zhihao Yu,Hanchen Wang,Weisheng Li,Sheng Xu,Xiongfei Song,Shuxian Wang,Peng Wang,Peng Zhou,Yi Shi,Yang Chai,Xinran Wang
DOI: https://doi.org/10.1109/iedm.2017.8268448
2017-01-01
Abstract:To realize steep-slope MoS2 n-type FET, we fabricate negative capacitance FET (NCFET) structure using ferroelectric HfZrOx (HZO)/AlOx as dielectric layer. The MoS2 NCFET devices exhibit ultra-low subthreshold swing (SS) of 23 mV/dec, sub-60mV/dec over 6 orders of Id, nearly hysteresis-free up to V ds = 1V, small |V th | <0.4V, I on /I off ratio >10 9 , and small DIBL of 25 mV/V. Importantly, we can modulate 5 orders of Id using a gate drive of 232 mV, clearly demonstrating the potential of MoS2 NCFET for low-power electronics applications. Furthermore, compared to normal MoS 2 FET with 11.2 nm equivalent oxide thickness (EOT), the NCFET achieve 60% improvement in Id (250 μA/μm) and 4 times improvement in transconductance.
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