Abstract:Silicon nitride (Si3N4) is an ideal candidate for the development of low-loss photonic integrated circuits. However, efficient light coupling between standard optical fibers and Si3N4 chips remains a significant challenge. For vertical grating couplers, the lower index contrast yields a weak grating strength, which translates to long diffractive structures, limiting the coupling performance. In response to the rise of hybrid photonic platforms, the adoption of multi-layer grating arrangements has emerged as a promising strategy to enhance the performance of Si3N4 couplers. In this work, we present the design of high-efficiency surface grating couplers for the Si3N4 platform with an amorphous silicon (α-Si) overlay. The surface grating, fully formed in an α-Si waveguide layer, utilizes subwavelength grating (SWG)-engineered metamaterials, enabling simple realization through single-step patterning. This not only provides an extra degree of freedom for controlling the fiber–chip coupling but also facilitates portability to existing foundry fabrication processes. Using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations, a metamaterial-engineered grating coupler is designed with a coupling efficiency of −1.7 dB at an operating wavelength of 1.31 μm, with a 1 dB bandwidth of 31 nm. Our proposed design presents a novel approach to developing high-efficiency fiber–chip interfaces for the silicon nitride integration platform for a wide range of applications, including datacom and quantum photonics.

Multi-layer Silicon Nitride-on-silicon Polarization-Independent Grating Couplers.

Tri-layer Gradient and Polarization-Selective Vertical Couplers for Interlayer Transition.

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Polarization-independent one-dimensional grating coupler design on hybrid silicon/LNOI platform.

Dual-layer Polarization Beam Splitting Grating Coupler with Low Polarization Dependent Loss

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Dual-Wavelength-Band Multiplexed Grating Coupler on Multilayer SiN-on-SOI Photonic Integrated Platform

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency

Polarization-Independent 1d Grating Coupler Design On The Hybrid Si-Lnoi Platform

C- and O-Band Dual-Polarization Fiber-to-Chip Grating Couplers for Silicon Nitride Photonics

High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides.

High-efficiency Apodized-Imaging Chip-Fiber Grating Coupler for Silicon Nitride Waveguides

High-efficiency Grating Coupler Based on Fast Directional Optimization and Robust Layout Strategy in 130 Nm CMOS Process.

High-Efficiency and Polarization-Insensitive Grating Couplers on Thin-Film Lithium Niobate Waveguides

Silicon and Silicon Nitride Based Bilayer Polarization-insensitive Optical Filter

Cmos-Compatible High Efficiency Polarization Splitting Grating Coupler Near 1310Nm

High-Efficiency Metamaterial-Engineered Grating Couplers for Silicon Nitride Photonics

Interlayer Slope Waveguide Coupler for Multilayer Chalcogenide Photonics

Polarization-independent Fiber-Chip Grating Couplers Optimized by the Adaptive Genetic Algorithm.

An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform