Inhibiting Effects of the Ni Barrier Layer on the Growth of Porous Cu3Sn in 10-Μm Microbumps

Liu Siyan,Yang Chenlin,Ling Huiqin,Hu Anmin,Hang Tao,Gao Liming,Li Ming
DOI: https://doi.org/10.1007/s10854-021-06301-x
2021-01-01
Journal of Materials Science Materials in Electronics
Abstract:With the shrinkage of size, porous Cu 3 Sn has become a new potential threat of the reliability in Cu pillar microbump. The formation of porous Cu 3 Sn is caused by the decomposition of Cu 6 Sn 5 after Sn atoms in solder depletion. Besides, the stress introduced by the phase transition from η -Cu 6 Sn 5 to η′ -Cu 6 Sn 5 will promote the formation of porous Cu 3 Sn. In this paper, uniform Ф10 µm Cu/Sn and Cu/Ni (~ 0.6 μm)/Sn microbumps have been fabricated by multilayer electrodeposition and the effect of the Ni layer on the growth behavior of porous Cu 3 Sn was investigated by comparing IMCs’ (Intermetallic Compound) evolution in Cu/Sn and Cu/Ni/Sn bumps aged at 170 °C and 200 °C. The ~ 0.6 μm Ni barrier layer can effectively retard the Cu atoms diffusion, which can hinder IMC from overgrowth. Moreover, the results of X-ray diffraction indicate that the ability of the Ni layer can stabilize Cu 6 Sn 5 phase and weakens the tendency of the porous Cu 3 Sn formation. Under the conjoint action of retarding the growth of IMC and stabilizing Cu 6 Sn 5 phase, the Ni layer can inhibit the formation of porous Cu 3 Sn efficaciously.
What problem does this paper attempt to address?