Abstract:The paper presents an overview of the new micro-scale experimental mechanics concepts,methods and devices of optical and scanning microscopic stages developed at photomechanical laboratory of Tsinghua University.The research includes micro speckle interferometry,micro marker method,optical probe method,grain deformation and movement analysis.In particular,it also describes several devices and measurement systems developed in our group,which are double-field-of-view speckle interferometer for thin film tensile test,microscopic speckle interferometry which enables an alternative usage of conventional specular interferometry(CSI),ESPI,TSIP and phase shifting for micro-object shape,in-plane and out-of-plane displacement measurements,micro marker measuring stage for local zone deformation measurement,uniaxial tensile setups using in AFM and SEM measuring stages for micro-objects and thin films testing and other instruments for micro-objects testing,such as positioning and loading system,micro force sensor and programmable driving systems of translation platform and displacement sensor.To prove the applicability of these methods and devices,some applications of measurement examples are given and the problems and further research on micro-scale experimental mechanics are discussed.

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Sinusoidal Phase-Modulated Angle Interferometer for Angular Vibration Measurement.

A High-Frequency Angular Vibration Calibration System Based on Phase Modulated Laser Interferometer Technique

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Real-time Micro-vibration Measurement Based on Digital Holographic Interferometry

Micro-vibration measuring technology based on heterodyne interference

High/Low-Precision Digital Speckle Pattern Interferometry for Vibration Measurement

Real-Time Micro-Vibration Multi-Spot Synchronous Measurement Within A Region Based On Heterodyne Interference

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Velocity measurement of MEMS with temporal heterodyne microscopic speckle interferometry

Panoramic amplitude-fluctuation electronic speckle pattern interferometry system for inner vibration measurement

Rapid Measuring Method of Micro-Motion Based on Time-Averaged Microscopic Interferometry

Low-frequency harmonic vibration analysis with temporal speckle pattern interferometry

Long distance real-time measurement of multi-points micro-vibration in region by digital holography

Vibration measurement of a miniature component by high-speed image-plane digital holographic microscopy.

Vibration Analysis Based on Electronic Stroboscopic Speckle--Shearing Pattern Interferometry

Laser Self-Mixing Interferometry for Micro-Vibration Measurement Based on Inverse Hilbert Transform

Real-Time Micro-Vibration Measurement With Laser Phase Modulation

Micro-displacement measurement of optical interference with two-ring conjugated vortices

Quantitative phase retrieval in dynamic laser speckle interferometry

Out-of-Plane Motion Measurement Method of Micro-Structures Based on Time-Averaged Interferometry