The Design of Bi-Layer Vertical Grating Coupler for the Hybrid Integration of VCSEL with Stable Polarization on Silicon Photonics

Xiyu Zhang,Yisu Yang,Kai Liu,Yongqing Huang,Xiaofeng Duan,Xiaomin Ren

2019-01-01

Abstract:We propose a bi-layer vertical grating coupler for the integration of VCSEL on silicon photonics. The design maintains the polarization of VCSEL in TE mode and provide a -3.6 dB VC SEL-to-chip coupling efficiency.

What problem does this paper attempt to address?

High-efficiency Dual-Layer Grating Coupler for Vertical Fiber-Chip Coupling in Two Polarizations

Ke Li,Jingping Zhu,Qihang Duan,Xun Hou

DOI: https://doi.org/10.1364/josaa.487739

2023-01-01

Abstract:Efficient coupling between optical fibers and high-index-contrast silicon waveguides is essential for the development of integrated nanophotonics. Herein, a high-efficiency dual-layer grating coupler is demonstrated for vertical polarization-diversity fiber-chip coupling. The two waveguide layers are orthogonally distributed and designed for y- and x-polarized LP01 fiber modes, respectively. Each layer consists of two 1D stacked gratings, allowing for both perfectly vertical coupling and high coupling directionality. The gratings are optimized using the particle swarm algorithm with a preset varying trend of parameters to thin out the optimization variables. The interlayer thickness is determined to ensure efficient coupling of both polarizations. The optimized results exhibit record highs of 92% (−0.38dB) and 85% (−0.72dB) 3D finite-difference time-domain simulation efficiencies for y and x polarizations, respectively. The polarization-dependent loss (PDL) is below 2 dB in a 160 nm spectral bandwidth with cross talk between the two polarizations less than −24dB. Fabrication imperfections are also investigated. Dimensional offsets of ±10nm in etching width and ±8 nm in lateral shift are tolerated for a 1 dB loss penalty. The proposed structure offers an ultimate solution for polarization diversity coupling schemes in silicon photonics with high directionality, low PDL, and a possibility to vertically couple.
Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency

Chung-Chih Lin,Yen-Cheng Lu,Yu-Hsuan Liu,Likarn Wang,Neil Na

DOI: https://doi.org/10.3390/s23104662

IF: 3.9

2023-05-12

Sensors

Abstract:An efficient optical coupler to transfer the signal between an optical fiber and a silicon waveguide is essential for realizing the applications of silicon photonic integrated circuits such as optical communication and optical sensing. In this paper, we numerically demonstrate a two-dimensional grating coupler based on a silicon-on-insulator platform to obtain completely vertical and polarization-independent couplings, which potentially ease the difficulty of packaging and measurement of photonic integrated circuits. To mitigate the coupling loss induced by the second-order diffraction, two corner mirrors are respectively placed at the two orthogonal ends of the two-dimensional grating coupler to create appropriate interference conditions. Partial single-etch is assumed to form an asymmetric grating to obtain high directionalities without a bottom mirror. The two-dimensional grating coupler is optimized and verified with finite-difference time-domain simulations, achieving a high coupling efficiency of −1.53 dB and a low polarization-dependent loss of 0.015 dB when coupling to a standard single-mode fiber at approximately 1310 nm wavelength.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Efficient Hybrid Integration of Long-Wavelength VCSELs on Silicon Photonic Circuits

Ziliang Ruan,Yuntao Zhu,Pengxin Chen,Yaocheng Shi,Sailing He,Xinlun Cai,Liu

DOI: https://doi.org/10.1109/jlt.2020.2999526

IF: 4.7

2020-01-01

Journal of Lightwave Technology

Abstract:An efficient integration scheme for a vertical cavity surface emission laser (VCSEL) on a silicon photonic circuit is introduced. A grating coupler fabricated on a tilted silicon membrane is used to couple the vertical emission of the VCSEL to the in-plane silicon waveguide with a high coupling efficiency and a low reflection back to the laser. Single-mode and single-polarization VCSELs at 1310nm wavelength band are flip-chip bonded on the silicon photonic chip. A coupling efficiency of -5.8dB is measured at the laser wavelength and a high optical power of 0.66mW is coupled to the silicon waveguide. Data transmission up to 10Gb/s with direct current modulation is realized using the integrated VCSEL. All the structures in the present coupling scheme are massively producible, and the hybrid integration of VCSELs relies on a standard high-accuracy flip-chip process with passive alignment.
Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

Ye Luo,Chunlei Sun,Hui Ma,Maoliang Wei,Jialing Jian,Chuyu Zhong,Junying Li,Renjie Tang,Zequn Chen,Kathleen A. Richardson,Hongtao Lin,Lan Li

DOI: https://doi.org/10.3390/photonics9020094

IF: 2.536

2022-01-01

Photonics

Abstract:The interlayer coupler is one of the critical building blocks for optical interconnect based on multilayer photonic integration to realize light coupling between stacked optical waveguides. However, commonly used coupling strategies, such as evanescent field coupling, usually require a close distance, which could cause undesired interlayer crosstalk. This work presents a novel interlayer slope waveguide coupler based on a multilayer chalcogenide glass photonic platform, enabling light to be directly guided from one layer to another with a large interlayer gap (1 µm), a small footprint (6 × 1 × 0.8 µm3), low propagation loss (0.2 dB at 1520 nm), low device processing temperature, and a high bandwidth, similar to that in a straight waveguide. The proposed interlayer slope waveguide coupler could further promote the development of advanced multilayer integration in 3D optical communications systems.
High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

Xiangyu Luo,Guangcan Mi,Yanbo Li,Tao Chu

DOI: https://doi.org/10.1364/ol.452054

IF: 3.6

2022-01-01

Optics Letters

Abstract:We experimentally demonstrated a high-efficiency grating coupler by combining an interleaved etch and apodized structure for fiber-to-chip coupling. The grating coupler was optimized using the fast directional optimization method to achieve apodization. The grating coupler utilized a layout strategy involving an extended mask to avoid alignment errors for a multi-etch structure. The coupling efficiency was measured to be -2.2 dB at a wavelength of 1549 nm with a 3 dB bandwidth of 47 nm. The grating coupler, having no gold reflector, subwavelength index matching structure, or additional material layers, was fabricated using a commercial silicon photonics process with a minimum feature size of 140 nm. This grating coupler design provides a robust and effective coupling scheme and the proposed method can be employed to adopt the design in accordance with standard foundry design rules.
High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/ol.42.003391

IF: 3.6

2017-01-01

Optics Letters

Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.
Design of High-Efficiency Fully-Etched Binary Blazed Gratings Nearly Vertical Coupler

Wei Zhou,Junbo Yang,Hualiang Zhang,Xiujian Li,Juncai Yang

DOI: https://doi.org/10.1109/lpt.2012.2193667

IF: 2.6

2012-01-01

IEEE Photonics Technology Letters

Abstract:m A high-efficiency binary blazed grating nearly vertical coupler with fully-etched spacing is proposed, which can be fabricated in one lithography step integrated with other SOI components. For transverse-electric polarized incident light, the coupling efficiencies from a fiber to waveguide are 59.2% at a wavelength of 1550 nm and 76.9% at 1563 nm, respectively. A 3-dB bandwidth of 33 nm from 1546 to 1579 nm is also obtained. The numerical simulation also shows that the tolerances of 19 nm in etched depth and 6.5 degrees in incident angle are achievable.
Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Bin Shen,Hongtao Lin,Florian Merget,Saeed Sharif Azadeh,Chao Li,Guo-Qiang Lo,Kathleen A. Richardson,Juejun Hu,Jeremy Witzens

DOI: https://doi.org/10.1364/oe.27.013781

IF: 3.8

2019-01-01

Optics Express

Abstract:We report on the design, fabrication and testing of three types of coupling structures for hybrid chalcogenide glass Ge23Sb7S70-Silicon (GeSbS-Si) photonic integrated circuit platforms. The first type is a fully etched GeSbS grating coupler defined directly in the GeSbS film. Coupling losses of 5.3 dB and waveguide-to-waveguide back-reflections of 3.4% were measured at a wavelength of 1553 nm. Hybrid GeSbS-to-Si butt couplers and adiabatic couplers transmitting light between GeSbS and Si single-mode waveguides were further developed. The hybrid butt couplers (HBCs) feature coupling losses of 2.7 dB and 9.2% back-reflection. The hybrid adiabatic couplers (HACs) exhibit coupling losses of 0.7 dB and negligible back-reflection. Both HBCs and HACs have passbands exceeding the 100 nm measurement range of the test setup. GeSbS grating couplers and GeSbS-to-Si waveguide couplers can be co-fabricated in the same process flow, providing, for example, a means to first couple high optical power levels required for nonlinear signal processing directly into GeSbS waveguides and to later transition into Si waveguides after attenuation of the pump. Moreover, GeSbS waveguides and HBC transitions have been fabricated on post-processed silicon photonics chips obtained from a commercially available foundry service, with a previously deposited 2 μm thick top waveguide cladding. This fabrication protocol demonstrates the compatibility of the developed integration scheme with standard silicon photonics technology with a complete back-end-of-line process.
Highly Efficient and Perfectly Vertical Chip-To-Fiber Dual-Layer Grating Coupler

Ming Dai,Leilei Ma,Yelong Xu,Minghui Lu,Xiaoping Liu,Yanfeng Chen

DOI: https://doi.org/10.1364/oe.23.001691

IF: 3.8

2015-01-01

Optics Express

Abstract:A novel high-efficiency silicon-chip-to-fiber grating coupler is investigated here. By introducing a dual layer grating structure with an inter-layer lateral shift to mimic 45° tilted mirror behavior, perfectly vertical coupling is successfully demonstrated. Our numerical results show that a peak silicon-chip-to-fiber coupling efficiency about 70% is possible near 1550 nm. Meanwhile, for the entire telecom C-band, i.e. wavelengths from 1530 nm to 1565 nm, the coupling efficiency is > 50% and the back reflection is less than < 1%. Our proposed high-performance silicon perfectly vertical coupling structure is suitable for interfacing with multi-core fiber platform, which may play an important role in the future CMOS photonic integration technology.
Tri-layer Gradient and Polarization-Selective Vertical Couplers for Interlayer Transition.

Ningfeng Bai,Xiaotao Zhu,Yijun Zhu,Wei Hong,Xiaohan Sun

DOI: https://doi.org/10.1364/oe.397543

IF: 3.8

2020-01-01

Optics Express

Abstract:We demonstrate and optimize a tri-layer vertical coupler for a silicon nitride (Si3N4) multilayer platform operating at a 2 µm band. The large spacing between the topmost and bottommost layers of a gradient structure enables ultra-low crossing loss and interlayer crosstalk without affecting the efficiency interlayer transition. We achieve a 0.31 dB transition loss, ultra-low multi-layer crosstalk of -59.3 dB at a crossing angle of 90° with an interlayer gap of 2300 nm at 1950nm. With width optimization of this structure, the fabrication tolerances toward lateral misalignment of two stages in this coupler have increased 61% and 56%, respectively. We also propose a vertical coupler, based on this design, with mode selectivity and achieve an extinction ratio of < 15 dB for wavelengths in the 1910-1990 range. Meanwhile, a multi-layer interlaced AWGs centered at 1950nm and based on vertical coupler has been demonstrated. The proposed vertical couplers exhibit potential for application in large-scale photonic-integrated circuits and broadly in photonic devices.
High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Zhang Can,Sun Jing-Hua,Xiao Xi,Sun Wei-Min,Zhang Xiao-Jun,Chu Tao,Yu Jin-Zhong,Yu

DOI: https://doi.org/10.1088/0256-307x/30/1/014207

2013-01-01

Chinese Physics Letters

Abstract:A high efficiency grating coupler between single-mode fiber and silicon-on-insulator waveguide is designed by a formula method. Over 78.5% coupling efficiency (>−1.05 dB) with 3 dB bandwidth about 50 nm for one grating coupler is obtained experimentally and this result is the highest one as far as we know. This grating coupler is CMOS compatible which needs only one etch-step and is designed for a standard SOI chip without any Bragg reflector or bottom reflector.
Vertical Coupling Between Waveguides and Optical Fibers Utilizing Polarization Gratings

Xiangyu Xue,Enes Lievens,Brecht Berteloot,Yu-Tung Hsiao,Lukas Van Iseghem,Gilles Freddy Feutmba,Wim Bogaerts,Kristiaan Neyts,Jeroen Beeckman

DOI: https://doi.org/10.1109/lpt.2024.3352278

IF: 2.6

2024-02-02

IEEE Photonics Technology Letters

Abstract:We present how a conventional Si waveguide grating coupler can be integrated with a polymerizable liquid crystal polarization grating to provide vertical coupling between optical fibers and planar waveguides. The implementation involves the deposition of a liquid crystal polymer film onto the surface of the planarized photonic chip. To achieve optimal performance, both the period and thickness of the thin film grating are optimized through a two-dimensional finite element simulation. The simulation results indicate that the output beam can be entirely redirected towards the vertical direction. We demonstrate a fabricated device and experimental validation of the proposed device in a laboratory setting. Through the verification, we affirm the feasibility of the proposed concept.

engineering, electrical & electronic,optics,physics, applied
Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure

Liu Liu,Jianhao Zhang,Chenzhao Zhang,Siya Wang,Chichao Jin,Yujie Chen,Kaixuan Chen,Tuowen Xiang,Yaocheng Shi

DOI: https://doi.org/10.1364/OL.41.000820

IF: 3.6

2016-01-01

Optics Letters

Abstract:A grating coupler for interfacing between a silicon-on-insulator waveguide and a single-mode fiber located at a perfectly vertical direction is demonstrated based on a tilted membrane structure. The proposed design is compatible with that of conventional grating couplers for oblique fibers and facilitates mass production. A peak coupling efficiency of 28.5% and 1 dB bandwidth of 38 nm are obtained experimentally for transverse-electrics polarized light. Back reflection in the SOI waveguide is also estimated to be 1.4%. The present grating coupler for perfectly vertical fiber exhibits similar performances to the conventional grating coupler for oblique fiber concerning coupling efficiency, bandwidth, and back reflections. (C) 2016 Optical Society of America
Inverse design of near unity efficiency perfectly vertical grating couplers

Andrew Michaels,Eli Yablonovitch

DOI: https://doi.org/10.1364/OE.26.004766

2018-02-19

Abstract:Efficient coupling between integrated optical waveguides and optical fibers is essential to the success of silicon photonics. While many solutions exist, perfectly vertical grating couplers that scatter light out of a waveguide in the direction normal to the waveguide's top surface are an ideal candidate due to their potential to reduce packaging complexity. Designing such couplers with high efficiencies, however, has proven difficult. In this paper, we use inverse electromagnetic design techniques to optimize a high efficiency two-layer perfectly vertical silicon grating coupler. Our base design achieves a chip-to-fiber coupling efficiency of 99.2% (-0.035 dB) at 1550 nm. Using this base design as a starting point, we run subsequent constrained optimizations to realize vertical couplers with coupling efficiencies over 96% and back reflections of less than -40 dB which can be fabricated using 65 nm-resolution lithography. These results demonstrate a new path forward for designing fabrication-tolerant ultra high efficiency grating couplers.
Polarization-independent Grating Coupler Based on Silicon-on-insulator

Jingjing Zhang,Junbo Yang,Huanyu Lu,Wenjun Wu,Jie Huang,Shengli Chang

DOI: https://doi.org/10.3788/col201513.091301

2015-01-01

Abstract:A novel and simple polarization independent grating couplers is designed and analyzed here, in which the TE polarization and the TM polarization light can be simultaneously coupled into a silicon waveguide along the same direction with high coupling efficiency. For the polarization-insensitive grating coupler, the coupling efficiencies of two orthogonal polarizations light are more than 60% at 1550 nm wavelength based on our optimized design parameters including grating period, etching height, filling factor, and so on. For TE mode the maximum efficiency is similar to 72% with more than 30 nm 1 dB bandwidth, simultaneously, for TM mode the maximum efficiency is 75.15% with 40 nm 1 dB bandwidth. Their corresponding wavelength difference between two polarizations' coupling peaks is demonstrated to be 35 nm. Polarization independent grating coupler designed here can be widely used in optical communication and optical information processing.
Vertical Coupling and Polarization-Independent Subwavelength Grating Beam Splitter Based on Silicon-On-Insulator

Jingjing Zhang,Junbo Yang,Huanyu Lu,Wenjun Wu,Jie Huang,Shengli Chang

DOI: https://doi.org/10.1117/12.2209534

2015-01-01

Abstract:We describe a novel beam splitter with advantages of a single-layer, compact and vertical coupling structure, which is based on Bragg diffraction conditions and phase match equation. FDTD method is used to optimize the design of beam splitter. The result of simulation shows that both polarizations incident light are separated into two beams of nearly equal power (near 43% split and 45% split, respectively), which are coupled into opposite directions in the waveguide. For TE mode, the coupling efficiency of the right direction and the left direction are 42.54% and 43.68, respectively. That of TM mode is 46.03% and 44.07%, respectively. The power difference for two polarizations of two output port is less than 1% and 2%, in addition, 40nm and 65nm bandwidth is achieved.
Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Siya Wang,Yue Hong,Yuntao Zhu,Jingye Chen,Shengqian Gao,Xinlun Cai,Yaocheng Shi,Liu

DOI: https://doi.org/10.1364/oe.25.022032

IF: 3.8

2017-01-01

Optics Express

Abstract:A compact, high-efficiency grating coupler is demonstrated for interfacing a silicon waveguide and a perfectly-vertical fiber at O-band. The grating lies on a tilted silicon membrane for minimizing the reflections. Circular grating lines are adopted to shorten the overall device length to about 60μm. 57% peak coupling efficiency and >28nm 1-dB coupling bandwidth are obtained experimentally. Back reflections of 1% to the silicon waveguide and the single mode fiber are theoretically estimated. The processing flow to realize the proposed structure is discussed in detail. The fabrication control over the tilted angle of the silicon membrane is investigated. The approach by applying an oxide cladding to improve the stability of the membrane is also introduced. The present grating coupler is compatible to common fabrication processes for silicon photonic chips.
Experimental Demonstration of Efficient and Polarization-Diversity Fiber-Chip Coupling by 2D Grating Couplers with 193-nm DUV Lithography

Wu Zhou,Yeyu Tong

2024-07-20

Abstract:Two-dimensional (2D) diffractive gratings offer a polarization-independent coupling solution between optical fibers and photonic integrated circuits, with advantages including placement flexibility, ease of fabrication, and tolerance to alignment errors. In this work, we proposed and experimentally demonstrated a highly efficient 2D grating coupler fabricated with 193-nm deep-ultraviolet (DUV) lithography on the 220-nm silicon-on-insulator (SOI) platform. An experimental peak coupling efficiency of -2.54 dB can be obtained using a minimum feature size of 180 nm, relying on the novel double-layer 2D grating structure. The proposed 2D waveguide grating is composed of a 70-nm shallow-etched hole array and a 160-nm-thick deposited polycrystalline silicon tooth array. The demonstrated design exhibits a 3-dB bandwidth of 23.4 nm with good positioning tolerance for optical fibers. Due to the benefits of perfectly vertical coupling configuration, the measured polarization-dependent loss in experiments is below 0.3 dB within the 3-dB working bandwidth. Our proposed double-layer 2D gratings can also be applied to other integrated optics platforms, where the grating directionality can be enhanced by optimizing the front-end-of-line process to break the vertical symmetry, thus enabling an efficient and polarization-independent coupling between optical fibers and photonic chips.

Optics,Applied Physics
High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections

li yu,lu liu,zhiping zhou,xingjun wang

DOI: https://doi.org/10.1016/j.optcom.2015.06.003

IF: 2.4

2015-01-01

Optics Communications

Abstract:The high-efficiency binary blazed grating couplers with perfectly vertical and nearly vertical coupling are proposed. The efficiencies of them are much higher than those of other types of grating couplers without bottom mirrors under vertical and oblique incidence respectively. For perfectly vertical coupler with transverse-electric polarized incident light, the coupling efficiency, which is defined as the ratio between the power coupled to the fundamental mode of the chip waveguide and that carried by the fundamental mode of the input optical fiber, is 75%, while the nearly vertical coupler with the incident angle of 10.2° has a coupling efficiency of 84%. Rigorous coupled-wave diffraction analysis and a complete optimization method have been used to make the optimal design valid and unique.
Multi-layer Silicon Nitride-on-silicon Polarization-Independent Grating Couplers.

Jason C. C. Mak,Wesley D. Sacher,Huang Ying,Xianshu Luo,Patrick Guo-Qiang Lo,Joyce K. S. Poon

DOI: https://doi.org/10.1364/oe.26.030623

IF: 3.8

2018-01-01

Optics Express

Abstract:A polarization-independent grating coupler is proposed and demonstrated in a 3-layer silicon nitride-on-silicon photonic platform. Polarization independent coupling was made possible by the supermodes and added degrees of geometric freedom unique to the 3-layer photonic platform. The grating was designed via optimization algorithms, and the simulated peak coupling efficiency was -2.1 dB with a 1 dB polarization dependent loss (PDL) bandwidth of 69 nm. The fabricated grating couplers had a peak coupling efficiency of -4.8 dB with 1 dB PDL bandwidth of over 100 nm.

The Design of Bi-Layer Vertical Grating Coupler for the Hybrid Integration of VCSEL with Stable Polarization on Silicon Photonics

High-efficiency Dual-Layer Grating Coupler for Vertical Fiber-Chip Coupling in Two Polarizations

Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency

Efficient Hybrid Integration of Long-Wavelength VCSELs on Silicon Photonic Circuits

Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Design of High-Efficiency Fully-Etched Binary Blazed Gratings Nearly Vertical Coupler

Broadband Couplers for Hybrid Silicon-Chalcogenide Glass Photonic Integrated Circuits

Highly Efficient and Perfectly Vertical Chip-To-Fiber Dual-Layer Grating Coupler

Tri-layer Gradient and Polarization-Selective Vertical Couplers for Interlayer Transition.

High Efficiency Grating Coupler for Coupling Between Single-Mode Fiber and SOI Waveguides

Vertical Coupling Between Waveguides and Optical Fibers Utilizing Polarization Gratings

Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure

Inverse design of near unity efficiency perfectly vertical grating couplers

Polarization-independent Grating Coupler Based on Silicon-on-insulator

Vertical Coupling and Polarization-Independent Subwavelength Grating Beam Splitter Based on Silicon-On-Insulator

Compact High-Efficiency Perfectly-Vertical Grating Coupler on Silicon at O-band.

Experimental Demonstration of Efficient and Polarization-Diversity Fiber-Chip Coupling by 2D Grating Couplers with 193-nm DUV Lithography

High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections

Multi-layer Silicon Nitride-on-silicon Polarization-Independent Grating Couplers.